Abstract: In one embodiment, a first storage storing writing data, a second storage storing correction data for correcting an error in a writing position due to factors including bending of the substrate, a cell data allocator virtually dividing a writing region of the substrate into blocks, and allocating a cell to the blocks in consideration of the correction data, a plurality of bitmap data generators virtually dividing the blocks into meshes, calculating an irradiation amount per mesh region, and generating bitmap data which assigns the irradiation amount to each mesh region, and a shot data generator generating shot data that defines an irradiation time for each beam. The cell data allocator virtually divides the writing region by division lines in a direction different from a writing forward direction to generate a plurality of division regions. The plurality of bitmap data generators generate pieces of bitmap data of the different division regions.

Abstract: In one embodiment, a first storage storing writing data, a second storage storing correction data for correcting an error in a writing position due to factors including bending of the substrate, a cell data allocator virtually dividing a writing region of the substrate into blocks, and allocating a cell to the blocks in consideration of the correction data, a plurality of bitmap data generators virtually dividing the blocks into meshes, calculating an irradiation amount per mesh region, and generating bitmap data which assigns the irradiation amount to each mesh region, and a shot data generator generating shot data that defines an irradiation time for each beam. The cell data allocator virtually divides the writing region by division lines in a direction different from a writing forward direction to generate a plurality of division regions. The plurality of bitmap data generators generate pieces of bitmap data of the different division regions.

Abstract: A charged particle beam writing apparatus includes a processing circuitry configured to calculate a third proximity effect correction irradiation coefficient where at least one correction irradiation coefficient term up to k-th order term, in correction irradiation coefficient terms of from a first order term to a n-th order term for a first proximity effect correction irradiation coefficient which does not take account of a predetermined effect, are replaced by at least one correction irradiation coefficient term up to the k-th order term, for a second proximity effect correction irradiation coefficient which takes account of the predetermined effect; and a processing circuitry configured to calculate a dose by using the third proximity effect correction irradiation coefficient.

Abstract: A charged particle beam writing apparatus includes a processing circuitry configured to calculate a third proximity effect correction irradiation coefficient where at least one correction irradiation coefficient term up to k-th order term, in correction irradiation coefficient terms of from a first order term to a n-th order term for a first proximity effect correction irradiation coefficient which does not take account of a predetermined effect, are replaced by at least one correction irradiation coefficient term up to the k-th order term, for a second proximity effect correction irradiation coefficient which takes account of the predetermined effect; and a processing circuitry configured to calculate a dose by using the third proximity effect correction irradiation coefficient.

Abstract: A sizing agent-coated carbon fiber bundle has a sizing agent containing an aliphatic epoxy compound (C) and an aromatic epoxy compound (D) coated on the carbon fiber bundle, wherein the carbon fiber in the carbon fiber bundle is the one which exhibits, when measured by single-fiber composite fragmentation method, a number of fiber breaks of at least 2.0/mm when apparent single-fiber stress is 15.3 GPa and the number of fiber breaks of up to 1.7/mm when the apparent single-fiber stress is 12.2 GPa.

Abstract: A sizing agent-coated carbon fiber bundle has a sizing agent containing an aliphatic epoxy compound (C) and an aromatic epoxy compound (D) coated on the carbon fiber bundle, wherein the carbon fiber in the carbon fiber bundle is the one which exhibits, when measured by single-fiber composite fragmentation method, a number of fiber breaks of at least 2.0/mm when apparent single-fiber stress is 15.3 GPa and the number of fiber breaks of up to 1.7/mm when the apparent single-fiber stress is 12.2 GPa.

Abstract: A method of manufacturing a polyacrylonitrile fiber includes a spinning process in which a spinning dope including polyacrylonitrile is spun; a first drawing process; a drying process; and a second hot drawing process in this order.

Abstract: A method of manufacturing a polyacrylonitrile fiber includes a spinning process in which a spinning dope including polyacrylonitrile is spun; a first drawing process; a drying process; and a second hot drawing process in this order.

Abstract: A process for producing polyacrylonitrile-base precursor fibers for production of carbon fibers, which comprises spinning a spinning dope containing 10 to 25 wt % of a polyacrylonitrile-base polymer having an intrinsic viscosity of 2.0 to 10.0 by extruding the spinning dope from a spinneret by a wet spinning or a dry wet spinning method, drying and heat-treating fibers obtained by the spinning, and then steam drawing the resulting fibers, wherein the linear extrusion rate of the polyacrylonitrile-base polymer from the spinneret is 2 to 15 m/min.

Abstract: A process for producing polyacrylonitrile-base precursor fibers for production of carbon fibers, which comprises spinning a spinning dope containing 10 to 25 wt % of a polyacrylonitrile-base polymer having an intrinsic viscosity of 2.0 to 10.0 by extruding the spinning dope from a spinneret by a wet spinning or a dry wet spinning method, drying and heat-treating fibers obtained by the spinning, and then steam drawing the resulting fibers, wherein the linear extrusion rate of the polyacrylonitrile-base polymer from the spinneret is 2 to 15 m/min. Carbon fibers which are produced by stabilizing-carbonizing treatment of the polyacrylonitrile-base precursor fibers and which have a strand tensile modulus of 320 to 380 GPa and a conduction electron density of 3.0×1019 to 7.0×1019 spins/g as determined by electron spin resonance.

Abstract: A process for producing polyacrylonitrile-base precursor fibers for production of carbon fibers, which comprises spinning a spinning dope containing 10 to 25 wt % of a polyacrylonitrile-base polymer having an intrinsic viscosity of 2.0 to 10.0 by extruding the spinning dope from a spinneret by a wet spinning or a dry wet spinning method, drying and heat-treating fibers obtained by the spinning, and then steam drawing the resulting fibers, wherein the linear extrusion rate of the polyacrylonitrile-base polymer from the spinneret is 2 to 15 m/min. Carbon fibers which are produced by stabilizing-carbonizing treatment of the polyacrylonitrile-base precursor fibers and which have a strand tensile modulus of 320 to 380 GPa and a conduction electron density of 3.0×1019 to 7.0×1019 spins/g as determined by electron spin resonance.

Abstract: A method for calculating area values of a pattern written by using a charged particle beam, includes virtually dividing a pattern into a plurality of mesh-like first square regions surrounded by first grids defined at intervals of a predetermined size, virtually dividing the pattern into a plurality of mesh-like second square regions surrounded by second grids defined at intervals of the predetermined size, wherein the second grids being positionally deviated from the first grids by a half of the predetermined size, distributing an area value of a sub-pattern in each of the second square regions to a plurality of apexes of each of the second square regions such that a center-of-gravity position of the sub-pattern does not change, wherein the sub-pattern being a part of the pattern, and outputting the distributed area values as area values, for correcting a proximity effect, defined at the center position of each of the first square regions.

Abstract: A method for calculating area values of a pattern written by using a charged particle beam, includes virtually dividing a pattern into a plurality of mesh-like first square regions surrounded by first grids defined at intervals of a predetermined size, virtually dividing the pattern into a plurality of mesh-like second square regions surrounded by second grids defined at intervals of the predetermined size, wherein the second grids being positionally deviated from the first grids by a half of the predetermined size, distributing an area value of a sub-pattern in each of the second square regions to a plurality of apexes of each of the second square regions such that a center-of-gravity position of the sub-pattern does not change, wherein the sub-pattern being a part of the pattern, and outputting the distributed area values as area values, for correcting a proximity effect, defined at the center position of each of the first square regions.