Abstract: A protective film forming method is provided. In the method, an oxide film of either an organic metal compound or an organic metalloid compound is deposited on a flat surface region between adjacent recessed shapes formed in a surface of a substrate. Then, a lateral portion of the oxide film deposited on the flat surface region is removed by etching.

Abstract: A film deposition apparatus includes a film deposition chamber into which a substrate is carried, a heating mechanism that heats the substrate carried into the film deposition chamber, an adhesion accelerating agent feed mechanism that feeds an adhesion accelerating agent gas into the film deposition chamber, and a control part that controls the heating mechanism and the adhesion accelerating agent feed mechanism. When depositing a polyimide film on the substrate by feeding a first source gas formed of dianhydride and a second source gas formed of diamine into the film deposition chamber, the control part is configured to control the adhesion accelerating agent feed mechanism to treat a surface of the substrate with the adhesion accelerating agent gas by feeding the adhesion accelerating agent gas into the film deposition chamber until the substrate is heated to a predetermined temperature for depositing the polyimide film.

Abstract: Produce a printing paper that offers sufficient bulk and flexibility by using a bulk-increasing/softening agent with a HLB of 6 or below, which is either a liquid or a solid with a melting point of 40° C. or below, wherein the agent may be an ester compound of polyhydric alcohol and higher fatty acid or a long-chain alkyl ammonium salt, and by adjusting the surface temperature of the paper during a preheating drying period (a period during a drying process before the temperature of a wet paper becomes constant) to at least 10° C. higher than the melting point of the bulk-increasing/softening agent.