Patents by Inventor Masaharu Kashiwase

Masaharu Kashiwase has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for removing organic film
    Patent number: 5378317
    Abstract: The method for removing organic film according to the present invention is very effective for removing a photo resist film in a process for manufacturing semiconductor device. A substrate (32) having a photo resist film (31) formed on it is processed in a wet processing tank (34) filled with a processing solution such as a mixed solution containing sulfuric acid and hydrogen peroxide or by a dry processing using oxygen plasma. Then, it is processed in an ozone processing tank (34) filled with a solution where ozone or ozone water has been infused, and the organic film is removed.
    Type: Grant
    Filed: August 23, 1993
    Date of Patent: January 3, 1995
    Assignee: Chlorine Engineers Corp., Ltd.
    Inventors: Masaharu Kashiwase, Terumi Matsuoka