Abstract: A laser chamber of an excimer laser apparatus includes a container including a first member and a second member and configured to accommodate a laser gas in the container and a seal member disposed between two seal surfaces facing each other, a seal surface of the first member and a seal surface of the second member. A laser-gas-side surface of the seal member is made of fluorine-based rubber, and an atmosphere-side surface of the seal member is formed of a film configured to suppress atmosphere transmission.

Abstract: A gas laser apparatus includes: a magnetic bearing including an electromagnet capable of controlling a magnetic force, and configured to rotatably support a rotary shaft of a fan in a magnetically levitated state by the magnetic force, the fan being configured to supply a laser gas; an electromagnet control unit configured to control the magnetic force of the electromagnet based on displacement of a levitated position of the rotary shaft and adjust the levitated position; a motor configured to generate torque for rotating the fan; a magnetic coupling configured to couple the rotary shaft and a drive shaft of a motor with a magnetic attractive force and transmit the torque of the motor to the rotary shaft; an attractive force estimating sensor configured to detect a parameter that enables an attractive force of the magnetic coupling to be estimated; an attractive force measuring unit configured to measure the attractive force of the magnetic coupling based on the detected parameter; and a correction unit confi

Abstract: A laser chamber of an excimer laser apparatus includes a container including a first member and a second member and configured to accommodate a laser gas in the container and a seal member disposed between two seal surfaces facing each other, a seal surface of the first member and a seal surface of the second member. A laser-gas-side surface of the seal member is made of fluorine-based rubber, and an atmosphere-side surface of the seal member is formed of a film configured to suppress atmosphere transmission.

Abstract: A resin fuel tank includes a peripheral wall portion that is configured to structure a portion of a fuel tank main body portion that is made of resin and in which fuel is stored, the peripheral wall portion having a parting line portion that is visible from an outer side of the fuel tank main body portion, and a projecting portion that is solid, is disposed along the parting line portion, and is configured to project outward, integrally with the peripheral wall portion, from the peripheral wall portion toward the outer side of the fuel tank main body portion.

Abstract: A refueling retainer comprises a body portion of a tubular shape inserted into and arranged at a fueling-side end portion of an inlet pipe through which fuel is introduced to a fuel tank. The body portion comprises at a leading end portion thereof: a tapered portion, which is an inner peripheral surface of the leading end portion inclined radially inward toward a leading end of the body portion; and a claw portion that projects from the leading end of the body portion in an inwardly bent manner.

Abstract: A gas laser apparatus includes: a magnetic bearing including an electromagnet capable of controlling a magnetic force, and configured to rotatably support a rotary shaft of a fan in a magnetically levitated state by the magnetic force, the fan being configured to supply a laser gas; an electromagnet control unit configured to control the magnetic force of the electromagnet based on displacement of a levitated position of the rotary shaft and adjust the levitated position; a motor configured to generate torque for rotating the fan; a magnetic coupling configured to couple the rotary shaft and a drive shaft of a motor with a magnetic attractive force and transmit the torque of the motor to the rotary shaft; an attractive force estimating sensor configured to detect a parameter that enables an attractive force of the magnetic coupling to be estimated; an attractive force measuring unit configured to measure the attractive force of the magnetic coupling based on the detected parameter; and a correction unit confi

Abstract: A resin fuel tank includes a peripheral wall portion that is configured to structure a portion of a fuel tank main body portion that is made of resin and in which fuel is stored, the peripheral wall portion having a parting line portion that is visible from an outer side of the fuel tank main body portion, and a projecting portion that is solid, is disposed along the parting line portion, and is configured to project outward, integrally with the peripheral wall portion, from the peripheral wall portion toward the outer side of the fuel tank main body portion.

Abstract: A refueling retainer comprises a body portion of a tubular shape inserted into and arranged at a fueling-side end portion of an inlet pipe through which fuel is introduced to a fuel tank. The body portion comprises at a leading end portion thereof: a tapered portion, which is an inner peripheral surface of the leading end portion inclined radially inward toward a leading end of the body portion; and a claw portion that projects from the leading end of the body portion in an inwardly bent manner.

Abstract: To provide a mechanism in which a moving body can be stored in a housing. A gate valve has a slide plate and a moving mechanism for changing the positions in the radial and axial directions of the slide plate. A shaft is a rotating shaft the axial displacement of which is controlled by an axial driving mechanism and the angle of rotation of which is controlled by a radial driving mechanism, and is turnably supported in the housing by a shaft supporting spring consisting of a magnetic bearing and a conical coil spring. By controlling the attraction force of a balance weight in an electromagnet, the shaft can be moved in the radial direction. Also, by controlling the attraction force of an electromagnet target in the electromagnet, the shaft can be moved in the axial direction.

Abstract: To provide a mechanism in which a moving body can be stored in a housing. A gate valve has a slide plate and a moving mechanism for changing the positions in the radial and axial directions of the slide plate. A shaft is a rotating shaft the axial displacement of which is controlled by an axial driving mechanism and the angle of rotation of which is controlled by a radial driving mechanism, and is tumably supported in the housing by a shaft supporting spring consisting of a magnetic bearing and a conical coil spring. By controlling the attraction force of a balance weight in an electromagnet, the shaft can be moved in the radial direction. Also, by controlling the attraction force of an electromagnet target in the electromagnet, the shaft can be moved in the axial direction.

Abstract: A vacuum pump producing ultra high vacua has a housing containing a first set of rotor blades provided around a first rotor for producing ultra high vacua and a second set of rotor blades provided around a second rotor for producing low to high vacua wherein the first rotor and the second rotor are magnetically suspended during pump operation. The first rotor is disconnected from the second rotor during pump operation in a low to high vacuum range, and it is connected with the second rotor as the pump operation shifts from a high vacuum range to an ultra high vacuum range. Because of this feature, the pump operation ranging from a low vacuum range up to an ultra high vacuum range can be performed by a single pump.

Abstract: A turbo-molecular pump comprises three distinct stages corresponding to three distinct gas flow regions. The first stage comprises a plurality of stages of alternately arranged rotor blades and stator blades, and operates in a molecular flow region wherein the gas pressure is less than 10.sup.-3 torr. The second stage comprises a first helical groove formed either on the circumference of the rotor or on the circumference of the stator. The second stage is disposed downstream of the first stage and operates in a transition flow region wherein the gas pressure is from 10.sup.-3 to 1 torr. The third stage comprises second and third helical grooves formed respectively on the circumference of the rotor and stator. The third stage is disposed downstream of the second stage and operates in a viscous flow region wherein the gas pressure is greater than 1 torr.

Abstract: An axial-flow molecular pump has a first active magnetic bearing for axially supporting and controlling a pump member comprised of a set of permanent magnets on the upper end of the pump member cooperating with a set of permanent magnets fixedly mounted at the upper end of a pump housing, a first electromagnet coacting with the sets of permanent magnets and operative when energized for controlling the axial position of the pump member, and an axial sensor for detecting axial displacement of the pump member and accordingly controlling the energization of the first electromagnet. A second active magnetic bearing for radially supporting and controlling the pump member comprises a second electromagnet operative when energized for controlling the radial position of the pump member, and a radial sensor for detecting radial displacement of the pump member and accordingly controlling the energization of the second electromagnet.

Abstract: A turbo-molecular pump has a housing containing a plurality of stationary plates which are alternately arranged with respect to a plurality of rotary plates connected to a rotationally driven rotor. Spiral flow grooves all having the same winding direction are formed on opposite sides of the stationary plates, and gas drawn through an inlet port of the housing flows downwardly through a plurality of axial passages formed in the stationary plates and then radially inwardly into the spiral flow grooves wherein the gas is compressed. Axial grooves in the rotor transport the compressed gas from the spiral flow grooves to a helical groove at the lower part of the housing which further compresses the gas and discharges the same through an outlet port.

Abstract: A turbo-molecular pump characterized in that three out of five degrees of freedom except the rotation around the rotational axis of a shaft are actively controlled constrainingly by a pair of magnetic radius direction bearings and a pair of magnetic axial bearings, a bell-shaped rotor provided to cover the whole of magnetic bearing and a shaft which is supported by a magnetic bearing passively constraining the remaining two degrees of freedom, and said rotor is rotated at high speed by an inner-rotor type of a driving motor provided between a radius direction bearing and axial bearing.