Abstract: A measuring device for measuring an inspection target on the basis of vibration generated when the inspection target has been irradiated with laser light includes a condensing position deriving portion configured to derive an amount of adjustment of a distance between condensing lenses of a laser condensing unit configured to condense the laser light on the basis of a distance between a laser device configured to radiate the laser light and an irradiation location of the laser light and a communicating portion configured to transmit control information including information representing the amount of adjustment to the laser condensing unit.

Abstract: An implant installation strength evaluation method includes a step of vibrating an implant, a step of measuring time series data of the number of vibrations and vibration strengths of the implant vibrated in the vibrating step, and a step of deriving information indicating an index of an installation strength of the implant based on the time series data of the number of vibrations and vibration strengths of the implant.

Abstract: A measuring device for measuring an inspection target on the basis of vibration generated when the inspection target has been irradiated with laser light includes a condensing position deriving portion configured to derive an amount of adjustment of a distance between condensing lenses of a laser condensing unit configured to condense the laser light on the basis of a distance between a laser device configured to radiate the laser light and an irradiation location of the laser light and a communicating portion configured to transmit control information including information representing the amount of adjustment to the laser condensing unit.

Abstract: A measuring device for measuring an inspection target on the basis of vibration generated when the inspection target has been irradiated with laser light includes a condensing position deriving portion configured to derive an amount of adjustment of a distance between condensing lenses of a laser condensing unit configured to condense the laser light on the basis of a distance between a laser device configured to radiate the laser light and an irradiation location of the laser light and a communicating portion configured to transmit control information including information representing the amount of adjustment to the laser condensing unit.

Abstract: This invention provides a pulse shaping technique that can yield a pulsed laser having a smaller energy fluctuation than that of a conventional pulse shaping technique using one or two non-linear optical crystals. A pulse shaping device includes: a non-linear optical crystal group including at least three non-linear optical crystals arranged side by side on an optical path of an input pulsed laser.

Abstract: A measuring device for measuring an inspection target on the basis of vibration generated when the inspection target has been irradiated with laser light includes a condensing position deriving portion configured to derive an amount of adjustment of a distance between condensing lenses of a laser condensing unit configured to condense the laser light on the basis of a distance between a laser device configured to radiate the laser light and an irradiation location of the laser light and a communicating portion configured to transmit control information including information representing the amount of adjustment to the laser condensing unit.

Abstract: An implant installation strength evaluation method includes a step of vibrating an implant, a step of measuring time series data of the number of vibrations and vibration strengths of the implant vibrated in the vibrating step, and a step of deriving information indicating an index of an installation strength of the implant based on the time series data of the number of vibrations and vibration strengths of the implant.

Abstract: To suppress the breakage of a mirror for reflecting high-intensity EUV light, an EUV multilayer mirror presenting a Bragg diffraction effect is formed by a pile of a plurality of heavy-element layers (102) and a plurality of light-element layers (103) disposed on a substrate (101), wherein the light-element layers and the heavy-element layers are alternately deposited. The heavy-element layers (102) contain niobium as a main component, and the light-element layers (103) contain silicon as a main component. For example, the heavy-element layers (102) made of niobium and the light-element layers (103) made of silicon are alternately deposited on the substrate (101) made of single-crystal silicon.