Patents by Inventor Masaharu Tokiwa
Masaharu Tokiwa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9667858Abstract: In an image acquisition device, an optical path length difference in a second light figure can be formed by arrangement of an optical path difference generating member, without need for splitting light in a second optical path for focus control. Therefore, it reduces the quantity of light into the second optical path necessary for acquisition of information of focal position while ensuring the quantity of light enough for execution of imaging by a first imaging device. Furthermore, in this image acquisition device, a light reduction portion is provided between a first face and a second face of the optical path difference generating member. This light reduction portion can narrow a light superimposed region on the imaging surface of the second imaging device, which allows control of the focal position to a sample to be accurately carried out.Type: GrantFiled: March 7, 2014Date of Patent: May 30, 2017Assignee: HAMAMATSU PHOTONICS K.K.Inventors: Hideshi Oishi, Masaharu Tokiwa
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Publication number: 20160142617Abstract: In an image acquisition device, an optical path length difference in a second light figure can be formed by arrangement of an optical path difference generating member, without need for splitting light in a second optical path for focus control. Therefore, it reduces the quantity of light into the second optical path necessary for acquisition of information of focal position while ensuring the quantity of light enough for execution of imaging by a first imaging device. Furthermore, in this image acquisition device, a light reduction portion is provided between a first face and a second face of the optical path difference generating member. This light reduction portion can narrow a light superimposed region on the imaging surface of the second imaging device, which allows control of the focal position to a sample to be accurately carried out.Type: ApplicationFiled: March 7, 2014Publication date: May 19, 2016Inventors: Hideshi OISHI, Masaharu TOKIWA
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Patent number: 7576910Abstract: For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index n0 and a thickness t0 of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index n0 and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3.Type: GrantFiled: November 6, 2007Date of Patent: August 18, 2009Assignee: Hamamatsu Photonics K.K.Inventors: Hirotoshi Terada, Ikuo Arata, Masaharu Tokiwa, Hiroshi Tanabe, Shigeru Sakamoto, Yoshio Isobe
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Publication number: 20080074739Abstract: For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index n0 and a thickness t0 of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index n0 and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3.Type: ApplicationFiled: November 6, 2007Publication date: March 27, 2008Inventors: Hirotoshi Terada, Ikuo Arata, Masaharu Tokiwa, Hiroshi Tanabe, Shigeru Sakamoto, Yoshio Isobe
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Patent number: 7312921Abstract: For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index n0 and a thickness t0 of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index n0 and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3.Type: GrantFiled: January 18, 2006Date of Patent: December 25, 2007Assignee: Hamamatsu Photonics K.K.Inventors: Hirotoshi Terada, Ikuo Arata, Masaharu Tokiwa, Hiroshi Tanabe, Shigeru Sakamoto, Yoshio Isobe
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Patent number: 7110172Abstract: For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index no and a thickness to of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index no and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3.Type: GrantFiled: June 30, 2004Date of Patent: September 19, 2006Assignee: Hamamatsu Photonics K.K.Inventors: Hirotoshi Terada, Ikuo Arata, Masaharu Tokiwa, Hiroshi Tanabe, Shigeru Sakamoto
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Publication number: 20060176548Abstract: For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index n0 and a thickness t0 of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index n0 and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3.Type: ApplicationFiled: January 18, 2006Publication date: August 10, 2006Inventors: Hirotoshi Terada, Ikuo Arata, Masaharu Tokiwa, Hiroshi Tanabe, Shigeru Sakamoto, Yoshio Isobe
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Publication number: 20050190436Abstract: For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index no and a thickness to of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index no and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3.Type: ApplicationFiled: June 30, 2004Publication date: September 1, 2005Inventors: Hirotoshi Terada, Ikuo Arata, Masaharu Tokiwa, Hiroshi Tanabe, Shigeru Sakamoto