Abstract: A Jones matrix OCT offers improved image stability, image quality, and depth range of image, wherein light from a wavelength-scanning light source is split into two optical paths, and a reference arm is provided along one optical path, while a probe arm that irradiates and reflects light onto the measuring target to generate object light is provided along the other optical path. The probe arm has a polarization delay unit that linearly polarizes the light and then splits it into S-wave component and P-wave component, where the S-wave component and P-wave component are superimposed through optical paths of different optical path lengths, respectively, after which optical detectors are used to detect different spectral interference beams in the depth direction of the measuring target corresponding to the vertically polarized component and horizontally polarized component, which respectively correspond to the S-wave component and P-wave component, to obtain four spectral interference signals.

Abstract: From OCT-measured data, only the image data of the choroidal vascular network present in the layer of the choroidal layer is selectively extracted, thereby accurately obtaining the thickness of the choroidal vessels and thickness of the choroidal vascular network from the image data, to allow for quantitative evaluation of the choroidal vascular network. The optical coherence tomography apparatus has an optical coherence tomography device, and a computer that processes the three-dimensional OCT tomographic images obtained based on the OCT-measured data acquired by the optical coherence tomography device. The computer functions as a means for selectively separating out only the images of the choroidal vessels from the three-dimensional OCT tomographic images to acquire image data of the choroidal vessels, and also as a means for obtaining the data to be used in the quantitative evaluation of the shape of the choroidal vessels based on the image data of the choroidal vessels.

Abstract: A gas supply unit, for supplying a gas into a processing chamber in which a substrate is processed, includes a plurality of gas supply sources, a mixing line for mixing a plurality of gases supplied from the gas supply sources to make a gaseous mixture, a multiplicity of branch lines for branching the gaseous mixture to be supplied to a multiplicity of places in the processing chamber, and an additional gas supply unit for supplying a specified additional gas to a gaseous mixture flowing in at least one branch line. The gas supply unit also includes pressure gauges and valves for adjusting gas flow rates in the branch lines, respectively, and a pressure ratio controller for controlling that gaseous mixtures branched into the branch lines to have a specified pressure ratio by adjusting opening degrees of the valves based on measurement results obtained by using the pressure gauges.

Abstract: In an embodiment, a computer 16, which generates tomographic images based on spectral interference signals detected by a light detector 15 from overlaid reference light emitted by a swept-source type light source 2 of a SS-OCT, split, and then reflected by a fixed reference mirror 8 on one hand and object light reflected by an object to be measured 6 on the other, is caused to function to apply rough correction using a first correction means and then apply detailed correction using a second correction means, to stabilize the phases of the SS-OCT. The phases can be stabilized by eliminating, without adding any expensive, complex hardware, the jitter between the wavelength scanning of a light source of SS-OCT and the timing of collecting the scan data with the light detector as spectral interference signals.

Abstract: From OCT-measured data, only the image data of the choroidal vascular network present in the layer of the choroidal layer is selectively extracted, thereby accurately obtaining the thickness of the choroidal vessels and thickness of the choroidal vascular network from the image data, to allow for quantitative evaluation of the choroidal vascular network. The optical coherence tomography apparatus has an optical coherence tomography device, and a computer that processes the three-dimensional OCT tomographic images obtained based on the OCT-measured data acquired by the optical coherence tomography device. The computer functions as a means for selectively separating out only the images of the choroidal vessels from the three-dimensional OCT tomographic images to acquire image data of the choroidal vessels, and also as a means for obtaining the data to be used in the quantitative evaluation of the shape of the choroidal vessels based on the image data of the choroidal vessels.

Abstract: A Jones matrix OCT offers improved image stability, image quality, and depth range of image, wherein light from a wavelength-scanning light source is split into two optical paths, and a reference arm is provided along one optical path, while a probe arm that irradiates and reflects light onto the measuring target to generate object light is provided along the other optical path. The probe arm has a polarization delay unit that linearly polarizes the light and then splits it into S-wave component and P-wave component, where the S-wave component and P-wave component are superimposed through optical paths of different optical path lengths, respectively, after which optical detectors are used to detect different spectral interference beams in the depth direction of the measuring target corresponding to the vertically polarized component and horizontally polarized component, which respectively correspond to the S-wave component and P-wave component, to obtain four spectral interference signals.

Abstract: In an embodiment, a computer 16, which generates tomographic images based on spectral interference signals detected by a light detector 15 from overlaid reference light emitted by a swept-source type light source 2 of a SS-OCT, split, and then reflected by a fixed reference mirror 8 on one hand and object light reflected by an object to be measured 6 on the other, is caused to function to apply rough correction using a first correction means and then apply detailed correction using a second correction means, to stabilize the phases of the SS-OCT. The phases can be stabilized by eliminating, without adding any expensive, complex hardware, the jitter between the wavelength scanning of a light source of SS-OCT and the timing of collecting the scan data with the light detector as spectral interference signals.

Abstract: A gas supply unit, for supplying a gas into a processing chamber in which a substrate is processed, includes a plurality of gas supply sources, a mixing line for mixing a plurality of gases supplied from the gas supply sources to make a gaseous mixture, a multiplicity of branch lines for branching the gaseous mixture to be supplied to a multiplicity of places in the processing chamber, and an additional gas supply unit for supplying a specified additional gas to a gaseous mixture flowing in at least one branch line. The gas supply unit also includes pressure gauges and valves for adjusting gas flow rates in the branch lines, respectively, and a pressure ratio controller for controlling that gaseous mixtures branched into the branch lines to have a specified pressure ratio by adjusting opening degrees of the valves based on measurement results obtained by using the pressure gauges.

Abstract: A gas supply unit, for supplying a gas into a processing chamber in which a substrate is processed, includes a plurality of gas supply sources, a mixing line for mixing a plurality of gases supplied from the gas supply sources to make a gaseous mixture, a multiplicity of branch lines for branching the gaseous mixture to be supplied to a multiplicity of places in the processing chamber, and an additional gas supply unit for supplying a specified additional gas to a gaseous mixture flowing in at least one branch line. The gas supply unit also includes pressure gauges and valves for adjusting gas flow rates in the branch lines, respectively, and a pressure ratio controller for controlling that gaseous mixtures branched into the branch lines to have a specified pressure ratio by adjusting opening degrees of the valves based on measurement results obtained by using the pressure gauges.

Abstract: A semiconductor processing system includes an intermediate structure disposed between an atmospheric pressure entrance transfer chamber and a vacuum common transfer chamber. The intermediate structure includes a transfer passage for a target substrate to pass therein. The transfer passage includes a first buffer chamber a middle transfer chamber and a second buffer chamber detachably connected. An additional processing apparatus is detachably connected to the middle transfer chamber. The intermediate structure is selectively arranged in first or second state. In the first state, the additional processing apparatus performs a vacuum process, while the first buffer chamber is a load-lock chamber. In the second state, the additional processing apparatus performs an atmospheric pressure process, while the second buffer chamber is a load-lock chamber.

Abstract: A gas supply unit, for supplying a gas into a processing chamber in which a substrate is processed, includes a plurality of gas supply sources, a mixing line for mixing a plurality of gases supplied from the gas supply sources to make a gaseous mixture, a multiplicity of branch lines for branching the gaseous mixture to be supplied to a multiplicity of places in the processing chamber, and an additional gas supply unit for supplying a specified additional gas to a gaseous mixture flowing in at least one branch line. The gas supply unit also includes pressure gauges and valves for adjusting gas flow rates in the branch lines, respectively, and a pressure ratio controller for controlling that gaseous mixtures branched into the branch lines to have a specified pressure ratio by adjusting opening degrees of the valves based on measurement results obtained by using the pressure gauges.

Abstract: A treatment subject receiving vessel body 72 comprises a portable vessel main body 92, a treatment subject support member 100 installed in the vessel main body and capable of supporting a plurality of treatment subjects W, a joint port 96 formed in one side surface of the vessel main body and communicating with the interior of the vessel main body, an openable/closable gate valve 94 installed in the joining port, and an exhaust port 108 made openable/closable to be capable of exhausting the vessel main body. When the gate valve and exhaust port are closed, the vessel main body is brought to the sealed state.

Abstract: A semiconductor processing system includes an intermediate structure (37A, 37B) disposed between an atmospheric pressure entrance transfer chamber (32) and a vacuum common transfer chamber (36). The intermediate structure includes a transfer passage (38A, 38B) for a target substrate (W) to pass therein. The transfer passage includes a first buffer chamber (70), a middle transfer chamber (72), and a second buffer chamber (74) detachably connected. An additional processing apparatus (110, 110A) is detachably connected to the middle transfer chamber. The intermediate structure is selectively arranged in first or second state. In the first state, the additional processing apparatus (110) performs a vacuum process, while the first buffer chamber (70) is a load-lock chamber. In the second state, the additional processing apparatus (110A) performs an atmospheric pressure process, while the second buffer chamber (74) is a load-lock chamber.

Abstract: A detection apparatus includes a differential interference contrast microscope, a device for changing the amount of retardation between the two polarized components, a device for photographing the image of an object to be observed, and a device for performing a calculation with respect to the image captured by this photographing device. In the detection apparatus, amounts of retardation between two polarized components split in an illumination optical system of the differential interference contrast microscope are detected to form two differential interference contrast images relative to the object in which the amounts of retardation between the polarized components are equal, but have different signs. Subsequently, in the two differential interference contrast images, a differential calculation and a summed calculation are performed with regard to respective corresponding pixels to obtain a differential image and a summed image.

Abstract: A microscope apparatus that has an electronic image pickup device arranged on an image surface of an imaging optical system, a component for separating light from a light source into two portions, a device for changing a phase difference between the two portions of light, a device for storing information on the images picked up by the image pickup device, and information processor for processing the information of images. The images are picked up by the electronic image pickup device as the phase difference is changed, and the information on the images is multiplied by a periodic function, as a weight function, which is given the phase difference as variable, and a resultant product is integrated so that a differential interference microscope apparatus capable of accurately obtaining a phase distribution of the object or a phase-contrast microscope apparatus capable of effectively enhancing a resolving power without lowering an image contrast is obtained.

Abstract: An exhaust system for a film forming apparatus including an exhaust pipe passage connected to an exhaust port of the film forming apparatus for forming a film on a object by using vaporized gas of an organic metal compound. The film forming apparatus includes a pressure transfer unit provided for the exhaust pipe passage and arranged to transfer, through the exhaust pipe passage, gas in the film forming apparatus as exhaust gas. A cooling mechanism is provided for the pressure transfer unit and arranged to cool the pressure transfer unit to a temperature lower than a temperature, at which the organic metal compound is decomposed, so as to prevent precipitation of the organic metal compound contained in the exhaust gas introduced into the pressure transfer unit.

Abstract: A process gas supply apparatus according to the invention comprises a supply pipe line connecting a supply source containing an organic aluminum metallic compound in a liquid state, to a process device for forming a film on an object using the organic aluminum metallic compound, a force-feed device for force-feeding, through the supply pipe line, the organic aluminum metallic compound contained in the supply source, a vaporizing device provided across the supply pipe line for vaporizing the force-fed organic aluminum metallic compound of the liquid state, a purge gas introduction device connected to the supply pipe line for introducing a pressurized purge gas into the supply pipe line, a solvent introduction device connected to the supply pipe line for introducing into the supply pipe line a solvent for dissolving the organic aluminum metallic compound, an exhaustion device connected to the supply pipe line for exhausting the supply pipe line by a negative pressure, and a control device having a plurality of