Patents by Inventor Masahide Matsubara
Masahide Matsubara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 9580818Abstract: The present invention relates to an etching solution for a multilayer thin film containing a copper layer and a molybdenum layer, and a method of etching a multilayer thin film containing a copper layer and a molybdenum layer using the etching solution. There are provided an etching solution for a multilayer thin film containing a copper layer and a molybdenum layer, including (A) an organic acid ion supply source containing two or more carboxyl groups and one or more hydroxyl groups in a molecule thereof, (B) a copper ion supply source and (C) an ammonia and/or ammonium ion supply source, the etching solution having a pH value of from 5 to 8, and an etching method using the etching solution.Type: GrantFiled: May 27, 2011Date of Patent: February 28, 2017Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.Inventors: Satoshi Tamai, Satoshi Okabe, Masahide Matsubara, Kunio Yube
-
Patent number: 8455419Abstract: Disclosed is a stripping agent that can easily strip a photoresist residue and the like at a low temperature in a short time and, at the same time, does not corrode a wiring material at all and has no need to use an organic solvent such as alcohol as a rinsing liquid. The stripping agent disclosed herein comprises 5 to 50% by mass of a specific amine, 30 to 65% by mass of a specific acid amide, 0.1 to 15% by mass of a saccharide or a sugar alcohol, and 1 to 64.5% by mass of water.Type: GrantFiled: November 16, 2011Date of Patent: June 4, 2013Assignee: Mitsubishi Gas Chemical Company, Inc.Inventors: Toshihiro Nomura, Masahide Matsubara, Seiji Naito, Takashi Nakamura, Yuuichi Sugano
-
Publication number: 20130105729Abstract: The present invention relates to an etching solution for a multilayer thin film containing a copper layer and a molybdenum layer, and a method of etching a multilayer thin film containing a copper layer and a molybdenum layer using the etching solution. There are provided an etching solution for a multilayer thin film containing a copper layer and a molybdenum layer, including (A) an organic acid ion supply source containing two or more carboxyl groups and one or more hydroxyl groups in a molecule thereof, (B) a copper ion supply source and (C) an ammonia and/or ammonium ion supply source, the etching solution having a pH value of from 5 to 8, and an etching method using the etching solution.Type: ApplicationFiled: May 27, 2011Publication date: May 2, 2013Applicant: MITSUBISHI GAS CHEMICAL COMPANY, INC.Inventors: Satoshi Tamai, Satoshi Okabe, Masahide Matsubara, Kunio Yube
-
Patent number: 8420436Abstract: A solar cell manufacturing method according to the present invention is a solar cell manufacturing method that forms a transparent conductive film of ZnO as an electric power extracting electrode on a light incident side, the method comprises at least in a following order: a process A forming the transparent conductive film on a substrate by applying a sputtering voltage to sputter a target made of a film formation material for the transparent conductive film; a process B forming a texture on a surface of the transparent conductive film; a process C cleaning the surface of the transparent conductive film on which the texture has been formed using an UV/ozone; and a process D forming an electric power generation layer on the transparent conductive film.Type: GrantFiled: October 27, 2009Date of Patent: April 16, 2013Assignee: ULVAC, Inc.Inventors: Hirohisa Takahashi, Satoru Ishibashi, Sadayuki Ukishima, Masahide Matsubara, Satoshi Okabe
-
ETCHING SOLUTION FOR MULTILAYER THIN FILM HAVING COPPER LAYER AND MOLYBDENUM LAYER CONTAINED THEREIN
Publication number: 20120319033Abstract: Discloses are an etching solution for a multilayer thin film having a copper layer and a molybdenum layer contained therein; and an etching method of a multilayer thin film having a copper layer and a molybdenum layer contained therein using the same. Specifically disclosed are an etching solution for a multilayer thin film having a copper layer and a molybdenum layer contained therein, which includes (A) hydrogen peroxide, (B) a fluorine atom-free inorganic acid, (C) an organic acid, (D) an amine compound having a carbon number of from 2 to 10 and having an amino group and a hydroxyl group in a total group number of 2 or more, (E) an azole, and (F) a hydrogen peroxide stabilizer, and which has a pH of from 2.5 to 5; and an etching method using the same.Type: ApplicationFiled: February 15, 2011Publication date: December 20, 2012Applicant: MITSUBISHI GAS CHEMICAL COMPANY, INC.Inventors: Satoshi Okabe, Kazuyo Narita, Masahide Matsubara, Tomoyuki Adaniya, Taketo Maruyama -
Publication number: 20120149622Abstract: Disclosed is a stripping agent that can easily strip a photoresist residue and the like at a low temperature in a short time and, at the same time, does not corrode a wiring material at all and has no need to use an organic solvent such as alcohol as a rinsing liquid. The stripping agent disclosed herein comprises 5 to 50% by mass of a specific amine, 30 to 65% by mass of a specific acid amide, 0.1 to 15% by mass of a saccharide or a sugar alcohol, and 1 to 64.5% by mass of water.Type: ApplicationFiled: November 16, 2011Publication date: June 14, 2012Applicant: Mitsubishi Gas Chemical Company, Inc.Inventors: Toshihiro NOMURA, Masahide MATSUBARA, Seiji NAITO, Takashi NAKAMURA, Yuuichi SUGANO
-
Patent number: 8048331Abstract: An etching composition which comprises at least one organic carboxylic acid compound selected from acetic acid, propionic acid, butyric acid, succinic acid, citric acid, lactic acid, malic acid, tartaric acid, malonic acid, maleic acid, glutaric acid, aconitic acid, 1,2,3-propanetricarboxylic acid and ammonium salts of these acids, a polysulfonic acid compound and water, and an etching process which comprises etching a conductive film comprising zinc oxide as the main component using the etching composition described above.Type: GrantFiled: November 10, 2010Date of Patent: November 1, 2011Assignee: Mitsubishi Gas Chemical Company, Inc.Inventors: Masahide Matsubara, Taketo Maruyama
-
Publication number: 20110256659Abstract: A solar cell manufacturing method according to the present invention is a solar cell manufacturing method that forms a transparent conductive film of ZnO as an electric power extracting electrode on a light incident side, the method comprises at least in a following order: a process A forming the transparent conductive film on a substrate by applying a sputtering voltage to sputter a target made of a film formation material for the transparent conductive film; a process B forming a texture on a surface of the transparent conductive film; a process C cleaning the surface of the transparent conductive film on which the texture has been formed using an UV/ozone; and a process D forming an electric power generation layer on the transparent conductive film.Type: ApplicationFiled: October 27, 2009Publication date: October 20, 2011Applicant: ULVAC, INC.Inventors: Hirohisa Takahashi, Satoru Ishibashi, Sadayuki Ukishima, Masahide Matsubara, Satoshi Okabe
-
Publication number: 20110240592Abstract: A texture processing liquid for a transparent conductive film for realizing a high photoelectric conversion efficiency in a thin solar cell and a method for producing a transparent conductive film are provided. The surface of a transparent conductive film mainly composed of zinc oxide is brought into contact with an aqueous solution containing a polyacrylic acid or a salt thereof and an acidic component to form a texture having recesses and productions, and after the process, the surface of the transparent conductive film having recesses and projections is further subjected to a contact treatment with an alkaline aqueous solution.Type: ApplicationFiled: October 5, 2009Publication date: October 6, 2011Applicant: MITSUBISHI GAS CHEMICAL COMPANY, INC.Inventors: Masahide Matsubara, Satoshi Okabe
-
Publication number: 20110049088Abstract: An etching composition which comprises at least one organic carboxylic acid compound selected from acetic acid, propionic acid, butyric acid, succinic acid, citric acid, lactic acid, malic acid, tartaric acid, malonic acid, maleic acid, glutaric acid, aconitic acid, 1,2,3-propanetricarboxylic acid and ammonium salts of these acids, a polysulfonic acid compound and water, and an etching process which comprises etching a conductive film comprising zinc oxide as the main component using the etching composition described above.Type: ApplicationFiled: November 10, 2010Publication date: March 3, 2011Inventors: Masahide MATSUBARA, Taketo MARUYAMA
-
Publication number: 20070278185Abstract: An etching composition which comprises at least one organic carboxylic acid compound selected from acetic acid, propionic acid, butyric acid, succinic acid, citric acid, lactic acid, malic acid, tartaric acid, malonic acid, maleic acid, glutaric acid, aconitic acid, 1,2,3-propanetricarboxylic acid and ammonium salts of these acids, a polysulfonic acid compound and water, and an etching process which comprises etching a conductive film comprising zinc oxide as the main component using the etching composition described above.Type: ApplicationFiled: May 24, 2007Publication date: December 6, 2007Inventors: Masahide Matsubara, Taketo Maruyama
-
Patent number: 6425182Abstract: A roller cage made of metal for holding rollers of a roller bearing, includes: separation bars separately defining a plurality of window holes along a peripheral direction of the bearing with a constant interval thereamong. The window holes respectively receive said rollers therein. Each of the separation bars includes: a contact surface being formed by press-molding one of an outer diameter surface side end portion and an inner diameter surface side end portion thereof, and contacting with the rolling surface of the roller; and an expansion portion expanding to a radial direction of the bearing at the other of the outer diameter surface side end portion and the inner diameter surface side end portion which is not subjected to the press-molding.Type: GrantFiled: November 15, 2000Date of Patent: July 30, 2002Assignee: NSK Ltd.Inventors: Akiyoshi Honda, Masahide Matsubara, Kunio Fukuda, Hiroyuki Sawai, Toshiyuki Suzuki, Akiyoshi Yamaguchi
-
Patent number: 6186669Abstract: A roller cage made of metal for holding rollers of a roller bearing, includes: separation bars separately defining a plurality of window holes along a peripheral direction of the bearing with a constant interval thereamong. The window holes respectively receive said rollers therein. Each of the separation bars includes: a contact surface being formed by press-molding one of an outer diameter surface side end portion and an inner diameter surface side end portion thereof, and contacting with the rolling surface of the roller; and an expansion portion expanding to a radial direction of the bearing at the other of the outer diameter surface side end portion and the inner diameter surface side end portion which is not subjected to the press-molding.Type: GrantFiled: June 2, 1999Date of Patent: February 13, 2001Assignee: NSK Ltd.Inventors: Akiyoshi Honda, Masahide Matsubara, Kunio Fukuda, Hiroyuki Sawai, Toshiyuki Suzuki, Akiyoshi Yamaguchi
-
Patent number: 5626426Abstract: A self aligning roller bearing with retainer comprises an outer ring having an outer ring raceway in a shape of a spherical concave surface with a single center, an inner ring having a pair of inner ring raceways opposite to the outer ring raceway, a plurality of convex rollers provided rotatable between the outer ring raceway and the inner ring raceway, and a pair of retainers comprising a main portion formed in a hollow cylindrical frustum shape and having a plurality of crossbars, an outwardly flanged portion extending radially outward from the larger diameter end of the main portion and an inwardly flanged portion extending radially inward from the smaller diameter end of the main portion, and connected to the outwardly flanges portion by the crossbars so as to form a plurality of pockets each defined by two of the crossbars and outwardly and inwardly flanged portions to receive one of the convex rollers, the outwardly flanged portion having protrusions each protruding towards the pocket so as to rub agaiType: GrantFiled: April 25, 1996Date of Patent: May 6, 1997Assignees: NSK Ltd., Nakanishi Metal Works Co., Ltd.Inventors: Akiyoshi Honda, Masahide Matsubara, Eiichi Kawamura, Fukuji Kikkawa, Kunio Fukuda, Teruo Nagao
-
Patent number: 5538348Abstract: In a self-aligning roller bearing providing an outer race, an inner race, a plurality of barrel-shaped rollers, and a pair of cages, guide surfaces formed on outward flange portions of the cages for guiding the barrel-shaped rollers are caused to come closer to ends of the barrel-shaped rollers, so that the barrel-shaped rollers can be guided without fail even if an axial load is received. Therefore, the barrel-shaped rollers are prevented from being skewed, from increasing in torque required for rotating the barrel-shaped rollers, and from seizing up the barrel-shaped rollers.Type: GrantFiled: October 12, 1994Date of Patent: July 23, 1996Assignee: NSK Ltd.Inventors: Akiyoshi Honda, Kunio Fukuda, Masahide Matsubara, Eiichi Kawamura, Fukuji Kikkawa