Patents by Inventor Masahide Yokoyama

Masahide Yokoyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering apparatus
    Patent number: 5082545
    Abstract: A sputtering apparatus to be used in reactive sputtering which mixes a reactive gas into a discharge gas so as to form chemical compound thin membranes.A heating means is provided for heating the target. Light such as infrared rays or the like, and laser beams are ideal as the heating means. A thermometer for applying light is preferable to measure the temperature of at least one portion of the target for controlling the heating condition of the target. The composition of the thin membrane to be formed by the reactive sputtering can may be made constant.
    Type: Grant
    Filed: December 14, 1989
    Date of Patent: January 21, 1992
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Kunio Tanaka, Youichi Ohnishi, Masahide Yokoyama