Patents by Inventor Masahiko Asai

Masahiko Asai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10720566
    Abstract: It is formed, over a supporting body made of a ceramic, a bonding layer composed of one or more material selected from the group consisting of mullite, alumina, tantalum pentoxide, titanium oxide and niobium pentoxide. Neutralized beam is irradiated onto a surface of the bonding layer to activate the surface of the bonding layer. The surface of the bonding layer and the piezoelectric single crystal substrate are bonded by direct bonding.
    Type: Grant
    Filed: September 19, 2018
    Date of Patent: July 21, 2020
    Assignee: NGK INSULATORS, LTD.
    Inventors: Tomoyoshi Tai, Yuji Hori, Keiichiro Asai, Takashi Yoshino, Masashi Goto, Masahiko Namerikawa
  • Patent number: 10591820
    Abstract: A resist film including a metallic component and a photosensitive material is formed on a surface of a substrate, and then a peripheral portion of the resist film on the substrate is irradiated with light by an edge exposer. Subsequently, development processing is performed with a development liquid from a nozzle on the exposed portion of the resist film. Thus, the part of the resist film formed on the peripheral portion of the substrate is removed. Thereafter, exposure processing is performed on the substrate in an exposure device, so that an exposure pattern is formed on the resist film. Then, a development liquid is supplied to the exposed substrate in a development processing unit, so that development processing is performed on the resist film.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: March 17, 2020
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Masahiko Harumoto, Masaya Asai, Yuji Tanaka, Koji Kaneyama
  • Patent number: 10547224
    Abstract: An electric motor is provided with a stator core (3) configured by laminating a required number of annular electromagnetic steel sheets (5) having a plurality of tooth portions (4) around each of which a coil winding is wound, on the inner periphery side, wherein circumferential widths (B) of the tooth portion (4) in the plurality of electromagnetic steel sheets (5) which are laminated on both end sides of the stator core (3) become gradually narrow coward the respective end portion sides, and the coil winding is directly wound around the tooth portion (4) in which shoulder portions (7) on doth sides in a circumferential direction of the tooth portion (4) which is formed by lamination of the electromagnetic steel sheets (5) are shoulder portions (7) which smoothly change so as to narrow in width in a stepwise fashion toward the respective end portions.
    Type: Grant
    Filed: April 23, 2013
    Date of Patent: January 28, 2020
    Assignee: MITSUBISHI HEAVY INDUSTRIES THERMAL SYSTEMS, LTD.
    Inventors: Makoto Hattori, Masahiko Asai, Kazuki Niwa
  • Patent number: 10547225
    Abstract: A method for producing an electric motor provided with a stator core configured by laminating a required number of annular electromagnetic steel sheets having a plurality of tooth portions on an inner periphery thereof. The circumferential widths of the tooth portions become gradually narrower in a stepwise fashion toward an uppermost surface and an undermost surface of the plurality of laminated electromagnetic steel sheets, whereby the shoulder portions on both sides in a circumferential direction of the tooth portions smoothly change. A flexible, planar insulating member is provided having a first portion of a shape similar to a planar shape of said electromagnetic steel sheet, and further comprising flexible ear portions at positions corresponding to shoulder portions on both sides in a circumferential direction of the tooth portions.
    Type: Grant
    Filed: December 10, 2018
    Date of Patent: January 28, 2020
    Assignee: MITSUBISHI HEAVY INDUSTRIES THERMAL SYSTEMS, LTD.
    Inventors: Makoto Hattori, Masahiko Asai, Kazuki Niwa
  • Patent number: 10539877
    Abstract: After a developing step is performed by feeding developer to the substrate, a second nozzle starts dispensation of a surfactant rinse liquid to a position away from the center of a rotating substrate. This operation is performed such that the center of the substrate does not enter into a reaching region of the substrate where the surfactant rinse liquid dispensed from the second nozzle firstly reaches. Accordingly, a point of the reaching region of the surfactant rinse liquid is dispersed, leading to suppression in locally smaller or larger line width of a resist pattern at the center and around the center of the substrate. Consequently, this achieves enhanced uniformity of the line widths of the resist pattern within a surface of the substrate during the rinse process.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: January 21, 2020
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Masahiko Harumoto, Koji Kaneyama, Masaya Asai, Yuji Tanaka, Chisayo Nakayama, You Arisawa
  • Patent number: 10444636
    Abstract: Vacuum ultraviolet rays are emitted to a surface to be processed of a substrate to be processed by a light source. During an emission period in which the vacuum ultraviolet rays are emitted from the light source to the substrate, part of the vacuum ultraviolet rays is received by an illuminometer, and illuminance of the received vacuum ultraviolet rays is measured. A light receiving surface of the illuminometer is located at a constant height that is based on the surface to be processed of the substrate during the emission period of the vacuum ultraviolet rays. An exposure amount of the substrate is calculated based on the illuminance measured by the illuminometer. Emission of the vacuum ultraviolet rays from the light source to the substrate is stopped based on the calculated exposure amount of the substrate.
    Type: Grant
    Filed: February 21, 2018
    Date of Patent: October 15, 2019
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Tomohiro Matsuo, Yasuhiro Fukumoto, Takafumi Oki, Masaya Asai, Masahiko Harumoto, Yuji Tanaka, Chisayo Nakayama
  • Publication number: 20190294049
    Abstract: After a developing step is performed by feeding developer to the substrate, a second nozzle starts dispensation of a surfactant rinse liquid to a position away from the center of a rotating substrate. This operation is performed such that the center of the substrate does not enter into a reaching region of the substrate where the surfactant rinse liquid dispensed from the second nozzle firstly reaches. Accordingly, a point of the reaching region of the surfactant rinse liquid is dispersed, leading to suppression in locally smaller or larger line width of a resist pattern at the center and around the center of the substrate. Consequently, this achieves enhanced uniformity of the line widths of the resist pattern within a surface of the substrate during the rinse process.
    Type: Application
    Filed: February 27, 2019
    Publication date: September 26, 2019
    Inventors: Masahiko HARUMOTO, Koji KANEYAMA, Masaya ASAI, Yuji TANAKA, Chisayo NAKAYAMA, You ARISAWA
  • Patent number: 10424990
    Abstract: Provided is an inverter-integrated electric compressor which uses the filter circuit as the substrate to eliminate a bulbar connection, improves assembly properties of the inverter device, optimizes the substrate structure, and makes the inverter device more compact and economical. In this inverter-integrated electric compressor, the inverter device is provided with multiple high-voltage electrical components which configure a noise removal filter circuit, a power substrate on which a power element is mounted, a control substrate on which a control circuit is mounted, and a filter circuit substrate which configures the filter circuit by the multiple high-voltage electrical components being connected in a pattern and mounted thereon, wherein the high-voltage electrical components, the power substrate, the control substrate and the filter circuit substrate are configured to be so as to be unitized together and housed and arranged in an inverter housing unit.
    Type: Grant
    Filed: January 8, 2014
    Date of Patent: September 24, 2019
    Assignee: Mitsubishi Heavy Industries Thermal Systems, Ltd.
    Inventors: Makoto Hattori, Masahiko Asai
  • Publication number: 20190288660
    Abstract: A piezoelectric monocrystalline substrate is composed of a material represented by LiAO3 (A represents at least one element selected from the group consisting of niobium and tantalum), a bonding layer is compose of a material of an oxide of at least one element selected from the group consisting of niobium and tantalum, and an interface layer is provided along an interface between the piezoelectric monocrystalline substrate 6 and bonding layer, and the interface layer has a composition of ExO(1-x) (E represents at least one element selected from the group consisting of niobium and tantalum and 0.29?x?0.89).
    Type: Application
    Filed: May 24, 2019
    Publication date: September 19, 2019
    Inventors: Masashi GOTO, Tomoyoshi TAI, Takahiro YAMADERA, Yuji HORI, Keiichiro ASAI, Masahiko NAMERIKAWA, Takashi YOSHINO
  • Patent number: 10401736
    Abstract: An atmosphere in a processing chamber in which a substrate is stored is discharged by a suction device. At a time point at which oxygen concentration in the processing chamber is lowered to predetermined exposure starting concentration, emission of vacuum ultraviolet rays from a light source to the substrate is started. The emission of the vacuum ultraviolet rays to the substrate is stopped at a time point at which the exposure amount of the substrate increases to a predetermined set exposure amount. The exposure starting concentration is defined in advance to be higher than 1% and lower than oxygen concentration in the air, and is defined in advance such that ozone generated from oxygen atoms by the emission of the vacuum ultraviolet rays do not damage the film on the surface to be processed of the substrate.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: September 3, 2019
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Tomohiro Matsuo, Yasuhiro Fukumoto, Takafumi Oki, Masaya Asai, Masahiko Harumoto, Yuji Tanaka, Chisayo Nakayama
  • Patent number: 10395942
    Abstract: During a first period, pure water used as a low-volatile liquid is supplied onto a substrate while the substrate is rotated. After discharge of the low-volatile liquid is stopped, the low-volatile liquid remains in a large region on a DSA film. The low-volatile liquid is held on the DSA film without reacting with the DSA film. During a subsequent second period, an organic solvent is supplied to the substrate while the substrate is rotated. The organic solvent supplied to the substrate is mixed with the low-volatile liquid remaining on the DSA film. In this case, volatilization of the organic solvent is inhibited on the DSA film.
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: August 27, 2019
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Masahiko Harumoto, Koji Kaneyama, Yuji Tanaka, Masaya Asai
  • Publication number: 20190222189
    Abstract: An acoustic wave device includes a piezoelectric material substrate, an intermediate layer on the piezoelectric material substrate and composed of one or more materials selected from the group consisting of silicon oxide, aluminum nitride and sialon, a bonding layer on the intermediate layer and composed of one or more materials selected from the group consisting of tantalum pentoxide, niobium pentoxide, titanium oxide, mullite, alumina, a high resistance silicon and hafnium oxide, a supporting body composed of a polycrystalline ceramic and bonded to the bonding layer by direct bonding, and an electrode on the piezoelectric material substrate.
    Type: Application
    Filed: March 26, 2019
    Publication date: July 18, 2019
    Inventors: Tomoyoshi Tai, Masahiko Namerikawa, Yudai Uno, Ryosuke Hattori, Keiichiro Asai
  • Publication number: 20190196335
    Abstract: A substrate processing apparatus includes a development processor and a reversal film former, and processes a substrate having one surface on which a resist film made of a photosensitive material is formed. The development processor forms a resist pattern on the one surface of the substrate by performing development processing on a resist film using a development liquid. A reversal film former forms a reversal film having etch resistance higher than that of the resist film on the one surface of the substrate to cover the resist pattern while regulating a temperature of the substrate in a certain range after the development processing is performed by the development processor.
    Type: Application
    Filed: April 3, 2017
    Publication date: June 27, 2019
    Inventors: Masahiko HARUMOTO, Koji KANEYAMA, Yuji TANAKA, Masaya ASAI
  • Patent number: 10331034
    Abstract: A substrate processing apparatus includes a spin chuck that holds a substrate, a processing liquid supply unit that supplies a first processing liquid having first specific gravity and a second processing liquid having second specific gravity smaller than the first specific gravity to a surface to be processed of the substrate held by the spin chuck, a collection tank that stores the used first and second processing liquids that have been supplied to the substrate, and a processing liquid separating mechanism that separates the first processing liquid and the second processing liquid based on specific gravity, the first and second processing liquids being stored in the collection tank.
    Type: Grant
    Filed: April 15, 2016
    Date of Patent: June 25, 2019
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Yuji Tanaka, Masaya Asai, Masahiko Harumoto, Koji Kaneyama
  • Publication number: 20190181711
    Abstract: A method for producing an electric motor provided with a stator core configured by laminating a required number of annular electromagnetic steel sheets having a plurality of tooth portions on an inner periphery thereof. The circumferential widths of the tooth portions become gradually narrower in a stepwise fashion toward an uppermost surface and an undermost surface of the plurality of laminated electromagnetic steel sheets, whereby the shoulder portions on both sides in a circumferential direction of the tooth portions smoothly change. A flexible, planar insulating member is provided having a first portion of a shape similar to a planar shape of said electromagnetic steel sheet, and further comprising flexible ear portions at positions corresponding to shoulder portions on both sides in a circumferential direction of the tooth portions.
    Type: Application
    Filed: December 10, 2018
    Publication date: June 13, 2019
    Applicant: MITSUBISHI HEAVY INDUSTRIES THERMAL SYSTEMS, LTD.
    Inventors: Makoto HATTORI, Masahiko ASAI, Kazuki NIWA
  • Patent number: 10186935
    Abstract: In an inverter-integrated electric compressor, a sub-board (26) divided from a main board is mounted with a communication circuit (25) and is connected to a communication harness (24) via a connector (34).
    Type: Grant
    Filed: May 19, 2014
    Date of Patent: January 22, 2019
    Assignee: MITSUBISHI HEAVY INDUSTRIES THERMAL SYSTEMS, LTD.
    Inventors: Makoto Hattori, Masahiko Asai
  • Patent number: 10122247
    Abstract: In this inverter-integrated electric compressor, the circuit board of an inverter device is divided into: a main circuit board (23) having a shape and size that can be housed within an inverter housing section (8); and a sub-circuit board (26) that is electrically connected to the main circuit board (23). The main circuit board (23) is affixed and installed to boss sections (27) at at least the (four) corners, and is also affixed and supported by electrical components mounted to the circuit board (23). The sub-circuit board (26) has a flaring shape from the front end side to the back end side, and is affixed and installed to boss sections (31) at three front/back points in a space below the main circuit board (23) to the back of a bottom section inclined downwards toward the back from the front of the inverter housing section (8).
    Type: Grant
    Filed: March 31, 2014
    Date of Patent: November 6, 2018
    Assignee: MITSUBISHI HEAVY INDUSTRIES THERMAL SYSTEMS, LTD.
    Inventors: Makoto Hattori, Masahiko Asai
  • Patent number: 10122237
    Abstract: An inverter circuit board to which a P-N terminal is attached such that stress applied to the circuit board can be distributed, making it possible to prevent detachment of the P-N terminal or damage to the circuit board or any components mounted thereon. Also provided is an inverter-containing electric compressor. A P-N terminal via which DC power is inputted is attached to this inverter circuit board, on which an inverter circuit is mounted. The P-N terminal is provided with the following: a pair of pins; a busbar of a prescribed length joined perpendicularly to one end of each pin; a resin molded member formed integrally with the pair of pins and the busbars; and surface-mounting terminals, soldered to the surface of the circuit board, and through-hole terminals, inserted into and soldered to through-holes in the circuit board, said terminals being provided on the pair of busbars.
    Type: Grant
    Filed: February 7, 2014
    Date of Patent: November 6, 2018
    Assignee: MITSUBISHI HEAVY INDUSTRIES THERMAL SYSTEMS, LTD.
    Inventors: Makoto Hattori, Masahiko Asai
  • Patent number: 9948165
    Abstract: Provided is an inverter-integrated electric compressor which has improved assembly properties and assembly precision, and improved productivity. In this inverter-integrated electric compressor, a P-N terminal is provided on the inverter device main substrate, and a power source-side cable can be connected to the P-N terminal by inserting a connector provided at one end; by arranging and mounting multiple high-voltage electric components on the back of the main substrate in the area where the P-N terminal is arranged, a filter circuit is provided on the main substrate. The multiple high-voltage electric components are integrally coupled via fitting units provided on the housing cases of one another and are arranged in a prescribed position on the back of the main substrate with a positioning means provided on one of the housing cases.
    Type: Grant
    Filed: January 8, 2014
    Date of Patent: April 17, 2018
    Assignee: MITSUBISHI HEAVY INDUSTRIES AUTOMOTIVE THERMAL SYSTEMS CO., LTD.
    Inventors: Makoto Hattori, Masahiko Asai
  • Patent number: 9929618
    Abstract: An inverter-integrated electric compressor for which an inverter device is integrally incorporated, with a main circuit board being housed while the four corners thereof are supported by boss parts at locations above high-voltage electrical components and semiconductor switching elements. The multiple high-voltage electrical components are arranged in parallel along one side of the main circuit board at one side of an inverter housing part, with one side of the main circuit board being supported from below by the upper surface of these components. The multiple semiconductor switching elements are arranged in parallel along the other side opposing the one side of the main circuit board, at the other side of the inverter housing part, with the other side of the main circuit board being supported from below by multiple lead terminals extending upwards.
    Type: Grant
    Filed: February 18, 2014
    Date of Patent: March 27, 2018
    Assignee: MITSUBISHI HEAVY INDUSTRIES AUTOMOTIVE THERMAL SYSTEMS CO., LTD.
    Inventors: Makoto Hattori, Masahiko Asai, Hiroyuki Kamitani, Koji Nakano