Patents by Inventor Masahiko Ichishima

Masahiko Ichishima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8691367
    Abstract: A micro channel structure body 10 in which a micro channel 3 having a predetermined cross-sectional shape is formed in a laminate where substrates 1a, 1b, and 1c having formed thereon electrodes 2a, 2b, and 2c made of a thin film are laminated sequentially. The above-mentioned micro channel 3 is formed in a perpendicular direction ? perpendicular to a lamination direction ? of the above-mentioned laminate. Inner surfaces 3a and 3b of the above-mentioned micro channel 3 have an acute angle ? with respect to the lamination direction ? of the above-mentioned laminate. The above-mentioned plurality of electrodes 2a, 2b, and 2c are formed and exposed in the lamination direction ? of the inner surfaces 3a and 3b of the above-mentioned micro channel 3.
    Type: Grant
    Filed: July 16, 2008
    Date of Patent: April 8, 2014
    Assignee: Covalent Materials Corporation
    Inventors: Hiroyuki Goto, Haruo Murayama, Susumu Kimijima, Masahiko Ichishima
  • Publication number: 20090029115
    Abstract: A micro channel structure body 10 in which a micro channel 3 having a predetermined cross-sectional shape is formed in a laminate where substrates 1a, 1b, and 1c having formed thereon electrodes 2a, 2b, and 2c made of a thin film are laminated sequentially. The above-mentioned micro channel 3 is formed in a perpendicular direction ? perpendicular to a lamination direction ? of the above-mentioned laminate. Inner surfaces 3a and 3b of the above-mentioned micro channel 3 have an acute angle ? with respect to the lamination direction ? of the above-mentioned laminate. The above-mentioned plurality of electrodes 2a, 2b, and 2c are formed and exposed in the lamination direction ? of the inner surfaces 3a and 3b of the above-mentioned micro channel 3.
    Type: Application
    Filed: July 16, 2008
    Publication date: January 29, 2009
    Inventors: Hiroyuki Goto, Haruo Murayama, Susumu Kimijima, Masahiko Ichishima
  • Patent number: 7090932
    Abstract: A plasma resistant member has a base material and a coating layer made of an Y2O3, the coating layer being formed on a surface of the base material. The coating layer has a thickness of 10 ?m or more and the Y2O3 of the coating layer contains solid solution Si ranging from 100 ppm to 1000 ppm.
    Type: Grant
    Filed: July 29, 2004
    Date of Patent: August 15, 2006
    Assignee: Toshiba Ceramics Co., Ltd.
    Inventors: Yoshio Kobayashi, Masahiko Ichishima, Yuu Yokoyama
  • Publication number: 20060037536
    Abstract: The present invention concerns a plasma resistant member comprising Y2O3 or YAG thermal performed thermal spray on an alumina base material, wherein the surface roughness Ra of the alumina base material is 5 ?m or more and 15 ?m or less. By rendering the surface layer of the alumina base material porous to a porosity of 20% or more and 60% or less to a depth of ranging from 10 ?m to 1O0 ?m, aplasma resistant member having an enhanced adhesion strength can be provided. The aforementioned plasma resistant member can be produced by subjecting the surface of analumina base material to chemical etching, and then performing thermal spray Y2O3 or YAG on the roughened surface of the alumina base material to form a plasma resistant layer.
    Type: Application
    Filed: October 15, 2004
    Publication date: February 23, 2006
    Inventors: Yoshio Kobayashi, Masahiko Ichishima, Yuu Yokoyama
  • Publication number: 20050084692
    Abstract: A plasma resistant member has a base material and a coating layer made of an Y2O3, the coating layer being formed on a surface of the base material. The coating layer has a thickness of 10 ?m or more and the Y2O3 of the coating layer contains solid solution Si ranging from 100 ppm to 1000 ppm.
    Type: Application
    Filed: July 29, 2004
    Publication date: April 21, 2005
    Inventors: Yoshio Kobayashi, Masahiko Ichishima, Yuu Yokoyama
  • Patent number: 6861122
    Abstract: The ceramic member of this invention is formed on the surfaces of crystal grains with a plurality of protrusions having smaller diameter than that of the crystal grain, said crystal grain composing at least the surface or its vicinity of a dense ceramic base material of purity being 95 wt % or higher. Such ceramic members may be produced by performing the surface of a dense ceramic base material with a corrosion treatment in an acid etchant, the dense ceramic base material having purity of 95 wt % or higher and exceeding 90% of a theoretical density, whereby ceramic grains existing on the surface or its vicinity of the base material are formed on the surface thereof with a plurality of protrusions.
    Type: Grant
    Filed: January 31, 2002
    Date of Patent: March 1, 2005
    Assignee: Toshiba Ceramics Co., Ltd.
    Inventors: Kazuhide Kawai, Shunzo Shimai, Makoto Takahashi, Hiroaki Shitara, Fumio Tokuoka, Masahiko Ichishima, Takashi Suzuki, Toyokazu Matsuyama, Hideo Uemoto
  • Publication number: 20030019843
    Abstract: The ceramic member of this invention is formed on the surfaces of crystal grains with a plurality of protrusions having smaller diameter than that of the crystal grain, said crystal grain composing at least the surface or its vicinity of a dense ceramic base material of purity being 95 wt % or higher. Such ceramic members may be produced by performing the surface of a dense ceramic base material with a corrosion treatment in an acid etchant, the dense ceramic base material having purity of 95 wt % or higher and exceeding 90% of a theoretical density, whereby ceramic grains existing on the surface or its vicinity of the base material are formed on the surface thereof with a plurality of protrusions.
    Type: Application
    Filed: January 31, 2002
    Publication date: January 30, 2003
    Applicant: TOSHIBA CERAMICS CO., LTD.
    Inventors: Kazuhide Kawai, Shunzo Shimai, Makoto Takahashi, Hiroaki Shitara, Fumio Tokuoka, Masahiko Ichishima, Takashi Suzuki, Toyokazu Matsuyama, Hideo Uemoto
  • Patent number: 6043468
    Abstract: A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.
    Type: Grant
    Filed: July 31, 1998
    Date of Patent: March 28, 2000
    Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron Limited
    Inventors: Eiichi Toya, Masahiko Ichishima, Tomio Konn, Tomohiro Nagata, Shigeru Yamamura, Norihiko Saito, Kouji Teraoka, Takeshi Inaba, Hiroyuki Honma, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
  • Patent number: 5868850
    Abstract: A vapor phase growth unit for vapor phase growing on the surface of a wafer under a heated condition, which supports the wafer with a wafer supporter within a reaction chamber and has a heater under the wafer supported by said wafer supporter, wherein a reflection plate for reflecting at least downward heat from said heater is provided, an insulation cylinder is provided surrounding the side periphery of the heater, and the reflection plate consists of vitreous carbon.
    Type: Grant
    Filed: June 6, 1996
    Date of Patent: February 9, 1999
    Assignees: Toshiba Ceramics Co., Ltd., Toshiba Kikai Co., Ltd.
    Inventors: Masahiko Ichishima, Eiichi Toya, Tadashi Ohashi, Masaki Shimada, Shinichi Mitani, Takaaki Honda
  • Patent number: 5324411
    Abstract: A disc-shaped electrode plate body is made of high-purity glassy carbon and has a large number of very-small-diameter through holes each of which has a plurality of spherical recesses in its internal wall surface.
    Type: Grant
    Filed: September 18, 1992
    Date of Patent: June 28, 1994
    Assignee: Toshiba Ceramics Co., Ltd.
    Inventors: Masahiko Ichishima, Yasumi Sasaki, Eiichi Toya, Masatoshi Kasahara, Ritsurou Makita