Abstract: To provide a light irradiation device using a plurality of flash lamps in which a structure that can emit high intensity light as a whole and enables a flash lamp to be used for a practical lifetime without increasing an input current to each lamp is adopted. A light emission surface is provided on a distal end on a second electrode introducing part side of a light-emitting tube of a flash lamp including a first electrode introducing part and the second electrode introducing part, and a plurality of flash lamps are arranged in a standing manner on a top plate of a processing chamber so that the light emission surface faces the inside of the processing chamber.

Abstract: To provide a light irradiation device using a plurality of flash lamps in which a structure that can emit high intensity light as a whole and enables a flash lamp to be used for a practical lifetime without increasing an input current to each lamp is adopted. A light emission surface is provided on a distal end on a second electrode introducing part side of a light-emitting tube of a flash lamp including a first electrode introducing part and the second electrode introducing part, and a plurality of flash lamps are arranged in a standing manner on a top plate of a processing chamber so that the light emission surface faces the inside of the processing chamber.

Abstract: Disclosed herein are a short arc type flash lamp having high lamp starting performance and capable of reducing the diameter of its seal tube part, and a light source device thereof. The flash lamp has an electrode shaft of one of the main electrodes, and an electrode shaft of the other of the main electrodes and leads for starting auxiliary electrodes which are respectively led out from the second seal tube part, and an external trigger is disposed in a state in which it extends in the circumferential direction on the outer peripheral surface of one end side region of the second seal tube part. The light source device is structured by a concave reflection mirror disposed on the second seal tube part side of the flash lamp in a state in which a focal point of the concave reflection mirror coincides with a luminous point of the flash lamp.

Abstract: A double-capped short arc flash lamp includes an arc tube, a pair of main electrodes disposed in the arc tube, and a pair of auxiliary electrodes disposed in the arc tube. The flash lamp also includes inner leads and outer leads associated with the two auxiliary electrodes, respectively. The flash lamp also includes a first sealing tube and a second sealing tube provided at opposite ends of the arc tube. A sealing glass tube is partly received in the second sealing tube. Grooves are formed in the outer surface of the sealing glass tube in a region where the sealing glass tube overlaps the second sealing tube. The grooves extend in the axial direction of the sealing glass tube, and are configured to receive the inner leads and the outer leads. Metallic foils electrically connect the inner leads with the outer leads, respectively.

Abstract: Disclosed herein are a short arc type flash lamp having high lamp starting performance and capable of reducing the diameter of its seal tube part, and a light source device thereof. The flash lamp has an electrode shaft of one of the main electrodes, and an electrode shaft of the other of the main electrodes and leads for starting auxiliary electrodes which are respectively led out from the second seal tube part, and an external trigger is disposed in a state in which it extends in the circumferential direction on the outer peripheral surface of one end side region of the second seal tube part. The light source device is structured by a concave reflection mirror disposed on the second seal tube part side of the flash lamp in a state in which a focal point of the concave reflection mirror coincides with a luminous point of the flash lamp.

Abstract: A double-capped short arc flash lamp includes an arc tube, a pair of main electrodes disposed in the arc tube, and a pair of auxiliary electrodes disposed in the arc tube. The flash lamp also includes inner leads and outer leads associated with the two auxiliary electrodes, respectively. The flash lamp also includes a first sealing tube and a second sealing tube provided at opposite ends of the arc tube. A sealing glass tube is partly received in the second sealing tube. Grooves are formed in the outer surface of the sealing glass tube in a region where the sealing glass tube overlaps the second sealing tube. The grooves extend in the axial direction of the sealing glass tube, and are configured to receive the inner leads and the outer leads. Metallic foils electrically connect the inner leads with the outer leads, respectively.