Abstract: An apparatus for measuring an alignment accuracy between overlaid alignment marks formed to each of alignment mark portions on every plural chip units or exposure units arranged on a substrate to be measured includes an XY stage movable X and Y directions while mounting the substrate, an illumination system for illuminating each of the alignment mark portions, a detecting system having a lens for collecting a reflection light, a focusing system for focusing the reflection light, a scanning system for scanning a reflection light image and an image sensor receiving reflection light image for conversion into an image signal. An alignment accuracy calculator measures the alignment accuracy between the overlaid alignment marks.

Abstract: An apparatus for measuring an alignment accuracy between overlaid alignment marks formed to each of alignment mark portions on every plural chip units or exposure units arranged on a substrate to be measured includes an XY stage movable X and Y directions while mounting the substrate, an illumination system for illuminating each of the alignment mark portions, a detecting system having a lens for collecting a reflection light, a focusing system for focusing the reflection light, a scanning system for scanning a reflection light image and an image sensor receiving reflection light image for conversion into an image signal. An alignment accuracy calculator measures the alignment accuracy between the overlaid alignment marks.

Abstract: An apparatus for measuring an alignment accuracy between overlaid alignment marks formed to each of alignment mark portions on every plural chip units or exposure units arranged on a substrate to be measured, comprising: an XY stage running in a direction x and in a direction y while mounting the substrate; an illumination optical system for illuminating each of the alignment mark portions in a state where the XY stage runs in a direction x which is a direction of arranging the chips; a detecting optical system having an objective lens for collecting a reflection light in the running state obtained from the overlaid alignment marks, a focusing optical system for focusing the reflection light in the running state obtained from the objective lens, a scanning optical system for scanning reflection light image in the running state focused by the focusing optical system in a direction opposite to that of the running and a linear image sensor receiving reflection light image substantially in a static state being sc

Abstract: An apparatus for measuring an alignment accuracy between overlaid alignment marks formed to each of alignment mark portions on every plural chip units or exposure units arranged on a substrate to be measured, comprising: an XY stage running in a direction x and in a direction y while mounting the substrate; an illumination optical system for illuminating each of the alignment mark portions in a state where the XY stage runs in a direction x which is a direction of arranging the chips; a detecting optical system having an objective lens for collecting a reflection light in the running state obtained from the overlaid alignment marks, a focusing optical system for focusing the reflection light in the running state obtained from the objective lens, a scanning optical system for scanning reflection light image in the running state focused by the focusing optical system in a direction opposite to that of the running and a linear image sensor receiving reflection light image substantially in a static state being sc

Abstract: A main metallic gasket body is formed by interposing an intermediate plate between two elastic metallic plates, each of which have a bead formed around combustion chambers. The intermediate plate is divided into two pieces, steps are formed by the two pieces, and spaced formed between the pieces are provided with thermal spray stoppers.

Abstract: A reference electrode is formed of lead, zinc, tin, indium, cadmium, magnesium, or any alloy thereof. A pair of electrodes comprising the reference electrode and a responding electrode made of a conductive solid, when placed in oil, develop a potential difference varying with the acidity or basicity of the oil and thus enable the efficient determination of the acidity or basicity.

Abstract: In an internal combustion engine, the combination of a cylinder head with a plane lower surface and a cavity, a piston with a plane upper surface and a cavity, the plane surfaces of the piston and the cylinder head cooperating to form a squish area on one side of the cylinder bore, and a spark plug protruding into the combustion chamber defined by the cavities so that its igniting tip lies substantially in the squish plane on the other side of the cylinder bore.

Abstract: A fuel supply system for engines having a carburetor which has a float chamber and a vapor bleed passage connected to the float chamber, wherein a part of a fuel supply passage means for supplying fuel from a fuel tank to the carburetor traverses through the float chamber so that the fuel flowing through the fuel supply passage means absorbs heat from the fuel contained in the float chamber. The fuel entering into the float chamber releases volatile light components as vapor towards the vapor bleed passage while the liquid fuel contained in the float chamber becomes a more stable liquid due to the release of volatile components and the cooling effected by heat exchange with the fuel flowing through the fuel supply passage means.

Abstract: Disclosed is a fuel feed device of an internal combustion engine. A heating device is disposed in the fuel supply conduit communicating the carburetor with the fuel tank for vaporizing the low boiling components in the fuel. The liquid fuel containing bubbles of the fuel vapor therein is introduced into a low boiling component separator. In this separator, the low boiling components in the fuel are removed and then the liquid fuel consisting of the high boiling components is fed into the carburetor.

Abstract: A fuel supply system for engines, including a fuel tank divided into first and second chambers, a fuel supply passage means including a fuel pump and supplying fuel from the fuel tank to a carburetor of the engine and a fuel return passage means for returning the excess fuel supplied to the carburetor to the second chamber of the fuel tank. An upper region of the second chamber is bled, while the first chamber is supplied with new fuel, the fuel supply passage means including a change-over valve which usually connects the fuel supply passage to the first chamber, while it connects the fuel supply passage to the second chamber when the fuel temperature has risen beyond a predetermined value.

Abstract: Disclosed is a fuel feed device of an internal combustion engine. The fuel supply conduit communicating the carburetor and the fuel tank is arranged in the carburetor for cooling the carburetor and for vaporizing the low boiling components in the fuel only when the temperature of the engine is higher than a predetermined level. The fuel flowing out from the fuel supply passage located in the carburetor is introduced into a low boiling component separator. In this separator, the low boiling components in the fuel are removed, and then the fuel consisting of the high boiling components is fed into the carburetor to prevent the occurrence of an abnormal fuel metering operation under a high-temperature condition.

Abstract: A vaporization promoting apparatus for an internal combustion engine is disclosed, in which at least one electrode is disposed in an intake manifold, and the electrode and the intake manifold are respectively connected to a high voltage generator which is provided for forming an intensive electric field in the interior of the intake manifold, thereby vaporization of a fuel injected into the intake manifold from a nozzle of a carburetor is promoted by the intensive electric field.

Abstract: An internal combustion with an arrangement for heating the suction gases in order to promote the vaporization of the fuel contained within the suction gases is disclosed. In the arrangement, the exhaust gases exhausted from the engine are routed around fins formed on the exterior wall of the bottom floor of the intake manifold for receiving the heat of the exhaust gases, and a covering is provided for enclosing the fins of the intake manifold in a closed chamber which is defined between the covering and the exterior wall of the intake manifold. The covering is provided with inlet and outlet ports so as to introduce the exhaust gases into the chamber and so as to drain the exhaust gases from the chamber. The introduced exhaust gases heat the entire surface of each fin so that the heat of the exhaust gases is transmitted to the fuel within the suction gases thereby accelerating vaporization of the fuel.

Abstract: A mixture gas heating device for the mixture gas to be introduced into an internal combustion engine, wherein there is provided a change-over flap valve in the vicinity of a mixture gas heating portion within a suction manifold. This change-over flap valve is adapted to switch exhaust gas passages from one to another in a manner that, when said valve is in its open position before the engine warm-up run, there is defined a gas passage, through which exhaust gases from an engine once impinge on the mixture gas heating portion of said suction manifold to be heated thereby, and then into an exhaust manifold, while there is defined another gas passage, through which exhaust gases from the engine is directly fed into the exhaust manifold, when said valve is in its closed position after the engine warm-up run.

Abstract: An arrangement is disclosed for heating the suction gases of an internal combustion engine by utilizing the exhaust gases from the engine in order to promote the vaporization of the fuel contained within the suction gases while the engine is still in a cool state. In the arrangement, the high temperature exhaust gases from the engine are routed, by the control of a control valve rotatable between two positions in the exhaust manifold, around fins formed on the exterior wall of the bottom floor of the intake manifold for receiving the heat of the exhaust gases, and a covering is provided for enclosing the fins in a closed chamber. The covering, made of a heat resistant metal plate, is provided with inlet and outlet ports so as to introduce the exhaust gases into the chamber and drain the exhaust gases from the chamber.

Abstract: An arrangement is disclosed for heating the suction gases of an internal combustion engine in order to promote the vaporization of the fuel contained within the suction gases while the engine is still in a cool state. In the arrangement, the high temperature exhaust gases of the engine are routed, by the control of a rotatable control valve in the exhaust manifold, around fins formed on the exterior wall of the bottom floor of the intake manifold for receiving the heat of the exhaust gases, and a covering is provided for enclosing the fins in a closed chamber which is defined between the covering and the exterior wall of the intake manifold. The covering is provided with inlet and outlet ports so as to introduce the exhaust gases into the chamber and drain the exhaust gases from the chamber.

Abstract: A mechanism is provided whereby the opening of an automatic choke valve is controlled by means of pressure in a diaphragm chamber with the chamber being selectively communicated with a vacuum pickup tube or an atmospheric pressure pickup tube through operation of a solenoid controlled valve. A switch actuatable in response to vehicle speed and another switch actuatable in response to engine temperature operate to selectively connect the solenoid controlled valve to a power source thereby to determine the operating mode of the valve.

Abstract: An improved choke valve control arrangement whose regulating thermostat is heated by a separate electric heater is described. The thermostat heater is coupled to the vehicle power supply through one of a first plurality of switch controlled paths of difference impedance. Each path corresponds to a different rate of opening of the choke valve as a function of engine temperature. A separate room heater arranged to absorb heat from the engine cooling water is coupled to the power supply through a second plurality of switch controlled paths. A ganging arrangement for the switches associates corresponding pairs of paths of the thermostat and room heaters so that a change in the excitation of the room heater is accompanied by a proportional change in the rate of heating of the thermostat heater.