Patents by Inventor Masahiko Suda

Masahiko Suda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    Publication number: 20240071723
    Abstract: An etching method includes providing a substrate on a substrate support in a chamber of a plasma processing apparatus. The etching method further includes etching the substrate with plasma generated in the chamber, thereby forming a recess in the substrate. In the etching, an electrical bias is supplied to the substrate support, to attract ions from the plasma into the substrate. In the etching, at least one of a bias frequency, which is a reciprocal of a time length of a waveform cycle of the electrical bias, and a pulse duty ratio of a pulsed electrical bias is modified to maintain an ion energy flux to the substrate.
    Type: Application
    Filed: August 23, 2023
    Publication date: February 29, 2024
    Applicant: Tokyo Electron Limited
    Inventors: Ryutaro SUDA, Koki TANAKA, Ryu NAGAI, Masahiko YOKOI, Ikko TANAKA
  • Ultrasound diagnosis apparatus
    Patent number: 8424822
    Abstract: An ultrasound diagnosis apparatus having a display supported by an arm mechanism is provided. The arm mechanism has a first arm member and a second arm member. A turning mechanism is provided at a base end portion of the first arm member and a turning mechanism is provided at a working end portion of the second arm member. An upper end portion of the first arm member and a lower end portion of the second arm member form a connection section, and an intermediate turning mechanism is provided inside the connection section. Because the arm mechanism is gently curved over its entire structure, no excessive load is applied to the cable passing inside the arm mechanism. The cable extends in the connection section along an outer route having a gentle radius of curvature.
    Type: Grant
    Filed: July 13, 2007
    Date of Patent: April 23, 2013
    Assignee: Hitachi Aloka Medical, Ltd.
    Inventors: Masahiko Suda, Takayoshi Saito
  • Ultrasound diagnosis apparatus
    Publication number: 20080048091
    Abstract: An ultrasound diagnosis apparatus having a display supported by an arm mechanism is provided. The arm mechanism has a first arm member and a second arm member. A turning mechanism is provided at a base end portion of the first arm member and a turning mechanism is provided at a working end portion of the second arm member. An upper end portion of the first arm member and a lower end portion of the second arm member form a connection section, and an intermediate turning mechanism is provided inside the connection section. Because the arm mechanism is gently curved over its entire structure, no excessive load is applied to the cable passing inside the arm mechanism. The cable extends in the connection section along an outer route having a gentle radius of curvature.
    Type: Application
    Filed: July 13, 2007
    Publication date: February 28, 2008
    Applicant: ALOKA CO., LTD.
    Inventors: Masahiko Suda, Takayoshi Saito
  • Ultrasound diagnosis apparatus
    Patent number: D728791
    Type: Grant
    Filed: April 9, 2014
    Date of Patent: May 5, 2015
    Assignee: Hitachi Aloka Medical, Ltd.
    Inventors: Atsushi Ninomiya, Katsumi Usami, Masaru Yokoyama, Kazuyuki Yanase, Masahiko Suda, Kento Ui