Patents by Inventor Masahiro Fukuda

Masahiro Fukuda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11774854
    Abstract: A method of processing a substrate includes: performing a first developing process of moving a nozzle having one end surface and a discharge port opened at the end surface while making the end surface come into contact with a developer on a front surface of a substrate in a state in which the nozzle is disposed so that the end surface faces the front surface and the developer is discharged from the discharge port at a first flow rate while rotating the substrate; and after the first developing process, performing a second developing process of discharging the developer from the discharge port at a second flow rate higher than the first flow rate in a state in which the end surface is in contact with the developer on the front surface at a position facing a center of the front surface of the substrate while rotating the substrate.
    Type: Grant
    Filed: October 4, 2022
    Date of Patent: October 3, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yusaku Hashimoto, Kouichirou Tanaka, Masahiro Fukuda, Atsushi Ookouchi
  • Publication number: 20230280219
    Abstract: The torque measuring device includes: a casing made of a magnetic metal; a rotating shaft rotatably arranged inside the casing and having a magnetostrictive effect section whose magnetic permeability changes according to torque to be transmitted; and a torque sensor arranged around the magnetostrictive effect section and supported by the casing, the torque sensor including a coil unit formed in a cylindrical shape using a flexible substrate having a detection coil that changes voltage in response to changes in the magnetic permeability of the magnetostrictive effect section, and a holder made of rubber or synthetic resin, covering an outer peripheral surface of the coil unit, and having a portion that protrudes from the coil unit on both sides in an axial direction; and the torque sensor supported by the casing with an outer peripheral surface of the holder fitted into an inner peripheral surface of the casing.
    Type: Application
    Filed: February 28, 2023
    Publication date: September 7, 2023
    Applicants: NSK LTD., Proterial, Ltd.
    Inventors: Masahiro KOBAYASHI, Kota FUKUDA, Hisayoshi FUKUI, Takahiro ODERA, Akitoshi FUJIMORI, Takashi ONIMOTO, Yiming JIN
  • Publication number: 20230280221
    Abstract: A torque measuring device includes a bridge circuit in which four detection coils arranged around a magnetostrictive effect section of a rotating shaft are arranged on four sides; and the bridge circuit includes a resistance element connected to at least one of the four sides for adjusting a resistance value of the side.
    Type: Application
    Filed: February 28, 2023
    Publication date: September 7, 2023
    Applicants: NSK LTD., Proterial, Ltd.
    Inventors: Masahiro KOBAYASHI, Kota FUKUDA, Takahiro ODERA, Naoki FUTAKUCHI
  • Publication number: 20230280222
    Abstract: A torque measuring device includes: a coil unit having a detection coil configured to change a voltage in response to a change in magnetic permeability of a magnetostrictive effect section of a rotating shaft; a back yoke arranged coaxially around the coil unit; a holder configured to hold the coil unit and the back yoke; and an electronic circuit including the detection coil and configured to generate an output voltage according to a voltage of the detection coil, a clearance in a radial direction is provided between an outer peripheral surface of the coil unit and an inner peripheral surface of the back yoke, and a range of change in the clearance that accompanies temperature change during use is regulated to a range in which a change in the output voltage is linear with respect to the change in the clearance.
    Type: Application
    Filed: February 28, 2023
    Publication date: September 7, 2023
    Applicants: NSK Ltd., Proterial, Ltd.
    Inventors: Masahiro Kobayashi, Kota Fukuda, Hisayoshi Fukui, Takahiro Odera, Teruyuki Nakamura, Naoki Futakuchi, Ken Okuyama
  • Publication number: 20230280223
    Abstract: The manufacturing method includes: performing testing of samples having the same configuration as the torque measuring device to be manufactured to find a coil balance Cb that is a ratio (R1×R3)/(R2×R4) of a product R1×R3 of resistance values R1 and R3 of one pair of opposite sides of the four sides of a bridge circuit 8, and a product R2×R4 of resistance values R2 and R4 of another pair of opposite sides of the four sides, and a temperature change rate VT of output voltage Vo of a sensor portion 4, and acquiring a relationship X between the coil balance Cb and the temperature change rate VT from the test results; and measuring the resistance values R1, R2, R3, R4 of the four sides to find the coil balance Cb to find the temperature change rate VT from the relationship X for the torque measuring device to be manufactured.
    Type: Application
    Filed: February 28, 2023
    Publication date: September 7, 2023
    Applicants: NSK LTD., PROTERIAL, LTD.
    Inventors: Masahiro KOBAYASHI, Kota FUKUDA, Hisayoshi FUKUI, Takahiro ODERA, Haruhiko TANNO, Yoshinori KUBO, Naoki FUTAKUCHI, Ken OKUYAMA, Teruyuki NAKAMURA
  • Publication number: 20230259795
    Abstract: A recording medium stores a monitoring program that cause a computer to execute processes including: determining a learning range, used in learning of messages, for each of monitoring target systems based on time-series information of each of past message groups and on keyword information that suggests a forwarding destination; generating a learning model, used to infer information on the forwarding destination, by using the determined learning range as a parameter and by using the time-series information, the information on the forwarding destination, and the keyword information included in each of the messages in the case where the message is the error message as training data; and selecting the learning model to be applied to the new system based on a degree of similarity between the keyword information used in the learning of each of the monitoring target systems and the keyword information of the error message of the new system.
    Type: Application
    Filed: November 9, 2022
    Publication date: August 17, 2023
    Applicant: Fujitsu Limited
    Inventors: YUTA SHIMODA, Shoichi Kogiso, Masahiro FUKUDA, Yuki Umezawa, Naoya Hirota, Toru Kitayama, Tomoaki Shiozawa, Ryota Kanaya
  • Patent number: 11703403
    Abstract: A torque measurement device includes a case that does not rotate even during use; a rotating shaft rotatably supported to the case and having a magnetostrictive effect part whose magnetic permeability changes according to a transmitted torque; and a magnetostrictive sensor having a detection part arranged closely adjacent to the magnetostrictive effect part so that a voltage changes according to change of the magnetic permeability of the magnetostrictive effect part, and being supported to the case; and the torque measurement device has a rotation-preventing construction configured to prevent the magnetostrictive sensor from rotating with respect to the case.
    Type: Grant
    Filed: July 1, 2021
    Date of Patent: July 18, 2023
    Assignee: NSK LTD.
    Inventors: Takahiro Odera, Junji Ono, Masahiro Kobayashi, Kota Fukuda
  • Publication number: 20230146305
    Abstract: A high-strength steel foil for the positive and negative electrode current collectors of nickel-hydrogen secondary batteries which uses a light weight and economical steel foil and which is thin and strong and has excellent rust resistance and resistance to metal ion leaching. Also, a high-strength steel foil for the positive and negative electrode current collectors of nickel-hydrogen secondary batteries which has excellent elongation. The Ni-plated steel foil for hydrogen secondary battery current collectors comprises, by mass %, C: 0.0001 to 0.0200%, Si: 0.0001 to 0.0200%, Mn: 0.005 to 0.300%, P: 0.001 to 0.020%, S: 0.0001 to 0.0100%, Al: 0.0005 to 0.1000%, N: 0.0001 to 0.0040%, one or both of Ti and Nb: 0.800% or less respectively, and a balance of Fe and impurities. The Ni-plated steel foil has an Ni plating layer on both surfaces. The thickness of the Ni plating layer on both surfaces of the Ni-plated steel foil is greater than or equal to 0.
    Type: Application
    Filed: March 24, 2021
    Publication date: May 11, 2023
    Applicant: NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Hiroto UNNO, Masahiro FUKUDA, Naoki FUJIMOTO, Tatsuo NAGATA
  • Publication number: 20230026275
    Abstract: A method of processing a substrate includes: performing a first developing process of moving a nozzle having one end surface and a discharge port opened at the end surface while making the end surface come into contact with a developer on a front surface of a substrate in a state in which the nozzle is disposed so that the end surface faces the front surface and the developer is discharged from the discharge port at a first flow rate while rotating the substrate; and after the first developing process, performing a second developing process of discharging the developer from the discharge port at a second flow rate higher than the first flow rate in a state in which the end surface is in contact with the developer on the front surface at a position facing a center of the front surface of the substrate while rotating the substrate.
    Type: Application
    Filed: October 4, 2022
    Publication date: January 26, 2023
    Inventors: Yusaku HASHIMOTO, Kouichirou TANAKA, Masahiro FUKUDA, Atsushi OOKOUCHI
  • Patent number: 11508589
    Abstract: When performing a liquid processing on a substrate W being rotated and removing a processing liquid by a cleaning liquid, a cleaning liquid nozzle 421 configured to discharge a cleaning liquid slantly with respect to a surface of the substrate W toward a downstream side of a rotational direction of the substrate W and a gas nozzle 411 configured to discharge a gas toward a position adjacent to a central portion side of the substrate W when viewed from a liquid arrival position R of the cleaning liquid are moved from the central portion side toward a peripheral portion side. A rotation number of the substrate is varied such that rotation number in a period during which the liquid arrival position R moves in the second region becomes smaller than a maximum rotation number in a period during which the liquid arrival position moves in the first region.
    Type: Grant
    Filed: September 24, 2018
    Date of Patent: November 22, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Akiko Kai, Kouichirou Tanaka, Hiroshi Ichinomiya, Masahiro Fukuda
  • Patent number: 11480881
    Abstract: A method of processing a substrate includes: performing a first developing process of moving a nozzle having one end surface and a discharge port opened at the end surface while making the end surface come into contact with a developer on a front surface of a substrate in a state in which the nozzle is disposed so that the end surface faces the front surface and the developer is discharged from the discharge port at a first flow rate while rotating the substrate; and after the first developing process, performing a second developing process of discharging the developer from the discharge port at a second flow rate higher than the first flow rate in a state in which the end surface is in contact with the developer on the front surface at a position facing a center of the front surface of the substrate while rotating the substrate.
    Type: Grant
    Filed: July 26, 2021
    Date of Patent: October 25, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yusaku Hashimoto, Kouichirou Tanaka, Masahiro Fukuda, Atsushi Ookouchi
  • Publication number: 20220293621
    Abstract: A semiconductor storage device includes a plurality of conductor layers that are stacked in a first direction and a plurality of bit lines that are spaced from each other in a second direction. Pillars extend in the first direction through the conductor layers and are electrically connected to the bit lines. An insulator is provided that divides the region in which the plurality of pillars are disposed into adjacent regions. An interval between the pillars in an end row adjacent to the insulator is greater than an interval between the pillars in an inner row that is not directly adjacent to the insulator.
    Type: Application
    Filed: August 23, 2021
    Publication date: September 15, 2022
    Inventors: Yusuke OCHI, Ryota KATSUMATA, Masahiro FUKUDA
  • Patent number: 11390125
    Abstract: A wheel registration apparatus applied to a vehicle comprises: a transmitter that is provided on each of the four traveling wheels provided with tires and has a first controller configured to create and transmit a frame including unique identification information; and a receiver that is provided on a vehicle body, receives the frames transmitted by the transmitters provided on the four traveling wheels via a reception antenna in a registration mode, and has a second controller configured to register four pieces of the identification information included in the respective frames as pieces of identification information of the transmitters provided on current four traveling wheels.
    Type: Grant
    Filed: October 15, 2020
    Date of Patent: July 19, 2022
    Assignee: DENSO CORPORATION
    Inventors: Koji Murayama, Masashi Urabe, Masahiro Fukuda
  • Publication number: 20220035248
    Abstract: A method of processing a substrate includes: performing a first developing process of moving a nozzle having one end surface and a discharge port opened at the end surface while making the end surface come into contact with a developer on a front surface of a substrate in a state in which the nozzle is disposed so that the end surface faces the front surface and the developer is discharged from the discharge port at a first flow rate while rotating the substrate; and after the first developing process, performing a second developing process of discharging the developer from the discharge port at a second flow rate higher than the first flow rate in a state in which the end surface is in contact with the developer on the front surface at a position facing a center of the front surface of the substrate while rotating the substrate.
    Type: Application
    Filed: July 26, 2021
    Publication date: February 3, 2022
    Inventors: Yusaku HASHIMOTO, Kouichirou TANAKA, Masahiro FUKUDA, Atsushi OOKOUCHI
  • Publication number: 20210272826
    Abstract: A development processing apparatus includes: a substrate holder that holds a substrate horizontally wherein the substrate includes a resist film; a rotator that rotates the substrate holder; first and second developer supplies that supply a developer to the substrate; and a liquid receiver that receives the developer from the substrate. The first developer supply is formed to have a length smaller than a diameter of the substrate. The second developer supply is formed to have a length equal to or larger than the diameter of the substrate. The liquid receiver includes first and second annular walls that are formed in an annular shape having a circular opening having a diameter larger than the diameter of the substrate. The first and second annular walls are movable up and down independently of each other, and a vertical distance between the first annular wall and the second annular wall is variable.
    Type: Application
    Filed: February 17, 2021
    Publication date: September 2, 2021
    Inventors: Kouichirou TANAKA, Masahiro FUKUDA
  • Publication number: 20210273232
    Abstract: The present invention has as its technical issue to secure not only mechanical strength but also conductivity by increasing the contact area with the positive electrode active substance or positive electrode mixture while also securing corrosion resistance to alkali or an electrolytic solution when applying stainless steel foil to a current collector for a positive electrode of a secondary battery so as to deal with the increasingly higher capacities and smaller sizes and lighter weights of lithium ion secondary batteries and has as its object the provision of a current collector for a positive electrode of a secondary battery using such stainless steel foil.
    Type: Application
    Filed: June 27, 2019
    Publication date: September 2, 2021
    Applicant: NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
    Inventors: Tatsuo NAGATA, Hiroto UNNO, Masahiro FUKUDA, Naoki FUJIMOTO
  • Patent number: 11079679
    Abstract: A method includes forming a liquid puddle of a mixed solution of the diluting liquid and the processing liquid; rotating the substrate at a first rotation speed which allows the mixed solution located at a region facing an inner side than an edge of the liquid contact surface to stay between the liquid contact surface and the surface of the substrate and allows the mixed solution located at a region facing an outer side than the edge of the liquid contact surface to be diffused toward an edge of the substrate; rotating the substrate at a second rotation speed smaller than the first rotation speed after the substrate is rotated at the first rotation speed; and moving the nozzle toward the edge of the substrate while discharging the processing liquid from the discharge hole in a state that the substrate is rotated at the second rotation speed.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: August 3, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yusaku Hashimoto, Takeshi Shimoaoki, Masahiro Fukuda, Kouichirou Tanaka
  • Patent number: 11046386
    Abstract: A control device is provided for controlling for a brake system of a human-powered vehicle that includes a rotary body and a brake device that brakes the rotary body. The control device of the brake system includes an acquisition portion acquiring information related to at least one of the rotary body and the brake device to appropriately brake the rotary body with the brake device.
    Type: Grant
    Filed: October 30, 2018
    Date of Patent: June 29, 2021
    Assignee: Shimano Inc.
    Inventors: Toshihiko Takahashi, Masahiro Nakakura, Masahiro Fukuda
  • Patent number: 11031900
    Abstract: A motor drive apparatus includes: inverter modules equivalent in number to phases of a motor; and a control unit that generates a PWM signal for driving the inverter modules by using PWM. Each of the inverter modules includes: a plurality of pairs of switching elements, each pair of switching elements including two switching elements connected in series; a drive circuit; and a protection circuit. The plurality of pairs of switching elements is connected in parallel, and power GNDs that are reference terminals of the plurality of pairs of switching elements, a control GND that is a reference terminal of the drive circuit, and a terminal for overcurrent fault input in the protection circuit are independently exposed to the outside. The power GNDs and the control GND are connected to a single point on a printed circuit board by a wiring pattern.
    Type: Grant
    Filed: April 27, 2016
    Date of Patent: June 8, 2021
    Assignee: Mitsubishi Electric Corporation
    Inventors: Norikazu Ito, Shigeo Umehara, Katsuhiko Saito, Katsuyuki Amano, Masahiro Fukuda
  • Publication number: 20210023892
    Abstract: A wheel registration apparatus applied to a vehicle comprises: a transmitter that is provided on each of the four traveling wheels provided with tires and has a first controller configured to create and transmit a frame including unique identification information; and a receiver that is provided on a vehicle body, receives the frames transmitted by the transmitters provided on the four traveling wheels via a reception antenna in a registration mode, and has a second controller configured to register four pieces of the identification information included in the respective frames as pieces of identification information of the transmitters provided on current four traveling wheels.
    Type: Application
    Filed: October 15, 2020
    Publication date: January 28, 2021
    Inventors: Koji MURAYAMA, Masashi URABE, Masahiro FUKUDA