Patents by Inventor Masahiro Hatakayama

Masahiro Hatakayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam apparatus and a device manufacturing method using the same apparatus
    Patent number: 7385197
    Abstract: Disclosed is an electron beam apparatus, in which a plurality of electron beams is formed from electrons emitted from an electron gun 21 and used to irradiate a sample surface via an objective lens 28, said apparatus comprising: a beam separator 27 for separating a secondary electron beams emanating from respective scanned regions on the sample from the primary electron beams; a magnifying electron lens 31 for extending a beam space between adjacent beams in the separated plurality of secondary electron beams; a fiber optical plate 32 for converting the magnified plurality of secondary electron beams to optical signals by a scintillator and for transmitting the signals; a photoelectric conversion device 35 for converting the optical signal to an electric signal; an optical zoom lens 33 for focusing the optical signal from the scintillator into an image on the photoelectric conversion device; and a rotation mechanism 36 for rotating the photoelectric conversion device 35 around the optical axis.
    Type: Grant
    Filed: July 7, 2005
    Date of Patent: June 10, 2008
    Assignee: Ebara Corporation
    Inventors: Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Takeshi Murakami, Hirosi Sobukawa, Toru Kaga, Masahiro Hatakayama
  • Electron beam apparatus and a device manufacturing method using the same apparatus
    Publication number: 20060016989
    Abstract: Disclosed is an electron beam apparatus, in which a plurality of electron beams is formed from electrons emitted from an electron gun 21 and used to irradiate a sample surface via an objective lens 28, said apparatus comprising: a beam separator 27 for separating a secondary electron beams emanating from respective scanned regions on the sample from the primary electron beams; a magnifying electron lens 31 for extending a beam space between adjacent beams in the separated plurality of secondary electron beams; a fiber optical plate 32 for converting the magnified plurality of secondary electron beams to optical signals by a scintillator and for transmitting the signals; a photoelectric conversion device 35 for converting the optical signal to an electric signal; an optical zoom lens 33 for focusing the optical signal from the scintillator into an image on the photoelectric conversion device; and a rotation mechanism 36 for rotating the photoelectric conversion device 35 around the optical axis.
    Type: Application
    Filed: July 7, 2005
    Publication date: January 26, 2006
    Applicant: EBARA CORPORATION
    Inventors: Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Takeshi Murakami, Hirosi Sobukawa, Toru Kaga, Masahiro Hatakayama