Abstract: A solid oxide fuel cell capable of increasin a thermal cycle resistance by uniformizin the flow and distribution of the as of air and fuel in cells, wherein a center through-hole and a plurality of peripheral through-holes are formed at the center part of a cell formation plate and at the center parts of gas separator plates, respectively, and a reaction gas passaae is formed at the outer peripheral parts of the gas separator plates.

Abstract: A fuel cell capable of providing an SOFC wherein a thermal cycle resistance is difficult to occur becase of a uniform the flow and distribution of air and fuel gas in cells. When a gas passage hole part having a center through-hole for gas passage provided at the axial center part of a substrate and having a plurality of peripheral through-holes for gas passage disposed symmetrically with respect to the center through-hole is formed, stacked cell substrates can be supported and tightened by the gas passage hole part at the center part. The flows of fuel gas and oxidizer gas can be optimized, and gas distributions can be made uniform. Particularly, temperature distributions can be uniform in radial direction, and a thermal stress due to thermal expansion occur less. A gas separate plate is formed by forming a gas passage pattern by etching both surfaces of a metal substrate.

Abstract: An activated species-generating apparatus using a gaseous phase discharge used as an ozonizer and the like is provided. Wire electrodes 21a, 21b, which are obtained by coating surfaces of electrically conductive wires with a dielectric, are entangled and the resulting crowded electrodes 20a, 20b are combined to form a three-dimensional discharge range.

Abstract: This invention concerns a SiO.sub.2, SiN.sub.x protection film formed by a CVD or PVD gas phase glowing method capable of preventing melting of the matrix ingredients at the surface of a dielectric material in electric discharge of an ozone generator and it relates to a dielectric material used for an ozone generator capable of overcoming the problems for the abrasion of electrode and dielectric material or melting of ions or molecules of during electric discharge, as well as a method of forming a protection film therefor based on the finding that an SiO.sub.2 film or SiN.sub.x film can be formed easily on a surface of a predetermined electric material or, further, on a surface of electrode by processing a specific reaction gas, for example, comprising a crude gas such as SiH.sub.4, SiCl.sub.4, N.sub.2, NH.sub.