Patents by Inventor Masahiro KAWAGISHI

Masahiro KAWAGISHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR PRODUCING SILICA GLASS BODY CONTAINING TITANIA, AND SILICA GLASS BODY CONTAINING TITANIA
    Publication number: 20130316890
    Abstract: The present invention relates to a method for producing a silica glass body containing titania, containing: a flame hydrolysis step of feeding a silica (SiO2) precursor and a titania (TiO2) precursor into an oxyhydrogen flame and causing a hydrolysis reaction in the flame to form silica glass fine particles containing titania, in which in the flame hydrolysis step, a reaction rate of the hydrolysis reaction of the silica precursor is 80% or more.
    Type: Application
    Filed: July 31, 2013
    Publication date: November 28, 2013
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventors: Junko MIYASAKA, Tomonori Ogawa, Masahiro Kawagishi, Masaaki Takata
  • Method for producing glass body and method for producing optical member for EUV lithography
    Patent number: 8567214
    Abstract: The present invention relates to a method for producing a glass body containing: hydrolyzing a silicon compound and a compound containing a metal serving as a dopant, in a flame projected from a burner to form glass fine particles; and depositing and growing the formed glass fine particles on a base material, in which a raw material mixed gas containing a gas of the silicon compound, a gas of the compound containing a metal serving as a dopant, and either one of a combustible gas and a combustion supporting gas is fed into a central nozzle (A) positioning in the center of the burner; the other gas of the combustible gas and the combustion supporting gas is fed into a nozzle (B) different from the central nozzle (A) of the burner; a combustible gas or a combustion supporting gas is arbitrarily fed into a nozzle different from the nozzles (A) and (B); and a flow rate of the raw material mixed gas is 50% or more and not more than 90% of the largest flow rate among flow rate(s) of the combustible gas(ses) and the
    Type: Grant
    Filed: June 27, 2011
    Date of Patent: October 29, 2013
    Assignee: Asahi Glass Company, Limited
    Inventors: Junko Miyasaka, Akio Koike, Tomonori Ogawa, Masahiro Kawagishi
  • METHOD FOR PRODUCING GLASS BODY AND METHOD FOR PRODUCING OPTICAL MEMBER FOR EUV LITHOGRAPHY
    Publication number: 20110314868
    Abstract: The present invention relates to a method for producing a glass body containing: hydrolyzing a silicon compound and a compound containing a metal serving as a dopant, in a flame projected from a burner to form glass fine particles; and depositing and growing the formed glass fine particles on a base material, in which a raw material mixed gas containing a gas of the silicon compound, a gas of the compound containing a metal serving as a dopant, and either one of a combustible gas and a combustion supporting gas is fed into a central nozzle (A) positioning in the center of the burner; the other gas of the combustible gas and the combustion supporting gas is fed into a nozzle (B) different from the central nozzle (A) of the burner; a combustible gas or a combustion supporting gas is arbitrarily fed into a nozzle different from the nozzles (A) and (B); and a flow rate of the raw material mixed gas is 50% or more and not more than 90% of the largest flow rate among flow rate(s) of the combustible gas(ses) and the
    Type: Application
    Filed: June 27, 2011
    Publication date: December 29, 2011
    Applicant: Asahi Glass Company, Limited
    Inventors: Junko MIYASAKA, Akio KOIKE, Tomonori OGAWA, Masahiro KAWAGISHI