Abstract: According to one embodiment, a semiconductor device includes a first element portion. The first element portion includes first and second semiconductor layers, first, second and third electrodes, and a first insulating layer. The first semiconductor layer includes Alx1Ga1-x1N (0?x1<1). The first electrode is separated from the first semiconductor layer. The first electrode includes a polycrystal of a nitride of one of Al or B. The second semiconductor layer includes Alx2Ga1-x2N (x1<x2<1). The second semiconductor layer includes first to third regions. The first region is positioned between the second and third regions. The first region is provided between the first semiconductor layer and the first electrode. The first insulating layer is provided between the first region and the first electrode. The second electrode is electrically connected to the second region. The third electrode is electrically connected to the third region.

Abstract: A motion controller device and a communication method for the motion controller device are provided to reduce the large number of man-hours that are required for making communication settings and wiring design in large-scale systems. The motion controller device and communication method improve the degree of freedom for communication line connections by switching the two transmission paths on the transmitting and receiving sides of the communication ports contained within a central communication device and a terminal communication devices for full duplex communications. The motion controller device and communication also ensure the response performance required in the devices being controlled by way of the terminal communication device that autonomously and dynamically switches the communication paths according to the volume of communication data on the communication line along this type of network.

Abstract: The present invention is provided to suppress occurrence of free flow. An infusion pump includes: a sliding clamp closing and releasing an infusion tube; a pump body including a tube attachment portion to which the infusion tube is to be attached detachably and forcibly transferring liquid in the infusion tube; and a door pivotably supported by the pump body so that the tube attachment portion is openable and closable by the door. The pump body includes: a clamp attachment portion into which the sliding clamp having the infusion tube set therein is to be inserted and set; and a release operator being operated in the clamp attachment portion to transfer the sliding clamp from a close mode to a release mode, the release operator being configured to be locked, in response to opening movement of the door, so that the release operator is inoperable for releasing, and to be unlocked in response to closing movement of the door.

Abstract: PROBLEM: To reduce occurrence of an error of not closing a tube and to simplify a structure and an operation procedure. SOLUTION: In a tube clamp structure of a tubing pump for closing a tube 30 attached to and detached from a pump body 10 by a clamp device 40, the clamp device 40 is equipped with: a first holding piece 41; a second holding piece 42 engaged to approach or separate from the first holding piece 41; and an urging member for urging these first holding piece 41 and second holding piece 42 in approaching directions, is configured to hold and deform the tube 30 between these first holding piece 41 and second holding piece 42 for closing, and is detachably attached to the pump body 10.

Abstract: A motion controller is provided which improves system responsiveness without having to raise the arithmetic capacity of a master controller or to boost the communication speed of a network. The master controller 1 uses a program analysis unit 1g to separate, from a control program designating a tolerable delay time for operating control target apparatuses, a slave use program to be executed by a slave controller in a manner not to exceed the tolerable delay time, and to create slave-to-slave communication setting information needed by the slave controller to execute the slave use program. Through slave-to-slave communication, the slave controller 2 acquires input/output information from another slave controller. The slave controller 2 also uses a slave use program execution unit 2f to execute its own slave use program.

Abstract: A tubing pump capable of improving flow rate accuracy which is required, particularly, in infusion pumps for medical use is developed. In a tubing pump that delivers a liquid in a tube which is separately loaded, a pump mechanism includes a valve mechanism unit that occludes and releases occlusion to the loaded tube and a tube pressing mechanism unit that repeatedly presses the tube, and the tube squeezing mechanism unit includes a pump block which has its movement guided by at least two guide shafts.

Abstract: PROBLEM: To reduce occurrence of an error of not closing a tube and to simplify a structure and an operation procedure. SOLUTION: In a tube clamp structure of a tubing pump for closing a tube 30 attached to and detached from a pump body 10 by a clamp device 40, the clamp device 40 is equipped with: a first holding piece 41; a second holding piece 42 engaged to approach or separate from the first holding piece 41; and an urging member for urging these first holding piece 41 and second holding piece 42 in approaching directions, is configured to hold and deform the tube 30 between these first holding piece 41 and second holding piece 42 for closing, and is detachably attached to the pump body 10.

Abstract: PROBLEM: To improve opening and closing operability of a door. SOLUTION: A tubing pump for transferring a fluid in a detachably attached tube 30 by a pump mechanism 50, the tubing pump is equipped with: a pump body 10 having a base 11 to and from which the tube 30 can be attached and detached; a door 20 pivotally supported to be rotatable with respect to the pump body 10, so as to open or close the base 11; switching urging unit A for urging the door 20 in an opening direction in a first rotation range R1 on a completely opened side and switching an urging direction to a closing direction in a second rotation range R2 on a completely closed side; and closing suppression unit B for suppressing an urging force in the closing direction by the switching urging unit A in the second rotation range R2.

Abstract: It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.

Abstract: A motion controller device and a communication method for the motion controller device are provided to reduce the large number of man-hours that are required for making communication settings and wiring design in large-scale systems. The motion controller device and communication method improve the degree of freedom for communication line connections by switching the two transmission paths on the transmitting and receiving sides of the communication ports contained within a central communication device and a terminal communication devices for full duplex communications. The motion controller device and communication also ensure the response performance required in the devices being controlled by way of the terminal communication device that autonomously and dynamically switches the communication paths according to the volume of communication data on the communication line along this type of network.

Abstract: A terminal communication apparatus has a terminal communication control portion rendering an immediate communication control portion sequentially transmitting serial data to another terminal communication apparatus bitwise when receiving a packet as bitwise serial data and a normal communication control portion performing processing on the packet after accumulating the serial data until the serial data reaches a packet length when receiving the bitwise serial data switchable, performing processing with the immediate communication control portion in a case of receiving a time adjustment packet containing time adjustment data posting a timing of synchronization in the other terminal communication apparatus and performing processing with the normal communication control portion in a case of receiving a packet other than the time adjustment packet. Thus, synchronization of control object devices can be enabled without previously investigating communication delay times.

Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: A stage apparatus includes a column for irradiating a sample with a charged particle beam, a vacuum sample chamber to which the column is attached, moving tables disposed in the vacuum sample chamber to move the sample relatively to the column, and position detectors for detecting positions of the moving tables. The stage apparatus includes an attachment member disposed between the column and the vacuum sample chamber. The attachment member has an opening which restricts movement of the column in a same direction as directions of the moving tables. Reference mirrors in the position detectors for detecting the positions of the tables are attached to the attachment member. Each of the reference mirrors has an adjustment apparatus to adjust a relative angle between the reference mirror and the laser beam.

Abstract: In transponder communication (near field wireless communication), an electronic key uses drive radio waves as a power source and thereby does not need to be supplied with power from a key battery. To establish transponder communication, the distance between the electronic key and the vehicle has to be shorter than that for smart communication. However, transponder communication can be performed to switch a plug lock device between a lock state and an unlock state when a smart system cannot perform smart communication that switches the lock device between different states.

Abstract: A motion controller is provided which improves system responsiveness without having to raise the arithmetic capacity of a master controller or to boost the communication speed of a network. The master controller 1 uses a program analysis unit 1g to separate, from a control program designating a tolerable delay time for operating control target apparatuses, a slave use program to be executed by a slave controller in a manner not to exceed the tolerable delay time, and to create slave-to-slave communication setting information needed by the slave controller to execute the slave use program. Through slave-to-slave communication, the slave controller 2 acquires input/output information from another slave controller. The slave controller 2 also uses a slave use program execution unit 2f to execute its own slave use program.

Abstract: It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.

Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

Abstract: A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

Abstract: A permanent magnet rotary motor is provided in which cogging torque can be reduced and an increase in copper loss can also be prevented. A first divided core unit 13 is combined with a second divided core unit 15, thereby constituting a stator core 9. The first divided core unit 13 constitutes a yoke portion 17. The second divided core unit 15 includes pole pieces 25, magnetic pole surface constituent portions 27, and first and second type connecting portions 29A and 29B each mutually couple two adjacent magnetic pole surface constituent portions 27, all of which are formed integral with one another. The thickness of the first type connecting portions 29A in a radial direction of the stator core 9 is set to be smaller than the thickness of the second type connecting portions 29B in the radial direction of the stator core 9.