Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: A stage apparatus includes a column for irradiating a sample with a charged particle beam, a vacuum sample chamber to which the column is attached, moving tables disposed in the vacuum sample chamber to move the sample relatively to the column, and position detectors for detecting positions of the moving tables. The stage apparatus includes an attachment member disposed between the column and the vacuum sample chamber. The attachment member has an opening which restricts movement of the column in a same direction as directions of the moving tables. Reference mirrors in the position detectors for detecting the positions of the tables are attached to the attachment member. Each of the reference mirrors has an adjustment apparatus to adjust a relative angle between the reference mirror and the laser beam.

Abstract: In transponder communication (near field wireless communication), an electronic key uses drive radio waves as a power source and thereby does not need to be supplied with power from a key battery. To establish transponder communication, the distance between the electronic key and the vehicle has to be shorter than that for smart communication. However, transponder communication can be performed to switch a plug lock device between a lock state and an unlock state when a smart system cannot perform smart communication that switches the lock device between different states.

Abstract: A motion controller is provided which improves system responsiveness without having to raise the arithmetic capacity of a master controller or to boost the communication speed of a network. The master controller 1 uses a program analysis unit 1g to separate, from a control program designating a tolerable delay time for operating control target apparatuses, a slave use program to be executed by a slave controller in a manner not to exceed the tolerable delay time, and to create slave-to-slave communication setting information needed by the slave controller to execute the slave use program. Through slave-to-slave communication, the slave controller 2 acquires input/output information from another slave controller. The slave controller 2 also uses a slave use program execution unit 2f to execute its own slave use program.

Abstract: It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.

Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

Abstract: A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

Abstract: A permanent magnet rotary motor is provided in which cogging torque can be reduced and an increase in copper loss can also be prevented. A first divided core unit 13 is combined with a second divided core unit 15, thereby constituting a stator core 9. The first divided core unit 13 constitutes a yoke portion 17. The second divided core unit 15 includes pole pieces 25, magnetic pole surface constituent portions 27, and first and second type connecting portions 29A and 29B each mutually couple two adjacent magnetic pole surface constituent portions 27, all of which are formed integral with one another. The thickness of the first type connecting portions 29A in a radial direction of the stator core 9 is set to be smaller than the thickness of the second type connecting portions 29B in the radial direction of the stator core 9.

Abstract: In a decentralized control system, a program of the system is described in one form to flexibly cope with changes of the system, and the program developing efficiency, processing performance, and reliability of the system are increased. In configuration, a plurality of control processors and a plurality of devices are connected to a network, the control processors connected to the network are automatically detected and there is determined program execution assignment to possibly equalize the processing load imposed on the control processors. Each control processor executes the program in accordance with the program execution assignment.

Abstract: Electronic music apparatus includes: a tone generator section for generating a tone signal in response to operation of a performance operator unit; an external input section for receiving a tone signal from the outside; a mixer section for generating mixed tone signals by mixing the tone signal generated by the tone generator section and the tone signal received via the external input section; an external output section for outputting the tone signal, generated by the tone generator section, to the outside before that tone signal is mixed with the tone signal received via the external input section; and an audio output section for audibly outputting the mixed tone signals from the mixer section. Because the tone signal received via the external input section is not fed to the external output section, no unwanted howl is produced even where a plurality of the electronic music apparatus are connected together.

Abstract: In a circumferential flow pump, a first groove sectional area (S1) of a feed passage at a pump cover side is set to be smaller than a second groove sectional area (S2) of a feed passage at a pump base side, whereby the diameter of an eddy flow occurring in the first groove sectional area (S1) is smaller than the diameter of an eddy flow occurring in the second groove sectional area (S2). Therefore, the fuel pressure of the feed passage at the pump cover side is set to be higher than that of the feed passage at the pump base side, and thus a vane wheel is formed to be pressed against the pump base side.

Abstract: A circumferential flow pump in which the quantity of swelling by alcohol or toluene contained in fuel, is curbed and an impeller thereof is prevented from locking is provided.

Abstract: Each of impeller grooves of an impeller has a first bow surface that extends from one end surface of the impeller so as to have a radius R1, a second bow surface that extends from the other end surface of the impeller so as to have a radius r1, and a projected partition wall having a connecting surface that connects the first and second bow surfaces. A pump cover and a pump base are provided adjacent to the respective end surfaces of the impeller, and are formed with respective annular feed passages that are defined by semicircular wall surfaces having radii R2 and r2, respectively. The radii R1 and r1 of the first and second bow surfaces are set longer than the radii R2 and r2 of the semicircular wall surfaces, respectively.

Abstract: A permanent magnet rotary motor is provided in which cogging torque can be reduced and an increase in copper loss can also be prevented. A first divided core unit 13 is combined with a second divided core unit 15, thereby constituting a stator core 9. The first divided core unit 13 constitutes a yoke portion 17. The second divided core unit 15 includes pole pieces 25, magnetic pole surface constituent portions 27, and first and second type connecting portions 29A and 29B each mutually couple two adjacent magnetic pole surface constituent portions 27, all of which are formed integral with one another. The thickness of the first type connecting portions 29A in a radial direction of the stator core 9 is set to be smaller than the thickness of the second type connecting portions 29B in the radial direction of the stator core 9.

Abstract: The production of semiconductor devices manufactured through a plurality of manufacturing sites is unitarily managed and an appropriate production plan is instructed. A computer projects a production plan of an entire company based on various information. The production plan is provided to each manufacturing site as a production instruction and provided to each business person or customer as a storing reply or an order accepting period reply. If the projected production plan (possible production volume) does not coincide with a production plan (necessary production volume), parameters obtained by correcting production allocation, production capability, lead time, yield and the like are re-input from a parameter input terminal. Based on the corrected parameters, the computer re-projects the production plan and projects an optimum production plan.

Abstract: In a circumferential flow pump, a first groove sectional area (S1) of a feed passage at a pump cover side is set to be smaller than a second groove sectional area (S2) of a feed passage at a pump base side, whereby the diameter of an eddy flow occurring in the first groove sectional area (S1) is smaller than the diameter of an eddy flow occurring in the second groove sectional area (S2). Therefore, the fuel pressure of the feed passage at the pump cover side is set to be higher than that of the feed passage at the pump base side, and thus a vane wheel is formed to be pressed against the pump base side.

Abstract: The production of semiconductor devices manufactured through a plurality of manufacturing sites is unitarily managed and an appropriate production plan is instructed. A computer projects a production plan of an entire company based on various information. The production plan is provided to each manufacturing site as a production instruction and provided to each business person or customer as a storing reply or an order accepting period reply. If the projected production plan (possible production volume) does not coincide with a production plan (necessary production volume), parameters obtained by correcting production allocation, production capability, lead time, yield and the like are re-input from a parameter input terminal. Based on the corrected parameters, the computer re-projects the production plan and projects an optimum production plan.

Abstract: Each of impeller grooves of an impeller has a first bow surface that extends from one end surface of the impeller so as to have a radius R1, a second bow surface that extends from the other end surface of the impeller so as to have a radius r1, and a projected partition wall having a connecting surface that connects the first and second bow surfaces. A pump cover and a pump base are provided adjacent to the respective end surfaces of the impeller, and are formed with respective annular feed passages that are defined by semicircular wall surfaces having radii R2 and r2, respectively. The radii R1 and r1 of the first and second bow surfaces are set longer than the radii R2 and r2 of the semicircular wall surfaces, respectively.

Abstract: Electronic music apparatus includes: a tone generator section for generating a tone signal in response to operation of a performance operator unit; an external input section for receiving a tone signal from the outside; a mixer section for generating mixed tone signals by mixing the tone signal generated by the tone generator section and the tone signal received via the external input section; an external output section for outputting the tone signal, generated by the tone generator section, to the outside before that tone signal is mixed with the tone signal received via the external input section; and an audio output section for audibly outputting the mixed tone signals from the mixer section. Because the tone signal received via the external input section is not fed to the external output section, no unwanted howl is produced even where a plurality of the electronic music apparatus are connected together.