Abstract: In a scanning type exposure apparatus, throughput is increased by omitting an unnecessary scanning period for settling. The scanning type exposure apparatus includes an exposure unit for exposing a substrate by projecting a pattern by a strip of light, an exposure control unit which turns on and off the exposure operation by the exposure unit, a designation value generator for designating a chip to be scanned and exposed next and a scanning speed, a reference position generator for generating a reference position of the pattern and a reference position of the substrate in accordance with the designation, and a position controller for controlling the positions of the pattern and the substrate on the basis of the reference positions.

Abstract: A positioning device and method includes a motor having a rotation axis, a driver for driving the motor on the basis of control information, a detector for detecting position information of the rotation axis of the motor, and a digital signal processor for performing an operation on the control information in accordance with the position information detected by the detector.

Abstract: In an adaptive apparatus for adaptively adjusting parameters in a system, the parameters of the system are adjusted in accordance with an integral relationship. At that moment, one or both of a scalar and a matrix which depend on time are used as gains. Furthermore, adjustment in accordance with a proportional relationship is used together. Also in this adjustment, one or both of a scalar and a matrix which depend on time are used as gains.

Abstract: Disclosed is a servo control system, which controls the position of a recording and/or reproducing head at the desired track on a record medium, comprising an actuator for moving the head relative to the track, a positional deviation detector, a controller for outputting the control signals for the actuator in such a manner that the head is put in the desired position relative to the track, a component for applying disturbance signals to the output of the controller, and a component for adjusting parameters of the controller which determines the correlation of the transfer characteristics at each frequency.