Abstract: The workpiece holding jig includes a first frame body and a second frame body, both frame bodies each have a body, a conductive member, a contact member provided so as to be able to come into electrical contact with a periphery of a workpiece, and an inner circumferential seal member provided over an entire circumference of the body. Both frame bodies are configured to constitute a seal space for accommodating the periphery of the workpiece, the conductive member of both frame bodies, and the contact member of both frame bodies, in a state where each of the inner circumferential seal members and the contact member abut against the periphery of the workpiece from both sides. The inner circumferential seal member has a contact projection, and an inner surface of the contact projection is slanted outward.

Abstract: The workpiece holding jig includes a first frame body and a second frame body, both frame bodies each have a body, a conductive member, a contact member provided so as to be able to come into electrical contact with a periphery of a workpiece, and an inner circumferential seal member provided over an entire circumference of the body. Both frame bodies are configured to constitute a seal space for accommodating the periphery of the workpiece, the conductive member of both frame bodies, and the contact member of both frame bodies, in a state where each of the inner circumferential seal members and the contact member abut against the periphery of the workpiece from both sides. The conductive member of each of both frame bodies has a wide and thick shape so as to exhibit a substantially equal resistance value at a discretionary point in an entire circumference.

Abstract: The workpiece holding jig includes a first frame body and a second frame body. Both frame bodies have a body, a conductive member, a contact member provided so as to be able to come into electrical contact with a periphery of a workpiece, and an inner circumferential seal member provided over an entire circumference of the body. Both frame bodies are configured to constitute a seal space for accommodating the periphery of the workpiece, the conductive member of both frame bodies, and the contact member of both frame bodies, in a state where each of the inner circumferential seal members and the contact member abut against the periphery of the workpiece from both sides. The first frame body and/or the second frame body has a liquid inlet port for filling the seal space with a liquid, and has an exhaust port for exhausting air in the seal space.

Abstract: A workpiece holding jig includes a back panel and a frame body, the frame body includes a main body having an annular shape, a conductive member provided all over the main body, a contact member provided along the conductive member, the contact member being electrically connected to the conductive member to come into electrical contact with a peripheral portion of the workpiece, and a seal member provided all over the main body and located on an inner side of the main body relative to the contact member, the frame body is adapted to form a sealed space that accommodates the peripheral portion of the workpiece, the conductive member, and the contact member in a state where the seal member and the contact member are in contact with the peripheral portion, and the frame body includes a liquid inlet through which a liquid is injected into the sealed space.

Abstract: A placement and routing method for the semiconductor integrated circuit includes an object describing step for preparing an object description which describes a transistor and a wiring conductor as a transistor object and a wiring object, respectively, and which includes an adjacent information indicative of a relative position information of each object in relation to an adjacent object and a connection information indicative of a connection destination of each object, a transistor object processing, step for generating each transistor in accordance with the object description and locating the generated transistor by considering the adjacent information, a wiring object processing step for determining a position of each wiring in a horizontal direction and in a vertical direction, an object end point determining step for determining a final position of each transistor object and a final staring point and a final terminating point of each wiring object, and a wiring post-processing step for wiring each wiring