Abstract: A silicon carbide member for a plasma processing apparatus is obtained by mixing an ?-silicon carbide powder having an average particle size of 0.3 to 3 ?m, with an amount of metal impurities in the ?-silicon carbide powder reduced to 20 ppm or less, and a sintering aid comprising B4C in amount of 0.5 to 5 weight parts or Al2O3 and Y2O3 in total amount of 3 to 15 weight parts; sintering a mixture of the ?-silicon carbide powder and the sintering aid in an argon atmosphere furnace or a high-frequency dielectric heating furnace; and then processing the resulting sintered body. The resulting silicon carbide member for a plasma processing apparatus is low cost and durable.

Abstract: A silicon carbide member for a plasma processing apparatus is obtained by mixing an ?-silicon carbide powder having an average particle size of 0.3 to 3 ?m, with an amount of metal impurities in the ?-silicon carbide powder reduced to 20 ppm or less, and a sintering aid comprising B4C in amount of 0.5 to 5 weight parts or Al2O3 and Y2O3 in total amount of 3 to 15 weight parts; sintering a mixture of the ?-silicon carbide powder and the sintering aid in an argon atmosphere furnace or a high-frequency dielectric heating furnace; and then processing the resulting sintered body. The resulting silicon carbide member for a plasma processing apparatus is low cost and durable.

Abstract: A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 ?m to 70 ?m, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 ?m communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas.

Abstract: A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 ?m to 70 ?m, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 ?m communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas.

Abstract: A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 ?m to 70 ?m, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 ?m communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas.

Abstract: The nozzle member of a fluid nozzle includes at least one through hole that is parallel to a center axis, wherein a diameter dimension of the through hole is 10 ?m to 100 ?m, a length-to-diameter ratio (L/D) of the through hole is 5 or above, and the nozzle member is formed of ceramics having relative density of 95% or above. The nozzle member including a plurality of minute through holes is manufactured by performing extrusion or cast molding in such a way that a molded body includes a filament of synthetic resin, carbon, or metal in a direction of the center axis of the molded body, and then defatting/sintering the molded body after removing the filament or, when the filament is formed of synthetic resin or carbon, defatting/sintering the molded body under oxidizing atmosphere to evaporate and remove the filament without removing the filament from the molded body.

Abstract: Provided is a golf swing training apparatus suited to strengthen target muscles in various body regions necessary for golf swings, and train a proper swing form. The apparatus is designed to, when a user performs a golf swing motion while grasping a grip of a golf swing mechanism whose height position is adjustable depending on a body height of a user, allow the grip to be moved along an arc, and transmit the arc movement of the grip from a swing-arm holder to a weight-arm holder to which a weight arm is fixed, through a swing-power transmission shaft, so as to swingingly move the weight arm about an axis of the weight-arm holder to allow a weight member on the weight arm to act as a load countering golf swing power. The apparatus has a mechanism capable of allowing the load based on the weight member fastened to the weight arm to be arbitrarily adjusted depending on individual differences in muscle strength.

Abstract: Occurrence of a back-flow of plasma or ignition of gas for plasma excitation in a longitudinal hole portion can be prevented more completely, and a shower plate in which efficient plasma excitation is possible is provided. In shower plate 105, which is arranged in processing chamber 102 of a plasma processing apparatus and discharges gas for plasma excitation into processing chamber, porous-gas passing body 114 having a pore that communicates in the gas flow direction is fixed onto longitudinal hole 112 used as a discharging path of gas for plasma excitation. The pore diameter of a narrow path in a gas flowing path formed of a pore, which communicates to porous-gas passing body 114, is 10 ?m or lower.

Abstract: Provided is a golf swing training apparatus suited to strengthen target muscles in various body regions necessary for golf swings, and train a proper swing form. The apparatus is designed to, when a user performs a golf swing motion while grasping a grip 24 of a golf swing mechanism 7 whose height position is adjustable depending on a body height of a user, allow the grip to be moved along an arc, and transmit the arc movement of the grip from a swing-arm holder 8 to a weight-arm holder 17 to which a weight arm 18 is fixed, through a swing-power transmission shaft 12, so as to swingingly move the weight arm 18 about an axis of the weight-arm holder 17 to allow a weight member 19 on the weight arm 18 to act as a load countering golf swing power. The apparatus has a mechanism capable of allowing the load based on the weight member fastened to the weight arm to be arbitrarily adjusted depending on individual differences in muscle strength.

Abstract: A disclosed top plate that is configured as a solid part and provided in an opening in a ceiling portion of a plasma process chamber whose inside is evacuatable to vacuum includes plural gas conduits formed in a horizontal direction of the top plate; and gas ejection holes that are open in a first surface of the top plate, the first surface facing the inside of the plasma process chamber and in gaseous communication with the plural gas conduits.

Abstract: The nozzle member of a fluid nozzle includes at least one through hole that is parallel to a center axis, wherein a diameter dimension of the through hole is 10 ?m to 100 ?m, a length-to-diameter ratio (L/D) of the through hole is 5 or above, and the nozzle member is formed of ceramics having relative density of 95% or above. The nozzle member including a plurality of minute through holes is manufactured by performing extrusion or cast molding in such a way that a molded body includes a filament of synthetic resin, carbon, or metal in a direction of the center axis of the molded body, and then defatting/sintering the molded body after removing the filament or, when the filament is formed of synthetic resin or carbon, defatting/sintering the molded body under oxidizing atmosphere to evaporate and remove the filament without removing the filament from the molded body.

Abstract: Occurrence of a back-flow of plasma or ignition of gas for plasma excitation in a longitudinal hole portion can be prevented more completely, and a shower plate in which efficient plasma excitation is possible is provided. In shower plate 105, which is arranged in processing chamber 102 of a plasma processing apparatus and discharges gas for plasma excitation into processing chamber, porous-gas passing body 114 having a pore that communicates in the gas flow direction is fixed onto longitudinal hole 112 used as a discharging path of gas for plasma excitation. The pore diameter of a narrow path in a gas flowing path formed of a pore, which communicates to porous-gas passing body 114, is 10 ?m or lower.

Abstract: A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 ?m to 70 ?m, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 ?m communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas.

Abstract: Provided is a shower plate capable of more securely preventing the occurrence of backflow of plasma and enabling efficient plasma excitation. A shower plate 106 is disposed in a processing chamber 102 of a plasma processing apparatus and is provided with a plurality of gas discharge holes 113a for discharging a plasma excitation gas to generate plasma in the processing chamber 102, wherein an aspect ratio of a length of the gas discharge hole to a hole diameter thereof (length/hole diameter) is equal to or greater than about 20. The gas discharge holes 113a are made of ceramics members 113 which are separated from the shower plate 106, and the ceramics members 113 are installed in vertical holes 105 opened in the shower plate 106.

Abstract: Provided is a shower plate in which there's no need for a cover plate. The shower plate 105 is disposed in a processing chamber 102 of a plasma processing apparatus, for discharging a plasma excitation gas to generate plasma in the processing chamber 102, and the shower plate 105 includes a horizontal hole 111 for introducing the plasma excitation gas into the shower plate 105 from a gas inlet port 110 of the plasma processing apparatus; and a vertical hole 112 communicating with the horizontal hole 111, wherein the shower plate 105 is formed as a single body.

Abstract: Disclosed is a shower plate which is formed with a large number of process-gas blowing holes having a simple structure, high machinability and high dimensional accuracy without the risk of unevenness in blowing of a process gas and outbreak of particles, while ensuring constant quality and interchangeability. Through a press forming process, a powder for a ceramic material with a low dielectric constant is formed into a disc-shaped compact having dimensions determined in consideration of a sintering shrinkage value and a machining value. A gas inlet passage 3 and a large number of blowing holes 2 for a compact stage are bored in the disc-shaped compact, and then the disc-shaped compact is sintered. Subsequently, the gas inlet passage 3 and a main hole portion 2b in each of the blowing holes are subjected to grinding to have a surface roughness of Is or less.

Abstract: The straightness of the piston of a water jet loom plunger pump for discharging water under a high pressure is maintained to allow its smooth movement with respect to the cylinder. For this, a roller guide is arranged at a reciprocal piston actuating mechanism unit. By forming a bent tube at a water discharging passage from the cylinder to a conduit, moreover, the resistance to the water to be discharged from the cylinder is reduced. The piston is given a degree of freedom to move with respect to a drive member connected to a pump cam and a lever. This enables the piston to move with the least resistance in the cylinder.

Abstract: A sub-nozzle in an air injection type weaving machine in which fluffing or the like caused by contact thereof with warp etc. does not occur, and for which its manufacture and control is facilitated. A sub-nozzle jetting a high-speed air flow for acceleration toward weft thrown from a main nozzle to between warps when they are raised and lowered to form shed opening comprises a holder connected to the side of a supply source of compressed air and a nozzle head connected to the holder, where at least the nozzle head is integrally formed by a high-strength glass material and occurrence of warp damage or wear of the nozzle head per se is restrained by the smoothness of its surface.

Abstract: A picking device for a water-jet loom comprises a nozzle body connected to a pressurized water source and provided with a plurality of axial nozzle holes, a plurality of spools fitted respectively in the axial nozzle holes and each provided with an axial through-hole through which to pass a weft yarn, a spool driving mechanism for individually or sequentially driving the spools for axial reciprocation or for turning alternately in opposite directions within a fixed angular range, and orifice chips having orifices defining straightening spaces for straightening the flow of the pressurized water around the front ends of the spools together with the circumferences of the front ends of the spools. A fluid passage connected to each of the orifices can be opened and closed by axial reciprocation or by turning alternately in opposite directions in the given angular range of the spool.

Abstract: A water jet nozzle for a loom includes a nozzle member having a rear end portion, an interior orifice formed in the rear end portion, a stabilizer integrally connected to the orifice for adjusting water flow in the rear end portion of the nozzle member and a needle arranged centrally of the orifice for feeding out a weft yarn. The orifice and stabilizer define an annular groove therebetween and are made of a material having a high hardness and high corrosion resistance. The orifice and stabilizer are preferably made of a material such as a cemented carbide, cermet, or ceramic having a modulus of elasticity of at least 1.5.times.10.sup.4 kg/mm, an H.sub.R A hardness of at least 85 and a flexural strength of at least 50 kg/mm.sup.2. The stabilizer is constructed of a plurality of elongated blades of equal width arranged in concentric parallel spaced relation to define therebetween a plurality of elongated slits of equal width arranged in concentric parallel spaced relation.