Abstract: Double-sided probe systems with thermal control systems and related methods. Thermally-controlled, double-sided probe systems include a probe assembly configured to test one or more devices under test (DUTs) of a substrate and a chuck configured to support the substrate. The probe assembly includes a thermal control system configured to at least partially control a substrate temperature of the substrate while the probe assembly tests the DUT(s). The chuck is configured to support the substrate such that the probe assembly has access to each of a first substrate side of the substrate and a second substrate side of the substrate while the substrate is operatively supported by the chuck. In some examples, methods of operating double-sided probe systems include regulating the substrate temperature with the thermal control system.

Abstract: Double-sided probe systems with thermal control systems and related methods. Thermally-controlled, double-sided probe systems include a probe assembly configured to test one or more devices under test (DUTs) of a substrate and a chuck configured to support the substrate. The probe assembly includes a thermal control system configured to at least partially control a substrate temperature of the substrate while the probe assembly tests the DUT(s). The chuck is configured to support the substrate such that the probe assembly has access to each of a first substrate side of the substrate and a second substrate side of the substrate while the substrate is operatively supported by the chuck. In some examples, methods of operating double-sided probe systems include regulating the substrate temperature with the thermal control system.

Abstract: Customizable probe cards, probe systems including the same, and related methods. A customizable probe card for testing one or more devices under test (DUTs) comprises a support structure, one or more probe assemblies supporting respective probes, and a probe repositioning assembly. The probe repositioning assembly is configured to facilitate selective adjustment of an orientation of at least one probe relative to the support structure. In examples, a probe system comprises a chuck for supporting a substrate that includes one or more DUTs, a customizable probe card, and a probe card holder. In examples, methods of reconfiguring a customizable probe card comprise utilizing a probe repositioning assembly to reposition the respective probe of at least one probe assembly.