Patents by Inventor Masahiro Tatta

Masahiro Tatta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and attaching/detaching method of reaction vessel
    Patent number: 8172947
    Abstract: To provide a substrate processing apparatus, comprising: a reaction vessel having a processing chamber inside that processes a substrate; a heating device that heats said substrate from an outer peripheral side of the reaction vessel; a lid member that closes the processing chamber; an attachment/detachment jig placed on the lid member for attaching/detaching the reaction vessel from an inside of the heating device; and a support section provided in an upper side of a lower end of the reaction vessel on an inside wall of the reaction vessel, and abutted on an upper surface of the attachment/detachment jig for attaching/detaching the reaction vessel from the inside of the heating device.
    Type: Grant
    Filed: September 19, 2007
    Date of Patent: May 8, 2012
    Assignee: Hitachi Kokusai Electric Inc.
    Inventors: Koji Shibata, Masahiro Tatta
  • Substrate processing apparatus and attaching/detaching method of reaction vessel
    Publication number: 20080083109
    Abstract: To provide a substrate processing apparatus, comprising: a reaction vessel having a processing chamber inside that processes a substrate; a heating device that heats said substrate from an outer peripheral side of the reaction vessel; a lid member that closes the processing chamber; an attachment/detachment jig placed on the lid member for attaching/detaching the reaction vessel from an inside of the heating device; and a support section provided in an upper side of a lower end of the reaction vessel on an inside wall of the reaction vessel, and abutted on an upper surface of the attachment/detachment jig for attaching/detaching the reaction vessel from the inside of the heating device.
    Type: Application
    Filed: September 19, 2007
    Publication date: April 10, 2008
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Koji SHIBATA, Masahiro TATTA