Abstract: In order to discriminate sites in a sample effectively, an imaging apparatus according to an embodiment is provided with: a light detector for detecting light radiated from a sample irradiated with first-wavelength infrared light and second-wavelength infrared light from a light source; and a controller for adjusting the intensity of the first-wavelength infrared light or the intensity of the second-wavelength infrared light, and generating an image of the sample based on a detection result obtained by irradiating the sample with the first-wavelength infrared light and the second-wavelength infrared light simultaneously.

Abstract: An image analysis apparatus includes: a distribution data generator that generates, on the basis of a sample image obtained by irradiating a biological tissue with light having an infrared bandwidth, distribution data indicating a distribution of light intensity in the infrared bandwidth in the tissue; a differential calculator that calculates, on the basis of the distribution data, an Nth-order derivative of the distribution of the light intensity in a first wavelength band in the infrared bandwidth, where N is an integer of 2 or more, for each region in the sample image; and an image data generator that converts the Nth-order derivative into a gray-scale value to generate image data.

Abstract: An image analysis apparatus includes: a distribution data generator that generates, on the basis of a sample image obtained by irradiating a biological tissue with light having an infrared bandwidth, distribution data indicating a distribution of light intensity in the infrared bandwidth in the tissue; a differential calculator that calculates, on the basis of the distribution data, an Nth-order derivative of the distribution of the light intensity in a first wavelength band in the infrared bandwidth, where N is an integer of 2 or more, for each region in the sample image; and an image data generator that converts the Nth-order derivative into a gray-scale value to generate image data.

Abstract: Electromagnetic actuators are disclosed having at least one actively cooled coil assembly. Exemplary actuators are linear and planar motors of which the cooled coil assembly has a coil having first and second main surfaces. A respective thermally conductive cooling plate is in thermal contact with at least one main surface of the coil. Defined in or on each cooling plate is a coolant passageway that conducts a liquid coolant. A primary pattern of the coolant passageway is coextensive with at least part of the main surface of the coil. The primary pattern can have a secondary pattern through which coolant flows in a manner reducing eddy-current losses. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices exhibit reduced eddy-current drag.

Abstract: Methods and apparatus for improving the thermal performance of electromagnetic coils are disclosed. According to one aspect of the present invention, an electromagnetic actuator includes a core and a coil. The coil is formed form a conductor wire that includes a plurality of windings. The windings are arranged around the core, and include at least a first set of windings and a second set of windings. The first set of windings has a different geometry from the second set of windings.

Abstract: A mover (344) moving a stage (238) along a first axis and about a second axis includes a magnetic component (454), and a conductor component (456). The magnetic component (454) includes one or more magnets (454D) that are surrounded by a magnetic field. The conductor component (456) is positioned near the magnetic component (454) in the magnetic field. Further, the conductor component (456) interacts with the magnetic component (454) when current is directed to the conductor component (456) to generate a controlled force along the first axis, and a controlled moment about the second axis. Additionally, the conductor component (456) interacts with the magnetic component (454) to generate a controlled force along a third axis that is perpendicular to the first axis and the second axis when current is directed to the conductor component (456).

Abstract: A mover (344) that moves a stage (238) along a first axis and along a second axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic component (354) includes one or more magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354). Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356). The control system (224) directs current to the conductor component (356) to generate a controllable force along the first axis and a controllable force along the second axis. With this design, the same mover (344) can be used to move the stage (238) along two degrees of freedom (“DOF”). Further, the conductor component (356) including a first phase coil (364A) and a second phase coil (364B) that partly overlaps the first phase coil (364A).

Abstract: A mover combination (226) for moving and positioning a device (34) includes a mover (328) that defines a fluid passageway (370) and a circulation system (330) having a passageway inlet (374) and a passageway outlet (376). The circulation system (330) directs a circulation fluid (378) into the fluid passageway (370). The circulation system (330) can include a liquid/gas separator (384) that is in fluid communication with the fluid passageway (370). With this design, the plumbing for the liquid (378A) and the gas (378B) can each be optimized. Additionally, the circulation system (330) can include a pressure control device (388) that controls the pressure of the circulation fluid (378) in at least a portion of the fluid passageway (370).

Abstract: A coolant cools an object (such as, for example, a coil of a linear motor that drives a stage of an exposure apparatus) while suppressing the generation of a temperature distribution in various parts of the object being cooled by using a coolant that includes a first component and a second component dispersed in the first component, the second component increases in temperature by a lesser amount than the first component when a predetermined amount of heat is absorbed by the first and second components, respectively. The second component may be a substance that changes phase (for example, from a solid to a liquid or from a liquid to a gas) in order to absorb the predetermined amount of heat. The second component may have a higher heat capacity than the first component, and may not change phase when it absorbs heat to cool the object.

Abstract: Disclosed is a linear motor device provided with a movable member, a stator having coils, and a control system for powering selected coils among the coils in accordance with a position of the movable member. The control system powers only the minimum number of coils contributing to the generation of thrust in relation with the current position of the movable member.