Patents by Inventor Masahito Itoh

Masahito Itoh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process gas supply unit
    Patent number: 6209571
    Abstract: A process gas supply unit has a supply valve for supplying process gas to a semiconductor manufacturing apparatus, a purge valve for supplying inert gas, a check valve provided in a passage between an inert gas source and the purge valve and a common manifold provided with the supply valve, the purge valve and the check valve. Therefore, these parts are mounted on a mass flow controller as a unit and the process gas unit can be made compact and integrated as a whole.
    Type: Grant
    Filed: May 8, 1998
    Date of Patent: April 3, 2001
    Assignee: CKD Corporation
    Inventors: Masahito Itoh, Toshiyasu Inagaki
  • Process gas supply unit
    Patent number: 6152175
    Abstract: A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.
    Type: Grant
    Filed: June 3, 1998
    Date of Patent: November 28, 2000
    Assignee: CKD Corporation
    Inventors: Masahito Itoh, Toshiyasu Inagaki, Minoru Ueta, Masahiko Yada, Hiroshi Itafuji