Abstract: The wafer scanning device causes a wafer to scan in a vacuum area and includes a holder 10 to hold a wafer, a ball screw 20 to move the holder 10 to scan, a motor 50 to drive the ball screw 20 and an integrally formed support frame 60. While the holder 10 and the ball screw 20 are installed in the vacuum area, a transmission mechanism offset from the line of travel of the ball screw 20 and the motor 50 are installed in the atmosphere. Thus the wafer scanning device improves responsiveness with respect to the scanning speed control, enhances the uniformity of the scanning speed, has the motor or the like arranged properly and achieves the tilt of a wafer in a most preferable manner.

Abstract: The wafer scanning device causes a wafer to scan in a vacuum area and includes a holder 10 to hold a wafer, a ball screw 20 to move the holder 10 to scan, a motor 50 to drive the ball screw 20 and an integrally formed support frame 60. While the holder 10 and the ball screw 20 are installed in the vacuum area, a transmission mechanism offset from the line of travel of the ball screw 20 and the motor 50 are installed in the atmosphere. Thus the wafer scanning device improves responsiveness with respect to the scanning speed control, enhances the uniformity of the scanning speed, has the motor or the like arranged properly and achieves the tilt of a wafer in a most preferable manner.