Abstract: An electrodialysis apparatus includes an anode chamber (10) having an anode (2), and a cathode chamber (50) having a cathode (3). The electrodialysis apparatus includes a desalting chamber (40) for removing fluoride ions from waste water supplied to produce treated water, a concentrating chamber (30) for concentrating the fluoride ions, which have moved from the desalting chamber (40), in the waste water to produce concentrated water, and a buffer chamber (20) for blocking the fluoride ions in the waste water from flowing from the concentrating chamber (30) directly into the anode chamber (10). The electrodialysis apparatus also include a path for supplying pure water to the anode chamber (10), and a path for supplying effluent water from the anode chamber (10) to the buffer chamber (20).

Abstract: A liquid treatment apparatus includes a cathode chamber (4) having a cathode (7), an anode chamber (1) having an anode (6), a deionization chamber (2) disposed between the cathode chamber (4) and the anode chamber (1), and a neutralization chamber (3) disposed between the cathode chamber (4) and the anode chamber (1). The deionization chamber is configured to selectively remove cations or anions from a water to be treated and receive ions having the same charge as the selectively removed ions from the cathode chamber (4) or the anode chamber (1). The neutralization chamber is configured to receive the removed ions and electrically neutralize the removed ions by ions supplied from the anode chamber (1) or the cathode chamber (4). An ion exchange membrane is provided to partition the deionization chamber and the neutralization chamber.

Abstract: In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.

Abstract: The present invention provides an electrolytic deposition treatment apparatus and method which can reduce metal ion concentration of waste water to be treated by electrolytic deposition to the degree to which treated water can be discharged to the outside, and which can treat waste water, even if the quantity of waste water produced in a semiconductor device fabrication apparatus is large. The electrolytic deposition treatment apparatus comprises a cathode(3) for depositing metal ions in water to be treated as metal, a cation exchange membrane(4) disposed so as to face the cathode(3), and an anode(6) disposed so as to face the cation exchange membrane(4) through a cation exchanger(5). The water to be treated is supplied to a space between the cathode(3) and the cation exchange membrane(4).

Abstract: A bipolar chamber is used in an electrochemical liquid treatment apparatus such as an electrodialyzer and an electrolyzer. The bipolar chamber includes an anion-exchange membrane (1), an electrode (2), and a cation-exchange membrane (3). A liquid is supplied between the cation-exchange membrane (3) and the anion-exchange membrane (1). The anion-exchange membrane (1), the electrode (2), and the cation-exchange membrane (3) are arranged in this order from an anode side of the bipolar chamber. The liquid may include pure water or a nonelectrolyte aqueous solution.

Abstract: The present invention aims to provide electrode compartment structures in electrochemical liquid treatment equipments, which enable stable operation using pure water as an electrode compartment liquid requiring no concentration adjustment without adverse electrode reaction. The present invention relates an electrochemical liquid treatment equipment comprising ion exchange membranes between an anode and a cathode, which has an anode compartment defined by the anode and a cation exchange membrane and a cathode compartment defined by the cathode and an anion exchange membrane (12), each of the anode compartment and cathode compartment being packed with an ion exchanger (14) composed of a fibrous a material, each of the anode and cathode (11) being formed from a liquid- and gas-permeable and electrically conductive material, and the equipment also having an electrode compartment liquid flowing chamber (15) which is formed behind each of the anode and cathode.

Abstract: The present invention relates to a method and apparatus for removing and recovering metal such as copper from various kinds of waste water containing copper. A method for treating waste water includes treating waste water in a copper treatment step (10) comprising a combination of electrodialysis operation and electrolytic deposition operation to produce treated water (107) having a lowered copper concentration, and recovering copper from the waste water.

Abstract: The present invention relates to a method for removing and recovering metal ions from various kinds of waste water to be treated. The method comprises an oxidizing agent removing apparatus for decomposing and removing an oxidizing agent from the water, and an electrolytic deposition apparatus (21) for removing and recovering metal ions from the water discharged from the oxidizing agent removing apparatus. The electrolytic deposition apparatus has electrodes and an ion exchanger disposed between the electrodes.

Abstract: In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.

Abstract: An electrolytic solution control method can control the composition of an electrolytic solution efficiently with high precision, and can remove a partially decomposed product of an organic component from an electrolytic solution. The electrolytic solution control method includes storing an electrolytic solution containing an organic component and an inorganic component in an electrolytic solution storage tank while controlling and keeping the electrolytic solution at a predetermined composition, adjusting an inorganic component of the waste electrolytic solution after use in electrolytic processing in an electrolytic processing apparatus, and then returning the waste electrolytic solution to the electrolytic solution storage tank.

Abstract: An object of the present invention is to provide a structure of a metal collecting material for use in seawater or river water or industrial wastewater to give the most excellent adsorption efficiency. Another object of the present invention is to provide a process for efficiently separating and recovering valuable metals or noxious metals from a metal collecting material having collected said valuable metals from seawater or noxious metals from river water or wastewater with the least possible waste generation. A metal collector according to an aspect of the present invention is formed by stacking at least partially alternate layers of a fibrous metal collecting material with a spacer for introducing a liquid to be treated into said collecting material, wherein the area of spacer side faces represents 25-75% of the total area of collecting material side faces and spacer side faces in the side faces of the stack.

Abstract: A radiation graft treated material in the form of a woven or non-woven fabric material that is composed of polymer monofilament fiber of which only the surface has undergone a radiation-induced graft polymerization but of which the center remains unaffected by grafting.

Abstract: The object of the present invention is to provide an electrical deionization apparatus capable of long-term operation at a low voltage. To achieve this object, the present invention is directed to an electrical deionization apparatus based on a completely new compartment configuration and provides an electrical deionization apparatus comprising multiple compartments separated by cation- and anion-exchange membranes arranged between anode and cathode, wherein the anion-exchange membrane on the anode side and the cation-exchange membrane on the cathode side together define a water splitting compartment, and wherein an anion deionization compartment defined between anion-exchange membranes is placed on the anode side of the water splitting compartment, and a cation deionization compartment defined between cation-exchange membranes is placed on the cathode side of the water splitting compartment.

Abstract: A method for performing radiation-inducted graft polymerization on substrates in the form of webs of woven or non-woven fabric, which includes the steps of exposing a substrate woven or non-woven fabric composed of polymer fiber to electron beams in a nitrogen atmosphere, contacting the irradiated substrate with a specified amount of monomer in a nitrogen atmosphere, and subjecting the monomer and the substrate in mutual contact to graft polymerization in a nitrogen atmosphere, characterized in that the first through third steps are performed in succession.

Abstract: A polymer substrate for radiation-induced graft polymerization in the form of a woven or non-woven fabric that comprises a woven or non-woven fabric composed of polymer fiber and a reinforcement polymer having a greater strength and a slower rate of radiation-induced graft polymerization than said polymer fiber. Also, radiation graft treated stock prepared from said polymer substrate. In another aspect, a radiation graft treated material in the form of a woven or non-woven fabric material that is composed of polymer monofilament fiber of which only the surface has undergone a radiation-induced graft polymerization but of which the center remains unaffected by grafting.

Abstract: A radiation graft treated material in the form of a woven or non-woven fabric material that is composed of polymer monofilament fiber of which only the surface has undergone a radiation-induced graft polymerization but of which the center remains unaffected by grafting.

Abstract: A method for performing radiation-inducted graft polymerization on substrates in the form of webs of woven or non-woven fabric, which includes the steps of exposing a substrate woven or non-woven fabric composed of polymer fiber to electron beams in a nitrogen atmosphere, contacting the irradiated substrate with a specified amount of monomer in a nitrogen atmosphere, and subjecting the monomer and the substrate in mutual contact to graft polymerization in a nitrogen atmosphere, characterized in that the first through third steps are performed in succession.

Abstract: The object of this invention is to provide an electrical deionization apparatus with which various feed water types ranging from water of high ion concentration to water of low ion concentration can be consistently deionized with high efficiency. At least part of cation-exchange membranes and anion-exchange membranes alternate between electrodes to form an alternating array of deionization and concentration compartments and the deionization compartment contains a woven or non-woven fabric made of cation-exchange fiber that is placed on the cation-exchange membrane side in a face-to-face relationship with a woven or non-woven fabric made of anion-exchange fiber that is placed on the anion-exchange membrane side, with the passageway of feed water between the two woven or non-woven fabrics containing an ion-conducting spacer provided with an ion-exchanging capability.