Abstract: A plasma processing apparatus comprising at least a plasma processing chamber for plasma-processing an object; object-holding means for disposing the object in the plasma processing chamber; and plasma-generating means for generating a plasma in the plasma processing chamber. The inner wall of the plasma processing chamber is at least partially covered with an oxide film based on a pre-treating plasma. A plasma processing apparatus and a plasma processing method effectively prevent the spluttering and the etching of the inner wall of the plasma processing chamber while suppressing contamination to the object.

Abstract: A surface treatment method for a tape which treats a surface of a tape continuously traveling, comprising: rubbing surfaces of the traveling tape each other to surface-treat the tape.

Abstract: A substrate to be processes is accommodated in a process container. A vapor deposition source retains a vapor deposition material to be deposited on the substrate to be processed. A measuring device measures a film thickness of a vapor deposition film produced in said process container. The measuring device measures the film thickness by irradiating a light onto the vapor deposition film.

Abstract: A plasma processing apparatus comprising at least a plasma processing chamber for plasma-processing an object; object-holding means for disposing the object in the plasma processing chamber; and plasma-generating means for generating a plasma in the plasma processing chamber. The inner wall of the plasma processing chamber is at least partially covered with an oxide film based on a pre-treating plasma. A plasma processing apparatus and a plasma processing method effectively prevent the spluttering and the etching of the inner wall of the plasma processing chamber while suppressing contamination to the object.

Abstract: In the tape winding method and the tape winding device according to the present invention, the first to the fourth rollers are provided, and the position and the like of the tape are restrained by the rollers. Therefore, the tape with the curvature amount of 6 mm or less per the tape length of 1 m can be wound up at a high speed and can be made favorable in the winding shape. Moreover, the position of the fourth roller is controlled so as to prevent contact of the tape to the shaft part surface of the fourth roller, and even if the curvature of the tape is large, the position of the tape in the width direction to the winding hub by the fourth roller can be reliably performed, as a result of which, winding of the tape which can provide a favorable winding shape is made possible.

Abstract: An air exhausting concave portion is provided on an outer peripheral surface of a paster roller that pushes a first web and a second web in their overlapped state. Both end portions of the outer peripheral surface of the paster roller are chamfered. The paster roller is formed like a crown shape.

Abstract: An air exhausting concave portion is provided on an outer peripheral surface of a paster roller that pushes a first web and a second web in their overlapped state. Both end portions of the outer peripheral surface of the paster roller are chamfered. The paster roller is formed like a crown shape.