Abstract: A tubular flow path 18 of a first electromagnetic valve 10 and a tubular flow path 28 of a second electromagnetic valve 20 are inserted into a chamber 5 to communicate with a suction port 31 and a discharge port 32 to reduce a pulsating sound. The suction port 31 is arranged between the tubular flow paths 18 and 28 to reduce the air flow resistance.

Abstract: A tubular flow path 18 of a first electromagnetic valve 10 and a tubular flow path 28 of a second electromagnetic valve 20 are inserted into a chamber 5 to communicate with a suction port 31 and a discharge port 32 to reduce a pulsating sound. The suction port 31 is arranged between the tubular flow paths 18 and 28 to reduce the air flow resistance.

Abstract: A guide boss is provided in a diaphragm blocking the halfway portion of a channel; a valve disk is formed in the shape of a cylinder; the inner face of this cylinder-shaped valve disk is slidably engaged around the guide boss; and further, a valve port consisting of a plurality of long bores are formed in a diaphragm surrounding the guide boss. Thereby, fluid can responsively flow into the valve port when the valve disk is opened, and the follow-up of the fluid is accelerated.

Abstract: A guide boss is provided in a diaphragm blocking the halfway portion of a channel; a valve disk is formed in the shape of a cylinder; the inner face of this cylinder-shaped valve disk is slidably engaged around the guide boss; and further, a valve port consisting of a plurality of long bores are formed in a diaphragm surrounding the guide boss. Thereby, fluid can responsively flow into the valve port when the valve disk is opened, and the follow-up of the fluid is accelerated.

Abstract: A high frequency relay for switching a high frequency signal includes stationary contacts and terminals formed on a substrate in a planar configuration. An upper and a lower ground layer are respectively formed on the upper and lower surfaces of the substrate in the vicinity of the stationary contacts and terminals. A movable contact spring is so configured as to be connected to ground via the ground layers when it opens the contacts. With this configuration, the relay is capable of reducing the leakage of signals and thereby enhancing isolation characteristic.

Abstract: An acceleration sensor comprises an upper semiconductor substrate having a rigid frame, four deformable beams connected with the rigid frame, and a weight portion supported by the plurality of deformable beams, a lower semiconductor substrate bonded to the rigid frame, a plurality of movable electrodes attached to the weight portion, and electrically isolated from one another, and a plurality of stationary electrodes attached to the second semiconductor substrate, and opposite to the plurality of movable electrodes for forming a plurality of variable capacitors, and the center of gravity of the weight portion is spaced from a common neutral surface of the four beams for allowing acceleration to produce bending moment exerted on the four beams, thereby causing the variable capacitors to independently change the capacitance.