Abstract: An apparatus for low-temperature plasma treatment of a sheet material, comprising a plurality of reaction zones through which the sheet material is transported in an enclosed reaction chamber whose inner pressure can be reduced, in which the reaction zones are provided respectively with an electrode communicating to a high frequency generating device and a plurality of jet nozzles for supplying a gas thereto for generating low-temperature plasma gas, and the reaction chamber and the reaction zones are earthed. Another apparatus for the same purpose is to provide a liquid medium passage passing through the guide rolls for transporting a sheet material to be treated and through the electrodes under reduced pressure for heating or cooling the sheet material under treatment to a prescribed temperature.