Abstract: An electron beam lithography apparatus-includes: a density set storage unit that stores, for each of pieces of figure information, a set of pieces of first density information corresponding to areas occupied by a figure in first small regions divided from a figure region specified by the piece of figure information; a density set acquisition unit that acquires first density sets respectively corresponding to the pieces of figure information from the density set storage unit; a correction amount acquisition unit that acquires correction amounts corresponding to the first density sets for each of the pieces of figure information, and are for the second small regions; an emission amount acquisition unit that acquires, for the second small regions, emission amounts of an electron beam with intensities corresponding to the correction amounts for the second small regions; and a drawing unit that emits an electron beam according to the emission amounts.

Abstract: An electron beam drawing apparatus includes: an accepting unit that accepts input graphic information, which is information representing at least one graphic; a graphic width acquiring unit that acquires a width of each of the at least one graphic represented by the input graphic information; a generating unit that generates approximate graphic information representing at least one approximate graphic, which is a graphic configured by at least one rectangle matching the width of the graphic, and is a graphic that approximates each of the at least one graphic represented by the input graphic information; and a drawing unit that draws the at least one approximate graphic represented by the approximate graphic information generated by the generating unit.

Abstract: An electron beam drawing apparatus includes: an accepting unit that accepts input graphic information, which is information representing at least one graphic; a graphic width acquiring unit that acquires a width of each of the at least one graphic represented by the input graphic information; a generating unit that generates approximate graphic information representing at least one approximate graphic, which is a graphic configured by at least one rectangle matching the width of the graphic, and is a graphic that approximates each of the at least one graphic represented by the input graphic information; and a drawing unit that draws the at least one approximate graphic represented by the approximate graphic information generated by the generating unit.