Patents by Inventor Masakazu Iwanaga

Masakazu Iwanaga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam drawing device and method of controlling charged particle beam drawing device
    Patent number: 11694875
    Abstract: A charged particle beam drawing device includes: a storage unit that stores a pattern generation program for generating pattern data, the pattern generation program being a program in which an instruction for specifying a type of a figure and an instruction for specifying a regular arrangement of the figure are described; an execution unit that executes the pattern generation program stored in the storage unit; and a control unit that performs drawing control based on the pattern data generated by the executed pattern generation program.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: July 4, 2023
    Assignee: JEOL Ltd.
    Inventor: Masakazu Iwanaga
  • Charged Particle Beam Drawing Device and Method of Controlling Charged Particle Beam Drawing Device
    Publication number: 20220051869
    Abstract: A charged particle beam drawing device includes: a storage unit that stores a pattern generation program for generating pattern data, the pattern generation program being a program in which an instruction for specifying a type of a figure and an instruction for specifying a regular arrangement of the figure are described; an execution unit that executes the pattern generation program stored in the storage unit; and a control unit that performs drawing control based on the pattern data generated by the executed pattern generation program.
    Type: Application
    Filed: August 12, 2021
    Publication date: February 17, 2022
    Inventor: Masakazu Iwanaga