Patents by Inventor Masakazu Mimura
Masakazu Mimura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11936365Abstract: An elastic wave device includes an interdigital transducer electrode, a dielectric film, and a frequency adjustment film are disposed on a LiNbO3 substrate. When Euler Angles of the LiNbO3 substrate are within a range of about 0°±5°, within a range of about ?±1.5°, within a range of about 0°±10°, the interdigital transducer electrode includes a main electrode, a film thickness of the main electrode normalized by a wavelength determined in accordance with an electrode finger pitch of the interdigital transducer electrode is denoted as T, and a density ratio of a material of the main electrode to Pt is denoted as r, the film thickness of the main electrode and ? of the Euler Angles satisfy ?=?0.05°/(T/r?0.04)+31.35°.Type: GrantFiled: February 28, 2023Date of Patent: March 19, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Masakazu Mimura
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Publication number: 20240048120Abstract: An acoustic wave device includes a piezoelectric substrate made of LiNbO3, and a dielectric film provided on the piezoelectric substrate to cover first and second IDT electrodes on the piezoelectric substrate. The first and second IDT electrodes include main electrode layers. When wave lengths determined by electrode finger pitches of the first and second IDT electrodes are ?1 and ?2, respectively, the average value thereof is ?0, ?1/?0=1+X, and ?2/?0=1?X, a relationship of 0.05?X?0.65 is satisfied. The wavelength ?1 is the longest, and the wavelength ?2 is the shortest. In Euler angles (?, ?, ?) of the piezoelectric substrate, ? is 0°±5°, ? is 0°±10°, and ? satisfies Expression 1, wherein a relationship of B1<T×r?0.10?0 and B2<T×r?0.10?0 are satisfied.Type: ApplicationFiled: September 12, 2023Publication date: February 8, 2024Inventor: Masakazu MIMURA
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Patent number: 11855606Abstract: An elastic wave device includes an LiNbO3 substrate, a first elastic wave resonator including a first IDT electrode and a first dielectric film, and a second elastic wave resonator including a second IDT electrode and a second dielectric film. A Rayleigh wave travels along at least one surface of the elastic wave device. A thickness of the first dielectric film differs from a thickness of the second dielectric film. A propagation direction of an elastic wave in the first elastic wave resonator coincides with a propagation direction of an elastic wave in the second elastic wave resonator. Euler angles of the LiNbO3 substrate fall within a range of (0°±5°, ?, 0°±10°).Type: GrantFiled: September 12, 2022Date of Patent: December 26, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Masakazu Mimura
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Patent number: 11799444Abstract: An acoustic wave device includes a piezoelectric substrate made of LiNbO3, and a dielectric film provided on the piezoelectric substrate to cover first and second IDT electrodes on the piezoelectric substrate. The first and second IDT electrodes include main electrode layers. When wave lengths determined by electrode finger pitches of the first and second IDT electrodes are ?1 and ?2, respectively, the average value thereof is ?0, ?1/?0=1+X, and ?2/?0=1?X, a relationship of 0.05?X?0.65 is satisfied. The wavelength ?1 is the longest, and the wavelength ?2 is the shortest. In Euler angles (?, ?, ?) of the piezoelectric substrate, ? is 0°±5°, ? is 0°±10°, and ? satisfies Expression 1, wherein a relationship of B1<T×r?0.10?0 and B2<T×r?0.10?0 are satisfied.Type: GrantFiled: June 17, 2022Date of Patent: October 24, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Masakazu Mimura
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Publication number: 20230336160Abstract: A bandpass acoustic wave filter device includes an IDT electrode and a dielectric film disposed on a piezoelectric substrate including a LiNbO3 layer, and an acoustic wave resonator is defined by the IDT electrode. The acoustic wave resonator utilizes the Rayleigh wave, and a response of an SH wave excited by the acoustic wave resonator is outside a pass band of the acoustic wave filter device.Type: ApplicationFiled: June 22, 2023Publication date: October 19, 2023Inventor: Masakazu MIMURA
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Patent number: 11777471Abstract: An acoustic wave device includes a piezoelectric substrate and an IDT electrode provided on the piezoelectric substrate and includes a main electrode layer. In the IDT electrode, a central region, first and second low acoustic velocity regions and first and second high acoustic velocity regions are disposed in this order. A duty ratio in the first low acoustic velocity region of first electrode fingers and the second low acoustic velocity region of second electrode fingers is larger than a duty ratio in the central region. The main electrode layer includes any one of Au, Pt, Ta, Cu, Ni, and Mo as a main component.Type: GrantFiled: April 28, 2021Date of Patent: October 3, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Masakazu Mimura, Kazuhiro Takigawa
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Patent number: 11764755Abstract: An elastic wave device using the S0 mode of plate waves includes a support substrate, an acoustic reflective layer laminated on the support substrate, a piezoelectric body laminated on the acoustic reflective layer, and an IDT electrode disposed on the piezoelectric body. In the acoustic reflective layer, T1+T2 is between about 0.40 and about 0.60 inclusive in a portion in which low and high acoustic impedance layers are adjacent in the laminating direction. T1 is the thickness of the low acoustic impedance layers. T2 is the thickness of the high acoustic impedance layers. T1/(T1+T2) is between about 0.35 and about 0.65 inclusive.Type: GrantFiled: January 7, 2019Date of Patent: September 19, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Masakazu Mimura
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Publication number: 20230275558Abstract: An elastic wave device includes a piezoelectric substrate made of LiNbO3, an IDT electrode on the piezoelectric substrate, and a dielectric film on the piezoelectric substrate and covering the IDT electrode. The IDT electrode includes a first electrode layer on or above the piezoelectric substrate and including W or an alloy including W, and a second electrode layer on or above the first electrode layer. A thickness of the first electrode layer is not smaller than 0.062?, ? being a wavelength determined by a pitch of electrode fingers of the IDT electrode. The piezoelectric substrate has Euler angles of (0°± about 5°, ?, 0°± about 10°), ? being not smaller than 8° and not larger than 32°.Type: ApplicationFiled: May 4, 2023Publication date: August 31, 2023Inventor: Masakazu MIMURA
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Publication number: 20230275555Abstract: An acoustic wave device includes a support substrate having a thickness in a first direction, a piezoelectric layer on the support substrate, an interdigital transducer electrode on the piezoelectric layer and including first and second electrode fingers, the first electrode fingers extending in a second direction crossing the first direction, the second electrode fingers extending in the second direction and facing the first electrode fingers in a third direction orthogonal or substantially orthogonal to the second direction, and a reinforcing film on the piezoelectric layer. The support substrate and the piezoelectric layer include a hollow therebetween at a position overlapping the interdigital transducer electrode in the first direction. At least one through hole penetrates the piezoelectric layer at a position not overlapping the interdigital transducer electrode in the first direction, and the through hole communicates with the hollow. The reinforcing film overlaps the hollow in the first direction.Type: ApplicationFiled: May 10, 2023Publication date: August 31, 2023Inventors: Tetsuya KIMURA, Katsumi SUZUKI, Toshimaro YONEDA, Kazunori INOUE, Naohiro NODAKE, Masakazu MIMURA
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Patent number: 11722124Abstract: A bandpass acoustic wave filter device includes an IDT electrode and a dielectric film disposed on a piezoelectric substrate including a LiNbO3 layer, and an acoustic wave resonator is defined by the IDT electrode. The acoustic wave resonator utilizes the Rayleigh wave, and a response of an SH wave excited by the acoustic wave resonator is outside a pass band of the acoustic wave filter device.Type: GrantFiled: December 1, 2020Date of Patent: August 8, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Masakazu Mimura
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Publication number: 20230208387Abstract: An elastic wave device includes an interdigital transducer electrode, a dielectric film, and a frequency adjustment film are disposed on a LiNbO3 substrate. When Euler Angles of the LiNbO3 substrate are within a range of about 0° ± 5°, within a range of about ? ± 1.5°, within a range of about 0° ± 10°, the interdigital transducer electrode includes a main electrode, a film thickness of the main electrode normalized by a wavelength determined in accordance with an electrode finger pitch of the interdigital transducer electrode is denoted as T, and a density ratio of a material of the main electrode to Pt is denoted as r, the film thickness of the main electrode and ? of the Euler Angles satisfy ? = -0.05°/(T/r - 0.04) + 31.35°.Type: ApplicationFiled: February 28, 2023Publication date: June 29, 2023Inventor: Masakazu MIMURA
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Patent number: 11621692Abstract: An elastic wave device includes an interdigital transducer electrode, a dielectric film, and a frequency adjustment film are disposed on a LiNbO3 substrate. When Euler Angles of the LiNbO3 substrate are within a range of about 0°±5°, within a range of about ?±1.5°, within a range of about 0°±10°, the interdigital transducer electrode includes a main electrode, a film thickness of the main electrode normalized by a wavelength determined in accordance with an electrode finger pitch of the interdigital transducer electrode is denoted as T, and a density ratio of a material of the main electrode to Pt is denoted as r, the film thickness of the main electrode and ? of the Euler Angles satisfy ?=?0.05°/(T/r?0.04)+31.35°.Type: GrantFiled: July 20, 2022Date of Patent: April 4, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Masakazu Mimura
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Patent number: 11606077Abstract: An elastic wave device includes a supporting substrate, an acoustic reflection layer on the supporting substrate, a piezoelectric layer on the acoustic reflection layer, and an IDT electrode on the piezoelectric layer. The acoustic reflection layer includes three or more low-acoustic impedance layers and two or more high-acoustic impedance layers. At least one of a first relationship in which in which, a film thickness of a first low-acoustic impedance layer closest to the piezoelectric layer is thinner than a film thickness of a low-acoustic impedance layer closest to the first low-acoustic impedance layer, and a second relationship in which a film thickness of a first high-acoustic impedance layer closest to the piezoelectric layer is thinner than a film thickness of a high-acoustic impedance layer closest to the first high-acoustic impedance layer, is satisfied.Type: GrantFiled: August 13, 2018Date of Patent: March 14, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Masakazu Mimura, Yutaka Kishimoto
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Publication number: 20230070867Abstract: An acoustic wave device includes a piezoelectric substrate and an IDT electrode including electrode fingers, a first layer on the piezoelectric substrate, and a second layer on the first layer and including Cu as a main component. The first layer includes a first principal surface on a side closest to the piezoelectric substrate and a second principal surface in contact with the second layer. The second layer includes a third principal surface in contact with the first layer, a fourth principal surface opposite to the third principal surface, and a side surface connected to the third and fourth principal surfaces. The IDT electrode includes a barrier layer on the side surface of the second layer. A boundary between the side surface of the second layer and the barrier layer is on the second principal surface of the first layer, and the barrier layer does not reach the piezoelectric substrate.Type: ApplicationFiled: November 16, 2022Publication date: March 9, 2023Inventors: Masakazu MIMURA, Soichiro TEGAWA
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Publication number: 20230076316Abstract: An acoustic wave device includes a piezoelectric substrate and an IDT electrode including electrode fingers, a barrier layer on the piezoelectric substrate, and a first layer on the barrier layer, and including Cu as a main component. The first layer includes a first principal surface on a side closest to the piezoelectric substrate, a second principal surface opposite to the first principal surface, and a side surface connected to the first principal surface and the second principal surface. The barrier layer covers the first principal surface 5a and the side surface of the first layer. A thickness of a portion of the barrier layer covering the first principal surface of the first layer is smaller than a thickness of a portion of the barrier layer covering the side surface of the first layer.Type: ApplicationFiled: November 16, 2022Publication date: March 9, 2023Inventors: Masakazu MIMURA, Soichiro TEGAWA
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Patent number: 11552615Abstract: An acoustic wave device includes a piezoelectric body made of lithium niobate and disposed directly or indirectly on a supporting substrate, and IDT electrode disposed directly or indirectly on the piezoelectric body. When the wavelength of an acoustic wave that is determined by a pitch of electrode fingers of the IDT electrode is denoted by ?, the thickness of the piezoelectric body is equal to or less than about 1?. The acoustic wave device uses the plate wave S0 mode propagating in the piezoelectric body. The Euler angles of the lithium niobate are (0°±10°, ?, 90°±10°), provided that ? is from about 0° to about 180° inclusive.Type: GrantFiled: October 1, 2019Date of Patent: January 10, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Masakazu Mimura
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Publication number: 20230006641Abstract: An elastic wave device includes an LiNbO3 substrate, a first elastic wave resonator including a first IDT electrode and a first dielectric film, and a second elastic wave resonator including a second IDT electrode and a second dielectric film. A Rayleigh wave travels along at least one surface of the elastic wave device. A thickness of the first dielectric film differs from a thickness of the second dielectric film. A propagation direction of an elastic wave in the first elastic wave resonator coincides with a propagation direction of an elastic wave in the second elastic wave resonator. Euler angles of the LiNbO3 substrate fall within a range of (0°±5°, ?, 0°±10°).Type: ApplicationFiled: September 12, 2022Publication date: January 5, 2023Inventor: Masakazu MIMURA
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Publication number: 20220360247Abstract: An elastic wave device includes an interdigital transducer electrode, a dielectric film, and a frequency adjustment film are disposed on a LiNbO3 substrate. When Euler Angles of the LiNbO3 substrate are within a range of about 0°±5°, within a range of about ?±1.5°, within a range of about 0°±10°, the interdigital transducer electrode includes a main electrode, a film thickness of the main electrode normalized by a wavelength determined in accordance with an electrode finger pitch of the interdigital transducer electrode is denoted as T, and a density ratio of a material of the main electrode to Pt is denoted as r, the film thickness of the main electrode and ? of the Euler Angles satisfy ?=?0.05°/(T/r?0.04)+31.35°.Type: ApplicationFiled: July 20, 2022Publication date: November 10, 2022Inventor: Masakazu MIMURA
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Patent number: 11482984Abstract: An elastic wave device includes an LiNbO3 substrate, a first elastic wave resonator including a first IDT electrode and a first dielectric film, and a second elastic wave resonator including a second IDT electrode and a second dielectric film. A Rayleigh wave travels along at least one surface of the elastic wave device. A thickness of the first dielectric film differs from a thickness of the second dielectric film. A propagation direction of an elastic wave in the first elastic wave resonator coincides with a propagation direction of an elastic wave in the second elastic wave resonator. Euler angles of the LiNbO3 substrate fall within a range of (0°±5°, ?, 0°±10°).Type: GrantFiled: October 8, 2020Date of Patent: October 25, 2022Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Masakazu Mimura
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Publication number: 20220321092Abstract: An acoustic wave device includes a piezoelectric substrate made of LiNbO3, and a dielectric film provided on the piezoelectric substrate to cover first and second IDT electrodes on the piezoelectric substrate. The first and second IDT electrodes include main electrode layers. When wave lengths determined by electrode finger pitches of the first and second IDT electrodes are ?1 and ?2, respectively, the average value thereof is ?0, ?1/?0=1+X, and ?2/?0=1?X, a relationship of 0.05?X?0.65 is satisfied. The wavelength ?1 is the longest, and the wavelength ?2 is the shortest. In Euler angles (?, ?, ?) of the piezoelectric substrate, ? is 0°±5°, ? is 0°±10°, and ? satisfies Expression 1, wherein a relationship of B1<T×r?0.10?0 B2<T×r?0.10?0 are satisfied.Type: ApplicationFiled: June 17, 2022Publication date: October 6, 2022Inventor: Masakazu MIMURA