Abstract: A displacement measuring apparatus acquires, based on a principle of triangulation and corresponding to an incident position of the reflected light in the light receiving section, a profile that is an aggregate of heights of reflection positions of the planar measurement light in the measurement object. The displacement measuring apparatus drives the light guiding optical system such that a plurality of reflection positions arranged in a line along a first direction on a surface of the measurement object are minutely displaced in a second direction different from the first direction by reflecting the planar measurement light on the surface of the measurement object. The displacement measuring apparatus acquires one profile by statistically processing a plurality of sub-profiles acquired by minutely displacing the light guiding optical system.

Abstract: To enable measuring a displacement at a predetermined position of a measurement object for a short time at a high accuracy. While a scanning mirror is moved in a first scanning range to cause measurement light to irradiate a measurement position, a first irradiation angle of the scanning mirror at the time the measurement light is emitted to the measurement position is obtained. While a scanning mirror is moved in a second scanning range that covers the first irradiation angle and that is narrower than the first scanning range, and a second irradiation angle at the time the measurement light is emitted to the measurement position is obtained. A light receiver outputs a received-light quantity distribution, and a displacement at the measurement position is measured on the basis of the second irradiation angle and the position in a second direction of the measurement position.

Abstract: A displacement measuring apparatus acquires, based on a principle of triangulation and corresponding to an incident position of the reflected light in the light receiving section, a profile that is an aggregate of heights of reflection positions of the planar measurement light in the measurement object. The displacement measuring apparatus drives the light guiding optical system such that a plurality of reflection positions arranged in a line along a first direction on a surface of the measurement object are minutely displaced in a second direction different from the first direction by reflecting the planar measurement light on the surface of the measurement object. The displacement measuring apparatus acquires one profile by statistically processing a plurality of sub-profiles acquired by minutely displacing the light guiding optical system.

Abstract: To enable measuring a displacement at a predetermined position of a measurement object for a short time at a high accuracy. While a scanning mirror is moved in a first scanning range to cause measurement light to irradiate a measurement position, a first irradiation angle of the scanning mirror at the time the measurement light is emitted to the measurement position is obtained. While a scanning mirror is moved in a second scanning range that covers the first irradiation angle and that is narrower than the first scanning range, and a second irradiation angle at the time the measurement light is emitted to the measurement position is obtained. A light receiver outputs a received-light quantity distribution, and a displacement at the measurement position is measured on the basis of the second irradiation angle and the position in a second direction of the measurement position.