Abstract: An exposure apparatus includes a substrate stage on which substrates are placed, and first projection modules each including a spatial light modulator, the first projection modules projecting wiring patterns each connecting semiconductor chips arranged on each of the substrates onto the substrates, wherein the first projection modules project the wiring patterns onto different substrates, substantially simultaneously.

Abstract: An optical device includes a plurality of laser light sources, an output module having an optical modulator, and a time divider that is disposed between the plurality of laser light sources and the output module and that is configured to divide laser beams emitted from the plurality of laser light sources in time.

Abstract: An exposure apparatus includes a substrate holder configured to hold a substrate and move, a module including a spatial light modulator having light modulation elements that are two-dimensionally arranged, an illumination unit irradiating the spatial light modulator with illumination lights, and a projection unit guiding the illumination light from the light modulation elements to respective light irradiation areas that are two-dimensionally arranged on the substrate in first and second directions, and a control unit configured to drive the substrate holder in a scanning direction, wherein the light modulation elements are two-dimensionally arranged to be inclined at a predetermined angle ? (0°<?<90°) with respect to the scanning direction and a non-scanning direction orthogonal to the scanning direction, and when a predetermined region of the substrate is exposed, the control unit scans the substrate holder at such a speed that spot positions are arranged in a staggered arrangement.

Abstract: A spatial light modulation unit is used in an exposure apparatus that exposes an exposure pattern onto a photosensitive substrate while moving the photosensitive substrate in a scan direction. The spatial light modulation unit includes: a spatial light modulator having a plurality of elements; a controller that controls the plurality of elements in accordance with the exposure pattern; and a SLM substrate on which the spatial light modulator and the controller are provided. The controller is arranged side by side in the scan direction with respect to the spatial light modulator.

Abstract: An exposure apparatus exposes an object to pattern light generated by a spatial light modulator having a plurality of elements in accordance with drawing data. The exposure apparatus includes a data output unit configured to output the drawing data to the spatial light modulator, an illumination optical system configured to irradiate the spatial light modulator with illumination light, a first movable body configured to hold the object, a projection optical system configured to project an image of the pattern light generated by the spatial light modulator onto the object, a detection unit configured to detect the image of the pattern light that has been projected, and a determination unit configured to determine whether the spatial light modulator is capable of generating pattern light in accordance with the drawing data output from the data output unit, based on a detection result of the detection unit.

Abstract: An exposure apparatus includes an illumination optical system, a spatial light modulator illuminated by light from the illumination optical system, a projection optical system that irradiates an exposure target with light emitted from the spatial light modulator, a stage on which the exposure target is placed to perform a relative movement between the exposure target and the projection optical system relative to each other in a predetermined scanning direction, and a controller that has a storage in which information relating to exposure pattern is stored and controls exposure for the exposure target. The controller controls the exposure for the exposure target so that a first step of performing a first exposure based on the information relating to the exposure pattern and a second step of performing a second exposure based on at least a portion of the information relating to the exposure pattern used in the first step are executed.

Abstract: An exposure apparatus includes: an illumination optical system; a spatial light modulator; a projection optical system that illuminates an exposure target with light emitted from the spatial light modulator; and a stage where the exposure target is placed, wherein by the stage moving the exposure target in a predetermined scan direction, the light illuminates the exposure target by the projection optical system scans on the exposure target, the spatial light modulator includes a plurality of mirrors that rotates around a tilt axis extending in a direction orthogonal to both the scan and an optical axis directions of the projection optical system, the mirrors become an ON state by adjusting a tilt of each mirror relative to the scan direction and thereby emit light to the system, and the exposure apparatus includes an angle adjustment mechanism that adjusts a tilt angle of the spatial light modulator relative to the scan direction.

Abstract: An exposure apparatus includes an exposure module that includes a spatial light modulator and projects and exposes pattern light generated by the spatial light modulator onto a substrate, and a determination unit configured to, when a plurality of substrates scheduled to be arranged on a substrate holder include a first substrate having a defect, determine a plurality of substrates to be arranged on the substrate holder from the plurality of substrates scheduled to be arranged on the substrate holder, based on a predetermined handling method for the first substrate.

Abstract: An illumination optical system configured to illuminate a mask on which a predetermined pattern is formed, includes a plurality of light sources configured to emit pulse lights, an optical system including a division part configured to divide the pulse lights emitted from the plurality of light sources into first pulse light and second pulse light, a delay optical system configured to guide the second pulse light to a second optical path longer than a first optical path through which the first pulse light passes, and a synthesis/division part configured to synthesize the first pulse light and the second pulse light passing through the delay optical system and divide and emit the synthesized pulse light, and an illumination system configured to guide the pulse lights emitted from the optical system to the mask and illuminate the mask.

Abstract: A resin composition for producing a molded article having a surface which has an appearance of a non-woven fabric, which comprises fiber piles of a carbonized polyacrylonitrile having a nitrogen content of 10% by weight or more, a size of 1 to 15 denier and a length of 0.1 to 1 mm. A process for producing a molded article of a resin having a surface which has an appearance of a non-woven fabric which comprises mixing the resin composition with an uncolored resin and molding the prepared mixture. A molded article produced by molding the resin composition. The resin composition can be pelletized with stability and, when the resin composition is mixed with pellets of an uncolored resin and molded, the molded article shows excellent mechanical properties and durability for a long time, exhibits a non-woven fabric appearance with warmth ad depth and has an excellent recycling property.

Abstract: An electrodeposition film forming method includes forming an electrodeposited film of an electrodeposition coating material having good thermal fluidity by a first electrodeposition; forming an electrodeposition film in a very small through-hole provided on a conductive or semiconductive substrate; removing electrodeposited film at an opening portion of the through-hole under a wet-coated condition; and hardening the electrodeposition film to obtain a flat portion other than the opening portion. Then, a second electrodeposition film of an electrodeposition coating material having good thermal fluidity is formed around the opening portion and is hardened to coat uncoated portions of the opening portion remaining after the first deposition. Accordingly, a flat inner surface of the through-hole is obtained, any exposed portions of an underlayer at the opening of the through-hole are covered and the opening of the through-hole is maintained.

Abstract: An object is to provide a sound generation method for basic information having chaos and fractal, so that a sound is generated by converting basic information having chaos and fractal into data that are numerically operable, by calculating characteristics of chaos and fractal from the basic information, which has chaos and fractal, and by applying a generation rule to the data of chaos and fractal.

Abstract: An electrodeposition film forming method includes forming an electrodeposited film of an electrodeposition coating material having good thermal fluidity by a first electrodeposition; forming an electrodeposition film in a very small through-hole provided on a conductive or semiconductive substrate; removing electrodeposited film at an opening portion of the through-hole under a wet-coated condition; and hardening the electrodeposition film to obtain a flat portion other than the opening portion. Then, a second electrodeposition film of an electrodeposition coating material having good thermal fluidity is formed around the opening portion and is hardened to coat uncoated portions of the opening portion remaining after the first deposition. Accordingly, a flat inner surface of the through-hole is obtained, any exposed portions of an underlayer at the opening of the through-hole are covered and the opening of the through-hole is maintained.

Abstract: A stick for beating a percussion instrument. The instrument has an elastic component. A part of the stick forms a handle used for holding the stick. The elastic component is a part of the handle.

Abstract: A stick for beating a percussion instrument. The instrument has an elastic component. A part of the stick forms a handle used for holding the stick. The elastic component is a part of the handle.

Abstract: A resin composition for producing a molded article having a surface which has an appearance of a non-woven fabric, which comprises fiber piles of carbonized polyacrylonitrile having a nitrogen content of 10% by weight or more or fiber piles of viscose rayon mass-colored with a pigment; a process for producing a molded article of a resin having a surface which has an appearance of a non-woven fabric which comprises mixing the resin composition with an uncolored resin and molding the prepared mixture; and a molded article produced by using the resin composition. The resin composition can be pelletized with stability and, when the resin composition is mixed with pellets of an uncolored resin and molded, the molded article shows excellent mechanical properties and durability for a long time, exhibits a non-woven fabric appearance with warmth and depth and has an excellent recycling property.

Abstract: A resin composition for producing a molded article having a surface which has an appearance of a non-woven fabric, which comprises fiber piles of a carbonized polyacrylonitrile having a nitrogen content of 10% by weight or more, a size of 1 to 15 denier and a length of 0.1 to 1 mm. A process for producing a molded article of a resin having a surface which has an appearance of a non-woven fabric which comprises mixing the resin composition with an uncolored resin and molding the prepared mixture. A molded article produced by molding the resin composition. The resin composition can be pelletized with stability and, when the resin composition is mixed with pellets of an uncolored resin and molded, the molded article shows excellent mechanical properties and durability for a long time, exhibits a non-woven fabric appearance with warmth ad depth and has an excellent recycling property.