Abstract: A large-sized substrate having a diagonal length of not less than 500 mm and a ratio of flatness/diagonal length of not more than 6×10?6 is disclosed. By use of the large-sized substrate for exposure of the present invention, the exposure accuracy, particularly the register accuracy and resolution are enhanced, so that it is possible to achieve high-precision exposure of a large-sized panel. With the processing method according to the present invention, it is possible to stably obtain a large-sized photomask substrate with a high flatness, and since the CD accuracy (dimensional accuracy) at the time of exposure of the panel is enhanced, it is possible to perform exposure of a fine pattern, leading to a higher yield of the panel. Furthermore, by applying the processing method according to the present invention, it is also possible to create an arbitrary surface shape.

Abstract: A phase difference detecting device includes a splitter for splitting laser beams into a first group which will travel along a first path and a second group which will travel along a second path, a beam selection/extraction unit for selecting, as reference light, one beam from the first group to allow it to pass therethrough, a path length changing unit for changing the length of the first path, a combining unit for combining the reference light and beams which construct the second group to produce interference light, and a detector for detecting the intensity of the interference light. The device changes the length of the first path using the path length changing unit to detect a path length which maximizes the intensity of the interference light for each of the beams which construct the second group, and determines a phase difference among the beams from the detected path length.

Abstract: A grating alignment device performs alignment of two or more plane gratings so as to eliminate an angular misalignment and a phase misalignment which are caused between respective diffracted light beams generated when incident light is diffracted by the plane gratings. Specifically, alignment is performed by appropriately adjusting an angle A, an angle B, an angle C, a coordinate Z, and a coordinate X of the second plane grating so as to eliminate at least one of the angular misalignment and the phase misalignment which are caused between the respective diffracted light beams generated when incident light is diffracted by the first plane grating and the second plane grating.

Abstract: The invention is a method for efficiently preparing alkali cellulose having a uniform alkali distribution therein. More specifically, the invention is a method for preparing alkali cellulose comprising steps of bringing pulp into continuous contact with an alkali metal hydroxide solution in a bucket conveyor type contactor to generate a contact mixture, and draining the contact mixture; a method for preparing a cellulose ether comprising use of the alkali cellulose thus prepared; and an apparatus for preparing alkali cellulose comprising a bucket conveyor contactor comprising at least one inlet port for introducing pulp and an alkali metal hydroxide solution at one end and at least one outlet port for discharging a contact mixture wherein the pulp and the alkali metal hydroxide solution can be moved from one end to the other end while bringing them into contact with each other to generate the contact mixture; and a drainer for separating a cake from the contact mixture discharged from the outlet port.

Abstract: The invention is a method for efficiently preparing alkali cellulose having a uniform alkali distribution therein. More specifically, the invention is a method for preparing alkali cellulose comprising steps of bringing pulp into continuous contact with an alkali metal hydroxide solution in a rotary feeder type contactor to generate a contact mixture, and draining the contact mixture; and a method for preparing cellulose ether comprising use of the alkali cellulose thus prepared; an apparatus for preparing alkali cellulose, comprising a rotary feeder comprising a cyclic housing comprising an inlet port and an outlet port, a cyclic contact drum being circularly rotatable along the housing in the housing and comprising a plurality of filter cells arranged in a circumferential direction, and a filtrate-discharging tube being disposed in a diameter direction inside of the cyclic contact drum and collecting the filtrate which has passed the filter, and a drainer for draining a cake discharged from the contactor.

Abstract: The invention is an efficient method for preparing alkali cellulose having the low water content and a uniform alkali distribution therein. More specifically, the invention is a method for continuously preparing alkali cellulose comprising steps of bringing pulp into continuous contact with an alkali metal hydroxide solution to generate a contact mixture and then draining the contact mixture by a centrifugal separator. The invention also includes a method for preparing cellulose ether comprising a step of etherifying the alkali cellulose.

Abstract: The invention is a method for efficiently preparing alkali cellulose having a uniform alkali distribution therein. More specifically, pulp and an excess alkali metal hydroxide solution are introduced continuously in a screw conveyor type contactor and brought into contact with each other in the screw conveyor type reactor. By changing at least one factor selected from the group consisting of a rotation speed of the screw conveyor, a screw pitch and a length of immersion zone, a ratio of an alkali to cellulose in the alkali cellulose obtained by draining is controlled. The alkali cellulose thus obtained is etherified into the corresponding cellulose ether.

Abstract: The invention is a method for efficiently preparing alkali cellulose having a uniform alkali distribution therein. More specifically, the invention is a method for preparing alkali cellulose comprising steps of bringing pulp into continuous contact with an alkali metal hydroxide solution in a pipe type contactor to generate a contact mixture and draining the contact mixture; a method for preparing cellulose ether comprising use of the alkali cellulose; and an apparatus for preparing alkali cellulose, comprising a pipe type contactor having at least one inlet port at one end thereof for introducing pulp and an alkali metal hydroxide solution, and an outlet port at the other end for discharging a contact mixture, wherein the pulp and the alkali metal hydroxide solution are moved from one end to the other end while bringing them into contact with each other, and a drainer for separating a cake from the contact mixture discharged from the contactor.

Abstract: A large-sized substrate having a diagonal length of not less than 500 mm and a ratio of flatness/diagonal length of not more than 6×10?6 is disclosed. By use of the large-sized substrate for exposure of the present invention, the exposure accuracy, particularly the register accuracy and resolution are enhanced, so that it is possible to achieve high-precision exposure of a large-sized panel. With the processing method according to the present invention, it is possible to stably obtain a large-sized photomask substrate with a high flatness, and since the CD accuracy (dimensional accuracy) at the time of exposure of the panel is enhanced, it is possible to perform exposure of a fine pattern, leading to a higher yield of the panel. Furthermore, by applying the processing method according to the present invention, it is also possible to create an arbitrary surface shape.

Abstract: A large-sized substrate having a diagonal length of not less than 500 mm and a ratio of flatness/diagonal length of not more than 6.0×10?6 is disclosed. By use of the large-sized substrate for exposure of the present invention, the exposure accuracy, particularly the register accuracy and resolution are enhanced, so that it is possible to achieve high-precision exposure of a large-sized panel. With the processing method according to the present invention, it is possible to stably obtain a large-sized photomask substrate with a high flatness, and since the CD accuracy (dimensional accuracy) at the time of exposure of the panel is enhanced, it is possible to perform exposure of a fine pattern, leading to a higher yield of the panel. Furthermore, by applying the processing method according to the present invention, it is also possible to create an arbitrary surface shape.

Abstract: The present invention is to solve the problems caused by a conventional method for producing a zinc chloride-loaded support wherein zinc chloride is adsorbed on a solid support in an aqueous solution of zinc chloride. The problems include environmental destruction caused by the treatment of a used aqueous solution of zinc chloride, corrosion to a reactor, a threat to health for workers, deterioration of zinc chloride due to deliquescence thereof, and reduction of specific surface area.

Abstract: A link-mechanism base is prepared within a yoke portion, and a link member is prepared in connection with the base within left and right supports. The link member connects the upper part of the supports or the upper part of the yoke portion, and the link-mechanism base. The displacement and angle of rotation of the upper part of the yoke portion are measured by using these link-mechanism base and link member, thereby measuring a change in the pointing direction of a reflector.

Abstract: A reflecting mirror supporting mechanism has a reflecting mirror with countersinks in the side thereof, a mirror holder (a base) for supporting the reflecting mirror, and leaf springs which urge a base-side face of each of the countersinks against the mirror holder. The reflecting mirror is movable in an in-plane direction of the reflecting mirror, and the base-side face in each of the countersinks is parallel with the rear of the reflecting mirror. A first pad is disposed in a space between the leaf spring and the base-side face. In a space between the rear of the reflecting mirror and the mirror holder, a second pad is provided which is flat in shape in a contact portion with the rear of the reflecting mirror and is spherical in shape in a contact portion with the mirror holder.

Abstract: A link-mechanism base is prepared within a yoke portion, and a link member is prepared in connection with the base within left and right supports. The link member connects the upper part of the supports or the upper part of the yoke portion, and the link-mechanism base. The displacement and angle of rotation of the upper part of the yoke portion are measured by using these link-mechanism base and link member, thereby measuring a change in the pointing direction of a reflector.

Abstract: The present invention is to solve the problems caused by a conventional method for producing a zinc chloride-loaded support wherein zinc chloride is adsorbed on a solid support in an aqueous solution of zinc chloride. The problems include environmental destruction caused by the treatment of a used aqueous solution of zinc chloride, corrosion to a reactor, a threat to health for workers, deterioration of zinc chloride due to deliquescence thereof, and reduction of specific surface area.

Abstract: A binder for hydraulic compositions comprises a water-soluble cellulose ether and a long-chain alkylbenzene-sulfonic acid or a neutralization salt thereof. The presence of the long-chain alkylbenzenesulfonic acid compound as a binder component provides hydraulic compositions with a better plasticity at a lower water-soluble cellulose ether content than when the cellulose ether is used alone as the binder.

Abstract: A reflecting mirror supporting mechanism has a reflecting mirror with countersinks in the side thereof, a mirror holder (a base) for supporting the reflecting mirror, and leaf springs which urge a base-side face of each of the countersinks against the mirror holder. The reflecting mirror is movable in an in-plane direction of the reflecting mirror, and the base-side face in each of the countersinks is parallel with the rear of the reflecting mirror. A first pad is disposed in a space between the leaf spring and the base-side face. In a space between the rear of the reflecting mirror and the mirror holder, a second pad is provided which is flat in shape in a contact portion with the rear of the reflecting mirror and is spherical in shape in a contact portion with the mirror holder.

Abstract: A large-sized substrate having a diagonal length of not less than 500 mm and a ratio of flatness/diagonal length of not more than 6.0×10−6 is disclosed. By use of the large-sized substrate for exposure of the present invention, the exposure accuracy, particularly the register accuracy and resolution are enhanced, so that it is possible to achieve high-precision exposure of a large-sized panel. With the processing method according to the present invention, it is possible to stably obtain a large-sized photomask substrate with a high flatness, and since the CD accuracy (dimensional accuracy) at the time of exposure of the panel is enhanced, it is possible to perform exposure of a fine pattern, leading to a higher yield of the panel. Furthermore, by applying the processing method according to the present invention, it is also possible to create an arbitrary surface shape.

Abstract: A binder for hydraulic compositions comprises a water-soluble cellulose ether and a long-chain alkylbenzenesulfonic acid or a neutralization salt thereof. The presence of the long-chain alkylbenzenesulfonic acid compound as a binder component provides hydraulic compositions with a better plasticity at a lower water-soluble cellulose ether content than when the cellulose ether is used alone as the binder.

Abstract: A binder for hydraulic compositions comprises a water-soluble cellulose ether and a long-chain alkylbenzene-sulfonic acid or a neutralization salt thereof. The presence of the long-chain alkylbenzenesulfonic acid compound as a binder component provides hydraulic compositions with a better plasticity at a lower water-soluble cellulose ether content than when the cellulose ether is used alone as the binder.