Abstract: For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.

Abstract: Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged particle optical system and a sample, said charged particle beam apparatus eliminating a contact between the sample and the partitioning film even in the cases where the sample has recesses and protrusions. On the basis of detection signals or an image generated on the basis of the detection signals, a distance between a sample and a partitioning film is monitored, said detection signals being outputted from a detector that detects secondary charged particles discharged from the sample due to irradiation of a primary charged particle beam.

Abstract: For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.

Abstract: For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.

Abstract: Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged particle optical system and a sample, said charged particle beam apparatus eliminating a contact between the sample and the partitioning film even in the cases where the sample has recesses and protrusions. On the basis of detection signals or an image generated on the basis of the detection signals, a distance between a sample and a partitioning film is monitored, said detection signals being outputted from a detector that detects secondary charged particles discharged from the sample due to irradiation of a primary charged particle beam.

Abstract: Disclosed is a method for enabling flexibility of the exoskeletons or joints of aquatic organisms immersed in an ion liquid water solution to be maintained without destroying their original forms by reducing the difference in osmotic pressure between the inside and outside of the aquatic organisms, preventing dehydration of biological samples. First, the aquatic organism is put into a low-concentration ionic liquid to increase continuously the concentration of the ionic liquid, enabling the water content of the aquatic organism to be substituted by a high-concentration ionic liquid in their original forms. The use of the increasing method that gentle increase in temperature of the ionic liquid by means of natural seasoning reduces the osmotic pressure difference between the inside and outside of the aquatic organism, increasing the concentration of the ionic liquid inside of the aquatic organism.

Abstract: A charged particle beam apparatus is provided with a parameter adjustment practice function for allowing any user to easily learn manual focus adjustment and stigma adjustment. Control conditions of the focus arrangement of an objective lens, an X-stigmator and a Y-stigmator are set according to the user's operation. According to a group of the focus adjustment, an X-stigma adjustment and a Y-stigma adjustment which are set, a practice-purpose image corresponding to the control conditions is read out from a storage device and is displayed on a screen.

Abstract: For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.

Abstract: Disclosed is a method for enabling flexibility of the exoskeletons or joints of aquatic organisms immersed in an ion liquid water solution to be maintained without destroying their original forms by reducing the difference in osmotic pressure between the inside and outside of the aquatic organisms, preventing dehydration of biological samples. First, the aquatic organism is put into a low-concentration ionic liquid to increase continuously the concentration of the ionic liquid, enabling the water content of the aquatic organism to be substituted by a high-concentration ionic liquid in their original forms. The use of the increasing method that gentle increase in temperature of the ionic liquid by means of natural seasoning reduces the osmotic pressure difference between the inside and outside of the aquatic organism, increasing the concentration of the ionic liquid inside of the aquatic organism.

Abstract: In recent years, a range of users for a charged particle beam apparatus such as a scanning electron microscope has been broadened. All users want to learn a manual adjustment technology, but it is very difficult to adjust all parameters for observation to have an appropriate value. Therefore, a beginner is unlikely to sufficiently show a performance of an apparatus. This disclosure aims to provide the charged particle beam apparatus including a parameter adjustment practice function for allowing any user to easily learn the manual adjustment technology. In order to solve the above-described problem, there is provided means for practicing a focus adjustment and a stigma adjustment. Control conditions of the focus arrangement of an objective lens, an X-stigmator and a Y-stigmator are set according to the user's operation.

Abstract: A micro sample floating on the surface of an ionic liquid is observed by scanning electron microscopy without the sample being covered with the ionic liquid. A floating or hydrophobic sample is floated on the surface of a hydrophilic ionic liquid aqueous solution to prevent the micro sample from being covered with the ionic liquid. A hydrophobic ionic liquid is used for hydrophilic samples. With the use of an ionic liquid aqueous solution of low viscosity and large flowability, the micro sample is allowed to freely aggregate, disperse, and align on the surface of the ionic liquid, and to refloat even when settled in the ionic liquid. For easy observation with a scanning electron microscope, the ionic liquid aqueous solution is dried to lower the flowability of the ionic liquid aqueous solution, after the form of the micro sample has stabilized and before electron microscope observation.

Abstract: A micro sample floating on the surface of an ionic liquid is observed by scanning electron microscopy without the sample being covered with the ionic liquid. A floating or hydrophobic sample is floated on the surface of a hydrophilic ionic liquid aqueous solution to prevent the micro sample from being covered with the ionic liquid. A hydrophobic ionic liquid is used for hydrophilic samples. With the use of an ionic liquid aqueous solution of low viscosity and large flowability, the micro sample is allowed to freely aggregate, disperse, and align on the surface of the ionic liquid, and to refloat even when settled in the ionic liquid. For easy observation with a scanning electron microscope, the ionic liquid aqueous solution is dried to lower the flowability of the ionic liquid aqueous solution, after the form of the micro sample has stabilized and before electron microscope observation.

Abstract: Firstly, displacement between an electron microscope image and an optical image is minimized; secondly, color information obtained by an optical image device having a digital picture function is added to an electron0 microscope image; and thirdly, a whole structure of equipment is simplified. The main character is that a mirror and backscattered electron detector is used and an electron beam to strike on a specimen and an optical axis from the optical image device coincide with each other. Addition of a function of an optical mirror to a backscattered electron detector permits a whole structure of equipment to be simplified, and a beam axis of an electron microscope and the optical axis of the optical image device to coincide with each other.

Abstract: High resolution observation is achieved at a low acceleration voltage of 5 kV or below under a high pressure condition of a sample chamber. A sample chamber has a double structure and an inner sample chamber for keeping low vacuum is arranged inside an outer sample chamber having high vacuum. A relatively high negative voltage such as ?1 to ?9 kV for decelerating electrons immediately before a sample is applied between the outer sample chamber and the inner sample chamber. When an incident electron beam passes through an objective lens, an electron beam keeping high energy and having small aberration is formed and is decelerated immediately before the sample to acquire high resolution at a low acceleration voltage.