Abstract: A microconnection device and a method of forming such a device include providing an array of electrically interconnected conductors within through holes of an insulative flexible film. Preferably, each conductor has a microbump. Since the conductors are interconnected, the microbumps define a cluster for contact with a single contact, such as an input/output pad of a semiconductor device. In the preferred embodiment, the flexible film includes a cavity at the central region of the cluster, thereby enhancing the flexibility of the film. By applying a load force within the central region of the cluster, the flexible film is caused to bend in a manner to achieve load compliance and a lateral scrub for removing contaminants, oxides and the like at the interface of the microbumps and the contact. A top bump that is misaligned with the microbumps may be formed to ensure proper localization of the load force within the central region. Preferably, the flexible film includes an array of microconnection devices.