Patents by Inventor Masami DODO

Masami DODO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and control position setting method
    Patent number: 12787704
    Abstract: A substrate processing apparatus includes a vacuum container, a rotary table, a stage, a lifter, and a controller that controls an operation of the lifter. The controller automatically sets a control position in the operation of the lifter. The controller, in (A), repeatedly raises the lifter by a first pitch and then determines whether or not the lifter has come into contact with a substrate, thereby bring the lifter to come into contact with the substrate to set a next position. The controller, in (B), repeatedly raises the lifter from the next position by a second pitch shorter than the first pitch and then determines whether or not the lifter has come into contact with the substrate, thereby detecting a touch position and calculating the control position based on the touch position.
    Type: Grant
    Filed: February 28, 2024
    Date of Patent: November 3, 2026
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Ryoya Tominaga, Akashi Fujio, Masami Dodo, Gaku Watanabe, Hiroyuki Wada
  • SUBSTRATE PROCESSING APPARATUS AND CONTROL POSITION SETTING METHOD
    Publication number: 20240297061
    Abstract: A substrate processing apparatus includes a vacuum container, a rotary table, a stage, a lifter, and a controller that controls an operation of the lifter. The controller automatically sets a control position in the operation of the lifter. The controller, in (A), repeatedly raises the lifter by a first pitch and then determines whether or not the lifter has come into contact with a substrate, thereby bring the lifter to come into contact with the substrate to set a next position. The controller, in (B), repeatedly raises the lifter from the next position by a second pitch shorter than the first pitch and then determines whether or not the lifter has come into contact with the substrate, thereby detecting a touch position and calculating the control position based on the touch position.
    Type: Application
    Filed: February 28, 2024
    Publication date: September 5, 2024
    Inventors: Ryoya TOMINAGA, Akashi FUJIO, Masami DODO, Gaku WATANABE, Hiroyuki WADA