Abstract: A method for cleaning a substrate with sherbet-like composition, comprising mixing the liquid organic agent and pure water in a mixing vessel to form a mixture, supercooling the mixture uniformly at a predetermined temperature while stirring the mixture, wherein the stirring includes creating vortices in the mixture, growing the vortices and diffusing the grown vortices in the mixture, thus providing sherbet-like cleaning composition and moving the sherbet-like cleaning composition relative to the substrate to be cleaned.

Abstract: A system for cleaning a substrate according to the present invention comprises an apparatus for producing a sherbet-like composition consisting of snow ice grains and a chemical agent, holder means for holding a substrate to be cleaned, supply means for supplying to the substrate the sherbet-like composition for cleaning the substrate, and means for moving the sherbet-like composition being supplied relative to at least one of the surfaces of the substrate.

Abstract: The apparatus for cleaning a substrate comprises cleaning chambers each of which is disposed on a respective side with reference to a clearance therebetween. The apparatus further comprises a plurality of chucks which clamp the substrate to be cleaned and move the substrate between the inside the clearance between the cleaning chambers and the outside thereof, a pair of screws each of which is disposed to be rotatable and close to a respective surface of the substrate when the substrate is introduced into the clearance between the cleaning chambers, liquid supplying nozzles which supply the screws with pure water or mixed liquid including pure water and medicinal liquid, and snow ice supplying nozzles which supply the screws with snow ice having a predetermined granular diameter. The opposite surfaces of the substrate are cleaned by rotating pure water or mixed liquid including pure water and medicinal liquid by means of the screws to press it against the opposite surfaces of the substrate.