Patents by Inventor Masami Ikoto

Masami Ikoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspecting method and apparatus for repeated micro-miniature patterns
    Patent number: 6944325
    Abstract: An apparatus for inspecting foreign matter in repeated micro-miniature patterns formed upon a surface of an object to be inspected, comprising: an inspection light illuminating device for irradiating an inspection light directed upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; a scattered light detector for detecting scattered light of the inspection light being scattered upon the surface said object to be inspected; means for obtaining a first information related to a foreign matter attaching upon the surface of said object to be inspected, which is obtained on a basis of the detection of said scattered light by said scattered light detector; an illumination means for applying a bright field illumination upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; means for picking up the image of the foreign matter, under a bright field illumination by said illumination means; means for obtaining a second
    Type: Grant
    Filed: September 8, 2003
    Date of Patent: September 13, 2005
    Assignee: Hitachi High-Tech Electronics Engineering Co., Ltd.
    Inventors: Junichi Taguchi, Aritoshi Sugimoto, Masami Ikoto, Yuko Inoue, Tetsuya Watanabe, Wakana Shinke
  • Inspecting method and apparatus for repeated micro-miniature patterns
    Publication number: 20040047500
    Abstract: An apparatus for inspecting foreign matter in repeated micro-miniature patterns formed upon a surface of an object to be inspected, comprising: an inspection light illuminating device for irradiating an inspection light directed upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; a scattered light detector for detecting scattered light of the inspection light being scattered upon the surface said object to be inspected; means for obtaining a first information related to a foreign matter attaching upon the surface of said object to be inspected, which is obtained on a basis of the detection of said scattered light by said scattered light detector; an illumination means for applying a bright field illumination upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; means for picking up the image of the foreign matter, under a bright field illumination by said illumination means; means for obtaining a second
    Type: Application
    Filed: September 8, 2003
    Publication date: March 11, 2004
    Inventors: Junichi Taguchi, Aritoshi Sugimoto, Masami Ikoto, Yuko Inoue, Tetsuya Watanabe, Wakana Shinke