Patents by Inventor Masami Katsuyama
Masami Katsuyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9543111Abstract: Provided is a charged particle beam device or charged particle microscope permitting observation of even a large-sized specimen in the air atmosphere or a gaseous atmosphere. A charged particle beam device that adopts a thin film which partitions a vacuum atmosphere and the air atmosphere (or gaseous atmosphere) includes a charged particle optical lens barrel in which a charged particle optical system is stored, a housing in which a route along which a primary charged particle beam emitted from the charged particle optical lens barrel reaches the thin film is sustained in the vacuum atmosphere, and a mechanism that bears the charged particle optical lens barrel and first housing against a device installation surface. As the bearing mechanism, a housing having an opening through which a large-sized specimen is carried in or a mechanism having a shape other than the shape of the housing, such as, a post is adopted.Type: GrantFiled: November 2, 2011Date of Patent: January 10, 2017Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Yusuke Ominami, Sukehiro Ito, Masami Katsuyama
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Publication number: 20130313430Abstract: Provided is a charged particle beam device or charged particle microscope permitting observation of even a large-sized specimen in the air atmosphere or a gaseous atmosphere. A charged particle beam device that adopts a thin film which partitions a vacuum atmosphere and the air atmosphere (or gaseous atmosphere) includes a charged particle optical lens barrel in which a charged particle optical system is stored, a housing in which a route along which a primary charged particle beam emitted from the charged particle optical lens barrel reaches the thin film is sustained in the vacuum atmosphere, and a mechanism that bears the charged particle optical lens barrel and first housing against a device installation surface. As the bearing mechanism, a housing having an opening through which a large-sized specimen is carried in or a mechanism having a shape other than the shape of the housing, such as, a post is adopted.Type: ApplicationFiled: November 2, 2011Publication date: November 28, 2013Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Yusuke Ominami, Sukehiro Ito, Masami Katsuyama
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Patent number: 6659441Abstract: In a travelling worktable apparatus including a roller guide unit to guide a travelling table. Deformation of a sample table caused in association with precision of the guide unit such as deviation in precision of rail attachment and precision of rollers is prevented while keeping rigidity of the roller guide. This keeps a fixed distance between a bar mirror unit and a sample on the sample table. For this purpose, the Y table (top table) of the prior art is subdivided into a travelling table to hold the roller guide and a sample table to mount a sample thereon. These tables are fixed by a pin which can be more easily deformed than the tables and are linked with each other by an elastic body.Type: GrantFiled: July 29, 2002Date of Patent: December 9, 2003Assignee: Hitachi, Ltd.Inventors: Masaki Mizuochi, Yoshimasa Fukushima, Masami Katsuyama, Toshinori Kobayashi
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Publication number: 20030020225Abstract: In a travelling worktable apparatus including a roller guide unit to guide a travelling table. Deformation of a sample table caused in association with precision of the guide unit such as deviation in precision of rail attachment and precision of rollers is prevented while keeping rigidity of the roller guide. This keeps a fixed distance between a bar mirror unit and a sample on the sample table. For this purpose, the Y table (top table) of the prior art is subdivided into a travelling table to hold the roller guide and a sample table to mount a sample thereon. These tables are fixed by a pin which can be more easily deformed than the tables and are linked with each other by an elastic body.Type: ApplicationFiled: July 29, 2002Publication date: January 30, 2003Applicant: HITACHI, LTD.Inventors: Masaki Mizuochi, Yoshimasa Fukushima, Masami Katsuyama, Toshinori Kobayashi
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Publication number: 20020185799Abstract: In a travelling worktable apparatus including a roller guide unit to guide a travelling table. Deformation of a sample table caused in association with precision of the guide unit such as deviation in precision of rail attachment and precision of rollers is prevented while keeping rigidity of the roller guide. This keeps a fixed distance between a bar mirror unit and a sample on the sample table. For this purpose, the Y table (top table) of the prior art is subdivided into a travelling table to hold the roller guide and a sample table to mount a sample thereon. These tables are fixed by a pin which can be more easily deformed than the tables and are linked with each other by an elastic body.Type: ApplicationFiled: July 29, 2002Publication date: December 12, 2002Applicant: HITACHI, LTD.Inventors: Masaki Mizuochi, Yoshimasa Fukushima, Masami Katsuyama, Toshinori Kobayashi
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Patent number: 6446950Abstract: In a travelling worktable apparatus including a roller guide unit to guide a travelling table. Deformation of a sample table caused in association with precision of the guide unit such as deviation in precision of rail attachment and precision of rollers is prevented while keeping rigidity of the roller guide. This keeps a fixed distance between a bar mirror unit and a sample on the sample table. For this purpose, the Y table (top table) of the prior art is subdivided into a travelling table to hold the roller guide and a sample table to mount a sample thereon. These tables are fixed by a pin which can be more easily deformed than the tables aid are linked with each other by an elastic body.Type: GrantFiled: February 27, 2001Date of Patent: September 10, 2002Assignee: Hitachi, Ltd.Inventors: Masaki Mizuochi, Yoshimasa Fukushima, Masami Katsuyama, Toshinori Kobayashi
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Publication number: 20010024008Abstract: In a travelling worktable apparatus including a roller guide unit to guide a travelling table. Deformation of a sample table caused in association with precision of the guide unit such as deviation in precision of rail attachment and precision of rollers is prevented while keeping rigidity of the roller guide. This keeps a fixed distance between a bar mirror unit and a sample on the sample table. For this purpose, the Y table (top table) of the prior art is subdivided into a travelling table to hold the roller guide and a sample table to mount a sample thereon. These tables are fixed by a pin which can be more easily deformed than the tables and are linked with each other by an elastic body.Type: ApplicationFiled: February 27, 2001Publication date: September 27, 2001Applicant: Hitachi, Ltd.Inventors: Masaki Mizuochi, Yoshimasa Fukushima, Masami Katsuyama, Toshinori Kobayashi