Abstract: The present invention provides: a multilayer film structure which has high crystallinity and planarity; and a method for producing this multilayer film structure. This multilayer film structure is provided with: an Si (111) substrate; a first thin film that is arranged on the Si (111) substrate, while being formed of a nitride material and/or aluminum; and a second thin film that is arranged on the first thin film, while being formed of a nitride material. An amorphous layer having a thickness of 0 nm or more but less than 1.0 nm are present on the Si (111) substrate; and the full width at half maximum (FWHM) of a rocking curve of the (0002) plane at the surface of this multilayer film structure is 1.50° or less.

Abstract: The masking jig includes a contact member and a support unit. The contact member includes a through-hole allowing for insertion of a rod-like piston rod, and a deformation part around the through-hole configured to get elastically deformed by insertion of a male thread of the piston rod into the through-hole and contact the outer peripheral end face of the piston rod. The support unit supports the contact member such that the contact member moves in a direction intersecting an axial direction of the piston rod.

Abstract: The masking jig includes a contact member and a support unit. The contact member includes a through-hole allowing for insertion of a rod-like piston rod, and a deformation part around the through-hole configured to get elastically deformed by insertion of a male thread of the piston rod into the through-hole and contact the outer peripheral end face of the piston rod. The support unit supports the contact member such that the contact member moves in a direction intersecting an axial direction of the piston rod.

Abstract: A direct-acting electromagnetic valve which is arranged to apply balanced fluid pressures to the opposite ends of a valve body 10 while ensuring smooth and stabilized movements of the valve body 10 in switching operations. For these purposes, a couple of cheers 16 and 17 which are formed in association with the opposite ends of the valve body 10 are communicated with each other by way of an axial through hole 12 within the valve body, and guide rings 15 are provided on the opposite end portions of the valve body 10 to guide its sliding movements. Gap spaces 15a are formed in these guide rings 15 to communicate the two chambers 16 and 17 with valve bore portions where exhaust ports EA and EB are opened.