Patents by Inventor Masami Mesuda

Masami Mesuda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20260201541
    Abstract: Disclosed is a molybdenum sputtering target having a content of metal impurities of 100 ppm by mass or less, a tungsten content of 50 ppm by mass or less, and an oxygen concentration of 50 ppm by mass or less.
    Type: Application
    Filed: November 29, 2023
    Publication date: July 16, 2026
    Inventors: Yoichiro KODA, Osamu MATSUNAGA, Daiki SHONO, Masami MESUDA
  • Patent number: 12662430
    Abstract: An object of the present invention is to provide a high-density Cr—Si—C-based sintered body including chromium (Cr), silicon (Si) and carbon (C) and is furthermore to provide at least one of the high-density Cr—Si—C-based sintered body, a sputtering target including the sintered body or a method for producing a film using the sputtering target. The present invention can provide a Cr—Si—C-based sintered body including chromium (Cr), silicon (Si) and carbon (C), wherein the sintered body has a relative density of 90% or more and a porosity of 13% or less.
    Type: Grant
    Filed: July 27, 2021
    Date of Patent: June 23, 2026
    Assignee: TOSOH CORPORATION
    Inventors: Hiroyuki Hara, Masami Mesuda, Ayaka Masuda
  • Patent number: 12557567
    Abstract: Provided are a crack-free laminated film and a structure including this laminated film. This laminated film includes: a buffer layer; and at least one layer of gallium nitride base film disposed on the buffer layer. Moreover, the compression stress of the entire laminated film is ?2.0 to 5.0 GPa.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: February 17, 2026
    Assignee: TOSOH CORPORATION
    Inventors: Yuya Suemoto, Yoshihiro Ueoka, Masami Mesuda
  • Patent number: 12528711
    Abstract: A powder of gallium nitride has an oxygen content of 0.5 at or less. A green body formed by charging 8 g of the powder into a rectangular cuboidal die having a size of 10 mm×40 mm and uniaxially pressing the powder at a pressure of 100 MPa has an electrical resistivity of 1.0×107?·cm or less.
    Type: Grant
    Filed: June 4, 2024
    Date of Patent: January 20, 2026
    Assignee: TOSOH CORPORATION
    Inventors: Yoshiro Kususe, Shinichi Hara, Junya Iihama, Masami Mesuda
  • Patent number: 12515952
    Abstract: Provided are gallium nitride particles that have a low oxygen content and a high moldability and allow a gallium nitride sputtering target having a high density and a high strength to be produced. By causing a mixed powder of gallium oxide and gallium nitride to react at a temperature of 1000-1100° C. such that an ammonia reaction amount per hour is 1 or more times (by mole) an amount of gallium charged, gallium nitride particles are obtained of which an oxygen content is 1 atm % or less, an average particle size of primary particles is 5 ?m or more, and a particle size of a range of 10 area % from smallest particles of a particle size distribution (10% particle size) is 3 ?m or less.
    Type: Grant
    Filed: June 14, 2018
    Date of Patent: January 6, 2026
    Assignee: TOSOH CORPORATION
    Inventors: Masami Mesuda, Hideto Kuramochi
  • Publication number: 20250354251
    Abstract: A metal material includes a metal having a body-centered cubic structure, in which with respect to a sum of orientation area fractions of a {001} plane, a {101} plane and a {111} plane, a ratio of the orientation area fraction of the {111} plane is 0.45 or more.
    Type: Application
    Filed: May 18, 2023
    Publication date: November 20, 2025
    Inventors: Daiki SHONO, Masami MESUDA, Taiga KONDO
  • Publication number: 20250353793
    Abstract: Provided is at least one of a gallium nitride sintered body; a method for industrially producing the sintered body; a sputtering target including the sintered body; and a method for depositing a film with the sputtering target. With the gallium nitride sintered body, a sputtered film can be deposited at a faster deposition rate than with a gallium nitride sintered body produced by a hot-pressing process. A gallium nitride sintered body has a standard deviation of a porosity of 1.0% or less as determined from a scanning electron microscope image of a cross section of the gallium nitride sintered body.
    Type: Application
    Filed: June 9, 2023
    Publication date: November 20, 2025
    Inventors: Yoshiro KUSUSE, Junya IIHAMA, Shinichi HARA, Masami MESUDA
  • Patent number: 12410101
    Abstract: The object of the present invention is to provide a large-sized gallium nitride-based sintered body having a small oxygen amount and high strength, a large-sized gallium nitride-based sintered body having a small oxygen amount and containing a dopant, to obtain a highly crystalline gallium nitride thin film which has become a n-type or p-type semiconductor by a dopant, and methods for producing them. A gallium nitride-based sintered body, which has an oxygen content of at most 1 atm % and an average particle size (D50) of at least 1 ?m and at most 150 ?m.
    Type: Grant
    Filed: October 7, 2019
    Date of Patent: September 9, 2025
    Assignee: TOSOH CORPORATION
    Inventors: Masami Mesuda, Hideto Kuramochi, Yuya Tsuchida
  • Patent number: 12392025
    Abstract: A method for producing a chromium sintered body includes a heat treatment step of heat-treating electrolytic chromium flakes at 1,200° C. or higher and 1,400° C. or lower, and a firing step of, after the heat treatment step, filling a container with the electrolytic chromium flakes and firing a resulting filling product by hot isostatic pressing.
    Type: Grant
    Filed: March 8, 2023
    Date of Patent: August 19, 2025
    Assignees: TOSOH CORPORATION, TOSOH SPECIALITY MATERIALS CORPORATION
    Inventors: Masami Mesuda, Daiki Shono, Kenichi Itoh, Koichi Hanawa
  • Patent number: 12385126
    Abstract: A sputtering target includes crystal grains, has a content of an amorphous phase of 3% by volume or less, and contains at least one metal selected from the group consisting of chromium, molybdenum, and chromium-molybdenum alloys.
    Type: Grant
    Filed: October 5, 2022
    Date of Patent: August 12, 2025
    Assignees: TOSOH CORPORATION, TOSOH SPECIALITY MATERIALS CORPORATION
    Inventors: Daiki Shono, Taiga Kondo, Masami Mesuda, Kenichi Itoh, Koichi Hanawa
  • Patent number: 12351455
    Abstract: High-purity gallium nitride particles having a low oxygen content suitable for a raw material or a sintered body is provided. Gallium nitride particles characterized in that the oxygen content is 0.5 at % or less and the total impurity amount of elements, Si, Ge, Sn, Pb, Be, Mg, Ca, Sr, Ba, Zn and Cd, is less than 10 wtppm are used.
    Type: Grant
    Filed: October 2, 2020
    Date of Patent: July 8, 2025
    Assignee: TOSOH CORPORATION
    Inventors: Masami Mesuda, Hideto Kuramochi, Shinichi Hara
  • Publication number: 20250212691
    Abstract: An aluminum scandium nitride film contains aluminum, scandium, and nitrogen and further contains gallium. A crystal phase of the aluminum scandium nitride film may include a hexagonal crystal. The crystal phase of the aluminum scandium nitride film may have a wurtzite structure.
    Type: Application
    Filed: March 30, 2023
    Publication date: June 26, 2025
    Inventors: Masami MESUDA, Yoshiro KUSUSE, Junya IIHAMA, Yuya SUEMOTO, Yoshihiro UEOKA, Hiroshi FUNAKUBO, Takahisa SHIRAISHI, Shinnosuke YASUOKA, Ryoichi MIZUTANI, Reika OTA
  • Publication number: 20250206673
    Abstract: Provided is at least one of a gallium nitride sintered body that is less subject to increases in oxygen content caused by re-oxidation after sintering than known gallium nitride sintered bodies obtained by the hot pressing process, a method for producing the gallium nitride sintered body, or use of the gallium nitride sintered body. The gallium nitride sintered body comprises a surface layer having a higher density than an inner portion of the sintered body. The atomic mass ratio of gallium to the sum of gallium and nitrogen is more than 0.5 and 0.60 or less.
    Type: Application
    Filed: March 17, 2023
    Publication date: June 26, 2025
    Inventors: Junya IIHAMA, Yoshiro KUSUSE, Shinichi HARA, Erisa KANO, Masami MESUDA
  • Patent number: 12247297
    Abstract: The present invention provides: a multilayer film structure which has high crystallinity and planarity; and a method for producing this multilayer film structure. This multilayer film structure is provided with: an Si (111) substrate; a first thin film that is arranged on the Si (111) substrate, while being formed of a nitride material and/or aluminum; and a second thin film that is arranged on the first thin film, while being formed of a nitride material. An amorphous layer having a thickness of 0 nm or more but less than 1.0 nm are present on the Si (111) substrate; and the full width at half maximum (FWHM) of a rocking curve of the (0002) plane at the surface of this multilayer film structure is 1.50° or less.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: March 11, 2025
    Assignees: TOSOH CORPORATION, National Institute for Materials Science
    Inventors: Yuya Tsuchida, Yuya Suemoto, Yoshihiro Ueoka, Masami Mesuda, Hideto Kuramochi, Takahiro Nagata, Liwen Sang, Toyohiro Chikyow
  • Patent number: 12241147
    Abstract: A silicide-based alloy material and a device in which the silicide-based alloy material is used are disclosed. The silicide-based alloy material can reduce environmental impact and provide high thermoelectric FIGURE of merit at room temperature. Provided is a silicide-based alloy material comprising, as major components, silver, barium and silicon, wherein atomic ratios of elements that constitute the alloy material are as follows: 9 at %?Ag/(Ag+Ba+Si)?27 at %, 20 at %?Ba/(Ag+Ba+Si)?53 at %, and 37 at %?Si/(Ag+Ba+Si)?65 at %, where Ag represents a content of the silver, Ba represents a content of the barium and Si represents a content of the silicon, and the silicide-based alloy material has an average grain size of less than or equal to 20 ?m.
    Type: Grant
    Filed: May 17, 2021
    Date of Patent: March 4, 2025
    Assignee: TOSOH CORPORATION
    Inventors: Ryo Akiike, Yoichiro Koda, Masami Mesuda
  • Patent number: 12227830
    Abstract: Provided is an yttrium ingot from which an yttrium sputtering target that produces a reduced number of particles can be obtained, and an yttrium sputtering target that has high plasma resistance and a low resistance that enables realization of a high film deposition rate can be obtained. An yttrium ingot, wherein the yttrium ingot has a fluorine atom content of less than or equal to 10 wt %; in an instance where the yttrium ingot constitutes a target, a sputtering surface of the target has a surface roughness of 10 nm or greater and 2 ?m or less; in the yttrium ingot, the number of pores having a diameter of greater than or equal to 100 ?m is fewer than or equal to 0.1/cm2; and the yttrium ingot has a relative density of greater than or equal to 96%.
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: February 18, 2025
    Assignee: TOSOH CORPORATION
    Inventors: Yuya Tsuchida, Masami Mesuda, Hiroyuki Hara, Osamu Matsunaga
  • Patent number: 12173398
    Abstract: A Cr—Si sintered body contains Cr and Si. The Cr—Si sintered body contains a crystalline CrSi2 phase and a crystalline Si phase. A content of the Si phase in the Cr—Si sintered body is 40% by mass or more. A relative density of the Cr—Si sintered body relative to a true density of the Cr—Si sintered body is 95% or more. The CrSi2 phase has an average crystal grain size of 40 ?m or less, and the Si phase has an average crystal grain size of 30 ?m or less. A total content of impurities in the Cr—Si sintered body is 200 ppm by mass or less, and the impurities are composed of at least one element selected from the group consisting of Mn, Fe, Mg, Ca, Sr, and Ba.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: December 24, 2024
    Assignee: TOSOH CORPORATION
    Inventors: Hiroyuki Hara, Masami Mesuda, Ayaka Masuda
  • Publication number: 20240409429
    Abstract: A powder of gallium nitride has an oxygen content of 0.5 at or less. A green body formed by charging 8 g of the powder into a rectangular cuboidal die having a size of 10 mm×40 mm and uniaxially pressing the powder at a pressure of 100 MPa has an electrical resistivity of 1.0×107 ?·cm or less.
    Type: Application
    Filed: June 4, 2024
    Publication date: December 12, 2024
    Inventors: Yoshiro KUSUSE, Shinichi HARA, Junya IIHAMA, Masami MESUDA
  • Publication number: 20240410049
    Abstract: A sputtering target includes crystal grains, has a content of an amorphous phase of 3% by volume or less, and contains at least one metal selected from the group consisting of chromium, molybdenum, and chromium-molybdenum alloys.
    Type: Application
    Filed: October 5, 2022
    Publication date: December 12, 2024
    Inventors: Daiki SHONO, Taiga KONDO, Masami MESUDA, Kenichi ITOH, Koichi HANAWA
  • Publication number: 20240401184
    Abstract: A laminate includes a structure in which a Si (111) substrate, an oxygen-containing aluminum nitride film, and a gallium nitride film are laminated. The laminate is obtained by a production method for a laminate that is characterized by having a structure in which a Si (111) substrate, an oxygen-containing aluminum nitride film, and a gallium nitride film are laminated, the production method having: an AlN film-formation step in which an aluminum nitride film is formed on the Si (111) substrate and an Si substrate including an aluminum nitride film is obtained; an oxidation step in which the Si substrate including the aluminum nitride film is treated in an oxidizing atmosphere and a Si substrate including an oxygen-containing aluminum nitride film is obtained; and a GaN film-formation step in which a gallium nitride film is formed on the Si substrate including the oxygen-containing aluminum nitride film.
    Type: Application
    Filed: October 6, 2022
    Publication date: December 5, 2024
    Inventors: Yuya SUEMOTO, Yoshihiro UEOKA, Masami MESUDA, Takahiro NAGATA, Liwen SANG, Toyohiro CHIKYOW