Patents by Inventor Masami Mesuda

Masami Mesuda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11802049
    Abstract: A sputtering target for a gallium nitride thin film, which has a low oxygen content, a high density and a low resistivity. A gallium nitride powder having powder physical properties of a low oxygen content and a high bulk density is used and hot pressing is conducted at high temperature in high vacuum to prepare a gallium nitride sintered body having a low oxygen content, a high density and a low resistivity.
    Type: Grant
    Filed: February 1, 2022
    Date of Patent: October 31, 2023
    Assignee: TOSOH CORPORATION
    Inventors: Masami Mesuda, Hideto Kuramochi
  • Publication number: 20230287560
    Abstract: A method for producing a chromium sintered body includes a heat treatment step of heat-treating electrolytic chromium flakes at 1,200° C. or higher and 1,400° C. or lower, and a firing step of, after the heat treatment step, filling a container with the electrolytic chromium flakes and firing a resulting filling product by hot isostatic pressing.
    Type: Application
    Filed: March 8, 2023
    Publication date: September 14, 2023
    Inventors: Masami MESUDA, Daiki SHONO, Kenichi ITOH, Koichi HANAWA
  • Publication number: 20230242452
    Abstract: An object of the present invention is to provide a high-density Cr—Si—C-based sintered body including chromium (Cr), silicon (Si) and carbon (C) and is furthermore to provide at least one of the high-density Cr—Si—C-based sintered body, a sputtering target including the sintered body or a method for producing a film using the sputtering target. The present invention can provide a Cr—Si—C-based sintered body including chromium (Cr), silicon (Si) and carbon (C), wherein the sintered body has a relative density of 90% or more and a porosity of 13% or less.
    Type: Application
    Filed: July 27, 2021
    Publication date: August 3, 2023
    Applicant: TOSOH CORPORATION
    Inventors: Hiroyuki HARA, Masami MESUDA, Ayaka MASUDA
  • Publication number: 20230242401
    Abstract: High-purity gallium nitride particles having a low oxygen content suitable for a raw material or a sintered body is provided. Gallium nitride particles characterized in that the oxygen content is 0.5 at % or less and the total impurity amount of elements, Si, Ge, Sn, Pb, Be, Mg, Ca, Sr, Ba, Zn and Cd, is less than 10 wtppm are used.
    Type: Application
    Filed: October 2, 2020
    Publication date: August 3, 2023
    Inventors: Masami MESUDA, Hideto KURAMOCHI, Shinichi HARA
  • Publication number: 20230220538
    Abstract: A metal-Si based powder contains a metal-Si based particle including a plurality of crystal phase grains. The crystal phase grains include a crystal phase containing a compound of a metal and Si. The crystal phase grains have an average grain size of, for example, 20 ?m or less. The metal-Si based particle has an average particle size of, for example, 5 to 100 ?m.
    Type: Application
    Filed: May 24, 2021
    Publication date: July 13, 2023
    Applicant: TOSOH CORPORATION
    Inventors: Hiroyuki HARA, Masami MESUDA
  • Publication number: 20230212734
    Abstract: Provided is an yttrium ingot from which an yttrium sputtering target that produces a reduced number of particles can be obtained, and an yttrium sputtering target that has high plasma resistance and a low resistance that enables realization of a high film deposition rate can be obtained. An yttrium ingot, wherein the yttrium ingot has a fluorine atom content of less than or equal to 10 wt %; in an instance where the yttrium ingot constitutes a target, a sputtering surface of the target has a surface roughness of 10 nm or greater and 2 ?m or less; in the yttrium ingot, the number of pores having a diameter of greater than or equal to 100 ?m is fewer than or equal to 0.1/cm2; and the yttrium ingot has a relative density of greater than or equal to 96%.
    Type: Application
    Filed: April 19, 2021
    Publication date: July 6, 2023
    Applicant: TOSOH CORPORATION
    Inventors: Yuya TSUCHIDA, Masami MESUDA, Hiroyuki HARA, Osamu MATSUNAGA
  • Publication number: 20230183844
    Abstract: A silicide-based alloy material and a device in which the silicide-based alloy material is used are disclosed. The silicide-based alloy material can reduce environmental impact and provide high thermoelectric FIGURE of merit at room temperature. Provided is a silicide-based alloy material comprising, as major components, silver, barium and silicon, wherein atomic ratios of elements that constitute the alloy material are as follows: 9 at %?Ag/(Ag+Ba+Si)?27 at %, 20 at %?Ba/(Ag+Ba+Si)?53 at %, and 37 at %?Si/(Ag+Ba+Si)?65 at %, where Ag represents a content of the silver, Ba represents a content of the barium and Si represents a content of the silicon, and the silicide-based alloy material has an average grain size of less than or equal to 20 ?m.
    Type: Application
    Filed: May 17, 2021
    Publication date: June 15, 2023
    Inventors: Ryo AKIIKE, Yoichiro KODA, Masami MESUDA
  • Publication number: 20230143194
    Abstract: Provided are a crack-free laminated film and a structure including this laminated film. This laminated film includes: a buffer layer; and at least one layer of gallium nitride base film disposed on the buffer layer. Moreover, the compression stress of the entire laminated film is ?2.0 to 5.0 GPa.
    Type: Application
    Filed: March 29, 2021
    Publication date: May 11, 2023
    Inventors: Yuya SUEMOTO, Yoshihiro UEOKA, Masami MESUDA
  • Publication number: 20230121940
    Abstract: A Cr—Si sintered body contains Cr and Si. The Cr—Si sintered body contains a crystalline CrSi2 phase and a crystalline Si phase. A content of the Si phase in the Cr—Si sintered body is 40% by mass or more. A relative density of the Cr—Si sintered body relative to a true density of the Cr—Si sintered body is 95% or more. The CrSi2 phase has an average crystal grain size of 40 ?m or less, and the Si phase has an average crystal grain size of 30 ?m or less. A total content of impurities in the Cr—Si sintered body is 200 ppm by mass or less, and the impurities are composed of at least one element selected from the group consisting of Mn, Fe, Mg, Ca, Sr, and Ba.
    Type: Application
    Filed: March 24, 2021
    Publication date: April 20, 2023
    Applicant: TOSOH CORPORATION
    Inventors: Hiroyuki HARA, Masami MESUDA, Ayaka MASUDA
  • Publication number: 20220153582
    Abstract: A sputtering target for a gallium nitride thin film, which has a low oxygen content, a high density and a low resistivity. A gallium nitride powder having powder physical properties of a low oxygen content and a high bulk density is used and hot pressing is conducted at high temperature in high vacuum to prepare a gallium nitride sintered body having a low oxygen content, a high density and a low resistivity.
    Type: Application
    Filed: February 1, 2022
    Publication date: May 19, 2022
    Applicant: TOSOH CORPORATION
    Inventors: Masami MESUDA, Hideto KURAMOCHI
  • Publication number: 20210380488
    Abstract: The object of the present invention is to provide a large-sized gallium nitride-based sintered body having a small oxygen amount and high strength, a large-sized gallium nitride-based sintered body having a small oxygen amount and containing a dopant, to obtain a highly crystalline gallium nitride thin film which has become a n-type or p-type semiconductor by a dopant, and methods for producing them. A gallium nitride-based sintered body, which has an oxygen content of at most 1 atm % and an average particle size (D50) of at least 1 ?m and at most 150 ?m.
    Type: Application
    Filed: October 7, 2019
    Publication date: December 9, 2021
    Applicant: TOSOH CORPORATION
    Inventors: Masami MESUDA, Hideto KURAMOCHI, Yuya TSUCHIDA
  • Patent number: 11168393
    Abstract: The present invention provides a gallium nitride sintered body and a gallium nitride molded article which have high density and low oxygen content without using a special apparatus. According to the first embodiment, a gallium nitride sintered body, which is characterized by having density of 2.5 g/cm3 to less than 5.0 g/cm3 and an intensity ratio of the gallium oxide peak of the (002) plane to the gallium nitride peak of the (002) plane of less than 3%, which is determined by X-ray diffraction analysis, can be obtained. According to the second embodiment, a metal gallium-impregnated gallium nitride molded article, which is characterized by comprising a gallium nitride phase and a metal gallium phase that exist as separate phases and having a molar ratio, Ga/(Ga+N), of 55% to 80%, can be obtained.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: November 9, 2021
    Assignee: TOSOH CORPORATION
    Inventors: Masami Mesuda, Keitaro Matsumaru, Koyata Takahashi, Ryou Kikuchi, Tetsuo Shibutami
  • Publication number: 20210139328
    Abstract: Provided are gallium nitride particles that have a low oxygen content and a high moldability and allow a gallium nitride sputtering target having a high density and a high strength to be produced. By causing a mixed powder of gallium oxide and gallium nitride to react at a temperature of 1000-1100° C. such that an ammonia reaction amount per hour is 1 or more times (by mole) an amount of gallium charged, gallium nitride particles are obtained of which an oxygen content is 1 atm % or less, an average particle size of primary particles is 5 ?m or more, and a particle size of a range of 10 area % from smallest particles of a particle size distribution (10% particle size) is 3 ?m or less.
    Type: Application
    Filed: June 14, 2018
    Publication date: May 13, 2021
    Applicant: TOSOH CORPORATION
    Inventors: Masami MESUDA, Hideto KURAMOCHI
  • Publication number: 20190106784
    Abstract: The present invention provides a gallium nitride sintered body and a gallium nitride molded article which have high density and low oxygen content without using a special apparatus. According to the first embodiment, a gallium nitride sintered body, which is characterized by having density of 2.5 g/cm3 to less than 5.0 g/cm3 and an intensity ratio of the gallium oxide peak of the (002) plane to the gallium nitride peak of the (002) plane of less than 3%, which is determined by X-ray diffraction analysis, can be obtained. According to the second embodiment, a metal gallium-impregnated gallium nitride molded article, which is characterized by comprising a gallium nitride phase and a metal gallium phase that exist as separate phases and having a molar ratio, Ga/(Ga+N), of 55% to 80%, can be obtained.
    Type: Application
    Filed: November 30, 2018
    Publication date: April 11, 2019
    Applicant: TOSOH CORPORATION
    Inventors: Masami MESUDA, Keitaro MATSUMARU, Koyata TAKAHASHI, Ryou KIKUCHI, Tetsuo SHIBUTAMI
  • Patent number: 10174419
    Abstract: The present invention provides a gallium nitride sintered body and a gallium nitride molded article which have high density and low oxygen content without using a special apparatus. According to the first embodiment, a gallium nitride sintered body, which is characterized by having density of 2.5 g/cm3 to less than 5.0 g/cm3 and an intensity ratio of the gallium oxide peak of the (002) plane to the gallium nitride peak of the (002) plane of less than 3%, which is determined by X-ray diffraction analysis, can be obtained. According to the second embodiment, a metal gallium-impregnated gallium nitride molded article, which is characterized by comprising a gallium nitride phase and a metal gallium phase that exist as separate phases and having a molar ratio, Ga/(Ga+N), of 55% to 80%, can be obtained.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: January 8, 2019
    Assignee: TOSOH CORPORATION
    Inventors: Masami Mesuda, Keitaro Matsumaru, Koyata Takahashi, Ryou Kikuchi, Tetsuo Shibutami
  • Patent number: 9920420
    Abstract: Provided is an apparatus that includes a molding die for producing a sintered body. The molding die is configured for cold isostatic pressing and includes a knockdown mold frame comprised of plural frame members and a bottom plate provided in contact with the knockdown mold frame. An upper punch is provided to be movable along the inner surface of the knockdown mold frame. The frame members configured to be movable relative to each other to accommodate an expansion of a green body which takes place at the time of reducing the pressure after the completion of pressing.
    Type: Grant
    Filed: July 21, 2015
    Date of Patent: March 20, 2018
    Assignee: TOSOH CORPORATION
    Inventors: Kenichi Itoh, Masami Mesuda, Hitoshi Nagayama, Tetsuo Shibutami, Shunsuke Yatsunami
  • Publication number: 20180072570
    Abstract: The object of the present invention is to provide a sputtering target for a gallium nitride thin film, which has a low oxygen content, a high density and a low resistivity. A gallium nitride powder having powder physical properties of a low oxygen content and a high bulk density is used and hot pressing is conducted at high temperature in high vacuum to prepare a gallium nitride sintered body having a low oxygen content, a high density and a low resistivity.
    Type: Application
    Filed: March 24, 2016
    Publication date: March 15, 2018
    Applicant: TOSOH CORPORATION
    Inventors: Masami MESUDA, Hideto KURAMOCHI
  • Patent number: 9396830
    Abstract: There is provided a zinc oxide sintered compact with a zirconium content of 10 to 1000 ppm, and a sputtering target containing the zinc oxide sintered compact. There is also provided a zinc oxide thin-film having a zirconium content of 10 to 2000 ppm and a resistivity of 10 ?·cm or greater.
    Type: Grant
    Filed: November 25, 2011
    Date of Patent: July 19, 2016
    Assignee: TOSOH CORPORATION
    Inventors: Masami Mesuda, Hideto Kuramochi, Hitoshi Iigusa, Kenji Omi, Tetsuo Shibutami
  • Publication number: 20150368791
    Abstract: Provided is an apparatus that includes a molding die for producing a sintered body. The molding die is configured for cold isostatic pressing and includes a knockdown mold frame comprised of plural frame members and a bottom plate provided in contact with the knockdown mold frame. An upper punch is provided to be movable along the inner surface of the knockdown mold frame. The frame members configured to be movable relative to each other to accommodate an expansion of a green body which takes place at the time of reducing the pressure after the completion of pressing.
    Type: Application
    Filed: July 21, 2015
    Publication date: December 24, 2015
    Applicant: TOSOH CORPORATION
    Inventors: Kenichi ITOH, Masami MESUDA, Hitoshi NAGAYAMA, Tetsuo SHIBUTAMI, Shunsuke YATSUNAMI
  • Publication number: 20130273346
    Abstract: The present invention provides a gallium nitride sintered body and a gallium nitride molded article which have high density and low oxygen content without using a special apparatus. According to the first embodiment, a gallium nitride sintered body, which is characterized by having density of 2.5 g/cm3 to less than 5.0 g/cm3 and an intensity ratio of the gallium oxide peak of the (002) plane to the gallium nitride peak of the (002) plane of less than 3%, which is determined by X-ray diffraction analysis, can be obtained. According to the second embodiment, a metal gallium-impregnated gallium nitride molded article, which is characterized by comprising a gallium nitride phase and a metal gallium phase that exist as separate phases and having a molar ratio, Ga/(Ga+N), of 55% to 80%, can be obtained.
    Type: Application
    Filed: December 20, 2011
    Publication date: October 17, 2013
    Applicant: TOSOH CORPORATION
    Inventors: Masami Mesuda, Keitaro Matsumaru, Koyata Takahashi, Ryou Kikuchi, Tetsuo Shibutami