Abstract: A metal-containing onium salt compound suitable for use as a photodegradable base of a resist composition and a resist composition using the metal-containing onium salt compound are provided, the resist composition having excellent sensitivity to ionizing radiation such as extreme ultraviolet (EUV), excellent resolution and focal depth in lithography, and can reduce line width roughness (LWR) in a fine pattern. The onium salt compound including a specific metal is used as the photodegradable base.

Abstract: A photosensitive compound which can be suitably used for a resist composition having superior sensitivity with respect to light of short wavelength such as KrF and the like, especially to extreme ultraviolet or electron beam, superior resolution and depth of focus in lithography, and can suppress LER (line edge roughness) in fine pattern, a resist composition using the photosensitive compound, and a manufacturing method of a device is provided. A photosensitive compound including a divalent Te atom is provided.

Abstract: A metal-containing onium salt compound suitable for use as a photodegradable base of a resist composition and a resist composition using the metal-containing onium salt compound are provided, the resist composition having excellent sensitivity to ionizing radiation such as extreme ultraviolet (EUV), excellent resolution and focal depth in lithography, and can reduce line width roughness (LWR) in a fine pattern. The onium salt compound including a specific metal is used as the photodegradable base.

Abstract: A photosensitive compound which can be suitably used for a resist composition having superior sensitivity with respect to light of short wavelength such as KrF and the like, especially to extreme ultraviolet or electron beam, superior resolution and depth of focus in lithography, and can suppress LER (line edge roughness) in fine pattern, a resist composition using the photosensitive compound, and a manufacturing method of a device is provided. A photosensitive compound including a divalent Te atom is provided.

Abstract: A photosensitive resin realizes formation of a pattern having a good shape, without introducing poor compatibility between an acid generator and a photoresist primary-component polymer having an acid-dissociable group, and a photosensitive composition containing the photosensitive resin. The photosensitive resin includes a repeating unit represented by formula (1): (wherein R1 represents a C2-C9 linear or branched divalent hydrocarbon group; each of R2 to R5 represents a hydrogen atom or a C1-C3 linear or branched hydrocarbon group; each of R6 and R7 represents an organic group, wherein R6 and R7 may together form a divalent organic group; and X?represents an anion); at least one of a repeating unit represented by formula (2): (wherein R8 represents a C2-C9 linear or branched hydrocarbon group) and a repeating unit represented by formula (3): a repeating unit represented by formula (4): optionally, a repeating unit represented by formula (5).

Abstract: To provide a photosensitive resin which realizes formation of a pattern having a good shape, without involving a problem in terms of poor compatibility between an acid generator and a photoresist primary-component polymer having an acid dissociable group, and a photosensitive composition containing the photosensitive resin.

Abstract: A method of manufacturing a spindle motor including a rotor hub having a hard disk placing portion, a base to which the rotor hub is rotatably attached via a bearing, and a coil inducing a magnetic field when energized and arranged at an inside space between the rotor hub and the base, and whose inside space is separated from the outside space by a substantially circular gap maintained between the rotor hub and the base, is provided. The spindle motor preferably includes one or more waterproofed portions including at least a portion of a surface of the rotor hub and a surface of the base facing each other and defining the gap connecting the inside space and the outside space of the spindle motor.

Abstract: A method for producing a high-purity 1,2-naphthoquinonediazide photosensitive agent containing a low level of impurities, by condensing, in an organic solvent other than amide, polyhydric phenolic compound and 1,2-naphthoquinonediazide-sulfonic acid halide in the presence of organic amine; subsequently adding amide solvent to the resultant reaction mixture; and separating the resulting organic amine acid salt through filtration.

Abstract: A dynamic pressure bearing apparatus comprises a rotary shaft, a sintered oil retaining bearing rotatably supporting the rotary shaft, the sintered oil retaining bearing having an interior surface defining an internal surface configuration for generating dynamic pressure to thereby form a dynamic pressure bearing between the rotary shaft and the sintered oil retaining bearing. The internal surface of the sintered oil retaining bearing comprises in a peripheral direction thereof, a minimum-gap section, a large-gap section and a separation groove section. The minimum-gap section has the minimum gap between the rotary shaft and the internal surface of the sintered oil retaining bearing.

Abstract: A method for producing a high-purity 1,2-naphthoquinonediazide photosensitive agent containing a low level of impurities, by condensing, in an organic solvent other than amide, polyhydric phenolic compound and 1,2-naphthoquinonediazide-sulfonic acid halide in the presence of organic amine; subsequently adding amide solvent to the resultant reaction mixture; and separating the resulting organic amine acid salt through filtration.

Abstract: A fluid sealing device for use in a motor having a fluid bearing for mounting a frame to a shaft. The fluid sealing device includes a bearing fluid reservoir, a sealing plate, and a bearing fluid absorbing pad. The bearing fluid reservoir is positioned at one axial end of the fluid bearing. The sealing plate is mounted on the frame and positioned axially outward of the bearing fluid reservoir. The sealing plate has an inner edge extending radially toward the shaft to provide a sealing space between the shaft and the sealing plate. A bearing fluid absorbing pad is mounted axially inward from the sealing plate. A capture space is provided between the bearing fluid absorbing pad, sealing plate and reservoir such that the bearing fluid absorbing pad is exposed to the reservoir.

Abstract: A hydrodynamic bearing apparatus comprises two hydrodynamic bearing sections which have a shaft member, a bearing member fit to the shaft member with a predetermined space therein, lubricants filling the space between the shaft member and the bearing member, and which are separately placed in the axial direction of the shaft member. The lubricants of the two hydrodynamic bearing sections are separated from each other by an air layer. The lubricants are pressured by hydrodynamic generating grooves formed on the hydrodynamic bearing sections such that the shaft member and the bearing member are rotatably supported in relation to each other. The hydrodynamic generating grooves separately formed on the two hydrodynamic bearing sections are formed into an unbalanced shape such that the lubricants are moved in a predetermined direction to correct the slope of the shaft member and the bearing member when rotation is suspended.

Abstract: The dynamic pressure bearing device is structured such that the pores of porous material as they are are disposed in the surfaces thereof forming the negative pressure cancel portions 15b and a lubricating fluid is supplied to the negative pressure generating areas thereof through the pores of the negative pressure cancel portions 15b, whereby, even if recess-shaped grooves forming the negative pressure cancel portions 15b are formed shallow in depth and wide in width, or even if such grooves themselves are not formed at all, the dynamic pressure bearing device is able to fulfill its negative pressure cancel function in a sufficient manner. This makes it possible to eliminate the need for provision of the conventional recess-shaped grooves which are formed deep and narrow, thereby eliminating the need to execute an expensive operation such as a cutting operation or the like, so that the negative pressure cancel portions 15b can be formed at a low cost by inexpensive means such as by molding or the like.

Abstract: A dynamic-pressure fluid bearing comprises bearing parts formed by a pair of dynamic-pressure surfaces. One of the dynamic-pressure surfaces of the bearing parts is a polyamideimide coating thicker than 3 .mu.m and the other surface is metal. The bearing is particularly applicable to driving motors for polygon mirrors. In addition, a so-called particle removing function is added to one or more of the surfaces of the bearing parts or a position nearby that causes easier removal of dust and other particles accumulated on the parts.

Abstract: A gas dynamic pressure bearing apparatus comprises a fixed shaft, a bearing member which is positioned opposite from the fixed shaft and at least a radial gas dynamic pressure bearing portion and a thrust gas dynamic pressure bearing portion which are positioned in a space between the fixed shaft and the bearing member. Dynamic pressure generating means are included for pressurizing gas in the radial gas dynamic pressure bearing portion and the thrust gas dynamic pressure bearing portion such that dynamic pressure action is generated. The bearing member is rotatably supported in relation to the fixed shaft by means of the pressurizing action such that rotational driving is performed by a predetermined motor. The radial gas dynamic pressure bearing portion and the thrust gas dynamic pressure bearing portion are structured such that gas is sealed from the space around the motor by a space sealing means and that gas flows from one side to other.

Abstract: A sealing device for use in a motor. The motor, which maintains a shaft: and a frame that are interconnected by a bearing, includes a magnetic-fluid-seating device and a collecting device. The magnetic-fluid-sealing device seals the bearing with a magnetic fluid to prevent particles and fluids from escaping the bearing, whereas, the collecting device collects any particles and fluids which may escape the magnetic-fluid-sealing device.

Abstract: A hydrodynamic bearing apparatus which includes at least two hydrodynamic bearing sections for rotatably supporting a shaft member and a cylindrical member, where the bearing sections constitute a continuous bearing clearance. A hydrodynamic pressure generating portion is provided for generating a hydrodynamic pressure in a lubricant which is filled in the bearing clearance. One hydrodynamic generating portion is shaped asymmetrically to move the lubricant in one direction. Two capillary sealing sections are also provided. One capillary sealing section is positioned downstream in a moving direction of the lubricant and is configured such that the lubricant moves by a predetermined amount to cancel a differential pressure which is generated at the hydrodynamic bearing sections.

Abstract: A hydrodynamic bearing apparatus for use in a spindle motor. The bearing includes at least two hydrodynamic bearing sections for supporting a rotary member with respect to a fixed member, a hydrodynamic pressure generating mechanism, a space between the two hydrodynamic bearing sections, a lubricant, two capillary sealing sections, and a lubricant reservoir. In the hydrodynamic bearing apparatus, the hydrodynamic pressure generating mechanism is positioned at the hydrodynamic bearing sections, and the capillary sealing section of the two capillary sealing sections has a space capacity which allows for an increased amount of lubricant. The lubricant is moved by a predetermined amount in one direction by a differential pressure generated at the hydrodynamic bearing sections when the rotary member rotates.

Abstract: A motor having a dynamic pressure bearing device equipped with a rotor having a driving coil or a driving magnet, and a stator having the other of the driving coil or the driving magnet, the dynamic pressure bearing device comprising a shaft fixed to the rotor or the stator and having a dynamic pressure surface on its outer surface, a bearing body fixed to the other of the rotor or stator and having a dynamic pressure surface on its inner surface which is positioned to circumferentially confront the outer surface of the shaft body, a dynamic pressure generating groove formed on at least one side of both the dynamic pressure surfaces, and a lubricating fluid in which magnetic particles are dispersed in a base oil solvent containing an amine anti-gelling agent interposed between both of the dynamic pressure surfaces.

Abstract: A hydrodynamic bearing apparatus comprises at least two hydrodynamic bearing units which rotatably support a rotation member against a fixed member by hydrodynamic pressure of a lubricant filled in a bearing space. A thrust plate is adhesively bonded on one of the rotation member and fixed member to support the rotation member in an axial direction. The thrust plate and rotation member or fixed member form a junction. A mechanical bonding device bonds the thrust plate onto one of the rotation member and fixed member. A sealing agent prevents the lubricant from leaking from the junction between the thrust plate and the rotation member or fixed member. The sealing agent fills a space that communicates with the junction.