Abstract: An image capturing control unit controls a video camera so as to capture an image while switching between a first image capturing condition suitable for capturing a laser light spot and a second image capturing condition suitable for capturing an image of a cantilever for each single image. The image composition unit creates an image in which a laser light spot image and a cantilever image clearly appearing in each of two consecutive images are composed and displays the image on a display unit. A laser light center position detection unit, a cantilever tip position detection unit, and a position adjustment amount calculation unit calculate a position adjustment amount for adjusting an optical axis from a laser light center position and a cantilever tip position obtained by image processing from two each of two consecutive images, and also display the calculated numeric value on the display unit.

Abstract: An image capturing control unit controls a video camera so as to capture an image while switching between a first image capturing condition suitable for capturing a laser light spot and a second image capturing condition suitable for capturing an image of a cantilever for each single image. The image composition unit creates an image in which a laser light spot image and a cantilever image clearly appearing in each of two consecutive images are composed and displays the image on a display unit. A laser light center position detection unit, a cantilever tip position detection unit, and a position adjustment amount calculation unit calculate a position adjustment amount for adjusting an optical axis from a laser light center position and a cantilever tip position obtained by image processing from two each of two consecutive images, and also display the calculated numeric value on the display unit.

Abstract: In a liquid crystal array inspection that acquires an imaging picture by scanning a liquid crystal substrate in a two-dimensional manner with an electron beam to inspect a liquid crystal substrate array based on the imaging picture, the imaging picture obtained by imaging a stage with the electron beam is used to determine the amounts of displacement of an imaging range of each electron gun in an X direction and a Y direction. Amounts of correction for correcting displacements of the imaging range of each electron gun in the X direction and the Y direction are calculated according to the determined amounts of displacement. The displacement in the X direction is corrected by controlling the scanning with the electron beam in the X direction, and the displacement in the Y direction is corrected by aligning a mounting position of each electron gun in the Y direction.

Abstract: In a liquid crystal array inspection that acquires an imaging picture by scanning a liquid crystal substrate in a two-dimensional manner with an electron beam to inspect a liquid crystal substrate array based on the imaging picture, the imaging picture obtained by imaging a stage with the electron beam is used to determine the amounts of displacement of an imaging range of each electron gun in an X direction and a Y direction. Amounts of correction for correcting displacements of the imaging range of each electron gun in the X direction and the Y direction are calculated according to the determined amounts of displacement. The displacement in the X direction is corrected by controlling the scanning with the electron beam in the X direction, and the displacement in the Y direction is corrected by aligning a mounting position of each electron gun in the Y direction.

Abstract: A liquid crystal array inspection apparatus for two-dimensional scanning on a liquid crystal substrate. It includes a stage for mounting the liquid crystal substrate; an imaging device provided above and distantly from the stage; an imaging control part for controlling the imaging of the imaging device; a stage driving part for driving the stage in a Y direction; an encoder for detecting a rotation state of a drive motor of the stage driving part; an imaging-start position reaching detection part for detecting that the liquid crystal substrate reaches the imaging-start positions in the Y direction in forward and return courses on the stages based on a detection quantity and an imaging range of the encoder; and an imaging-start trigger signal generating part for generating an imaging-start trigger signal to start the imaging by the imaging control part based on an output from the imaging-start position reaching detection part.