Patents by Inventor Masamichi SHINODA

Masamichi SHINODA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Defect classifying method and optical inspection apparatus for silicon carbide substrate
    Patent number: 9551672
    Abstract: Provided are a defect classifying method and an inspection apparatus which are capable of classifying a defect by distinguishing a basal plane dislocation, which is a killer defect in bipolar high-voltage elements, from other defects. The defect classifying method according to the present invention includes: projecting an illumination beam toward a silicon carbide substrate and forming a reflection image and a photoluminescence image; a first inspection step of detecting a defect image from the reflection image formed; a second inspection step of detecting a defect image from the photoluminescence image formed; and a defect classification step of classifying detected defects based on whether or not the defect image is detected and the shape of the detected defect image.
    Type: Grant
    Filed: December 18, 2014
    Date of Patent: January 24, 2017
    Assignee: Lasertec Corporation
    Inventors: Hirokazu Seki, Masamichi Shinoda, Toshiyuki Todoroki, Yoshihiro Nakano, Makoto Torizawa
  • DEFECT CLASSIFYING METHOD AND INSPECTION APPARATUS
    Publication number: 20150168311
    Abstract: Provided are a defect classifying method and an inspection apparatus which are capable of classifying a defect by distinguishing a basal plane dislocation, which is a killer defect in bipolar high-voltage elements, from other defects. The defect classifying method according to the present invention includes: projecting an illumination beam toward a silicon carbide substrate and forming a reflection image and a photoluminescence image; a first inspection step of detecting a defect image from the reflection image formed; a second inspection step of detecting a defect image from the photoluminescence image formed; and a defect classification step of classifying detected defects based on whether or not the defect image is detected and the shape of the detected defect image.
    Type: Application
    Filed: December 18, 2014
    Publication date: June 18, 2015
    Inventors: Hirokazu SEKI, Masamichi SHINODA, Toshiyuki TODOROKI, Yoshihiro NAKANO, Makoto TORIZAWA