Abstract: A work step of electrical connection between a writing pressure detector and a circuit element of a circuit is reduced. An electronic pen includes a writing pressure detector that detects a pressure applied to a core body disposed on one end side of a tubular chassis in the axial center direction, a circuit board for which a flexible substrate formed into a shape allowed to extend in the axial center direction is used in the chassis, and a holder housed in the chassis in such a manner as to hold the writing pressure detector and the circuit board and extend in the axial center direction. In the circuit board, a writing pressure detector placement part, a circuit placement part at which a predetermined circuit is formed, and a line part at which a line pattern that electrically connects a component of the writing pressure detector placed on the writing pressure detector placement part and a circuit element of the circuit placement part is formed are formed to line up in the axial center direction.

Abstract: A work step of electrical connection between a writing pressure detector and a circuit element of a circuit is reduced. An electronic pen includes a writing pressure detector that detects a pressure applied to a core body disposed on one end side of a tubular chassis in the axial center direction, a circuit board for which a flexible substrate formed into a shape allowed to extend in the axial center direction is used in the chassis, and a holder housed in the chassis in such a manner as to hold the writing pressure detector and the circuit board and extend in the axial center direction. In the circuit board, a writing pressure detector placement part, a circuit placement part at which a predetermined circuit is formed, and a line part at which a line pattern that electrically connects a component of the writing pressure detector placed on the writing pressure detector placement part and a circuit element of the circuit placement part is formed are formed to line up in the axial center direction.

Abstract: An integrated circuit includes a first terminal that is connected to a first end of a first capacitor, the first capacitor being included in a resonant circuit together with a coil, a second terminal that is connected to a second end of the first capacitor, a plurality of second capacitors connected in parallel between the first and second terminals, and a control circuit which, in operation, changes a capacitance of each of the second capacitors. An electronic pen includes the integrated circuit and a resonant circuit, in which the first capacitor includes a variable-capacitance capacitor which, in operation, varies a capacitance of the variable-capacitance capacitor in accordance with pressure applied to a nib of the electronic pen.

Abstract: A work step of electrical connection between a writing pressure detector and a circuit element of a circuit is reduced. An electronic pen includes a writing pressure detector that detects a pressure applied to a core body disposed on one end side of a tubular chassis in the axial center direction, a circuit board for which a flexible substrate formed into a shape allowed to extend in the axial center direction is used in the chassis, and a holder housed in the chassis in such a manner as to hold the writing pressure detector and the circuit board and extend in the axial center direction. In the circuit board, a writing pressure detector placement part, a circuit placement part at which a predetermined circuit is formed, and a line part at which a line pattern that electrically connects a component of the writing pressure detector placed on the writing pressure detector placement part and a circuit element of the circuit placement part is formed are formed to line up in the axial center direction.

Abstract: A template substrate according to an embodiment includes a first face and a second face on an opposite side to the first face. A first region is located on the first face to be protruded from a peripheral portion thereof. A second region is located at least at an end portion of the first region, and is a region in which an alignment mark used at a time of transfer of a pattern is intended to be formed. The second region contains a first impurity and a second impurity.

Abstract: A position indicator includes a first resonance circuit including an inductor and a capacitor, a second resonance circuit including the first resonance circuit and a variation device configured to vary a resonance frequency or a phase of the second resonance circuit in response to an act of a user, and a switch circuit configured to perform changeover between the first resonance circuit and the second resonance circuit. The switch circuit is changed over such that, when no signal is received from outside of the position indicator and when a signal other than a predetermined signal is received from outside of the position indicator, the second resonance circuit is selected, and when the predetermined signal is received from outside of the position indicator, the first resonance circuit is selected, and the selected resonance circuit is configured to electromagnetically couple with a conductor of a sensor of the position detection apparatus.

Abstract: A magnetic core coil has a core formed of a magnetic material, a coil wound around the core, and two terminals formed of a conductive material. The two terminals are fixed to the core, and first portions of the two terminals extend from one end of the core in an axial direction of the core. A first end and a second end of the coil are electrically connected to the first portions of the two terminals which protrude from the one end of the core in the axial direction of the core. The magnetic core coil can be made small in thickness (radial size) and size, and can be produced in a reduced number of production steps and at low cost.

Abstract: According to one embodiment, a chuck cleaner includes a support, an adhesive layer, and a support substrate. The support includes a first portion, a second portion, and a third portion provided between the first portion and the second portion. The support substrate is provided between the support and the adhesive layer. The support substrate includes a first region fixed to the first portion, a second region fixed to the second portion, a third region provided between the first region and the second region and having variable distance from the third portion, a fourth region provided between the first region and the third region and separated from the support, and a fifth region provided between the second region and the third region and separated from the support.

Abstract: According to one embodiment, a chuck cleaner includes a support, an adhesive layer, and a support substrate. The support includes a first portion, a second portion, and a third portion provided between the first portion and the second portion. The support substrate is provided between the support and the adhesive layer. The support substrate includes a first region fixed to the first portion, a second region fixed to the second portion, a third region provided between the first region and the second region and having variable distance from the third portion, a fourth region provided between the first region and the third region and separated from the support, and a fifth region provided between the second region and the third region and separated from the support.

Abstract: A magnetic core coil has a core formed of a magnetic material, a coil wound around the core, and two terminals formed of a conductive material. The two terminals are fixed to the core, and first portions of the two terminals extend from one end of the core in an axial direction of the core. A first end and a second end of the coil are electrically connected to the first portions of the two terminals which protrude from the one end of the core in the axial direction of the core. The magnetic core coil can be made small in thickness (radial size) and size, and can be produced in a reduced number of production steps and at low cost.

Abstract: A position indicator includes a first resonance circuit including an inductor and a capacitor, a second resonance circuit including the first resonance circuit and a variation device configured to vary a resonance frequency or a phase of the second resonance circuit in response to an act of a user, and a switch circuit configured to perform changeover between the first resonance circuit and the second resonance circuit. The switch circuit is changed over such that, when no signal is received from outside of the position indicator and when a signal other than a predetermined signal is received from outside of the position indicator, the second resonance circuit is selected, and when the predetermined signal is received from outside of the position indicator, the first resonance circuit is selected, and the selected resonance circuit is configured to electromagnetically couple with a conductor of a sensor of the position detection apparatus.

Abstract: A template substrate according to an embodiment includes a first face and a second face on an opposite side to the first face. A first region is located on the first face to be protruded from a peripheral portion thereof. A second region is located at least at an end portion of the first region, and is a region in which an alignment mark used at a time of transfer of a pattern is intended to be formed. The second region contains a first impurity and a second impurity.

Abstract: Disclosed herein is a pen pressure detecting module housed in a position indicator, the position indicator having a pen shape and being capable of detecting a pressure applied to a tip portion of the position indicator. The pen pressure detecting module includes a pressure sensing device, a first holder, and a second holder. The pressure sensing device senses the pressure based on a change in a capacitance formed between a first electrode and a second electrode disposed so as to be opposed to each other, which capacitance changes so as to correspond to the pressure that is transmitted to the first electrode. The second holder is housed in the first holder, and the pressure sensing device is disposed so as to sense the pressure applied to the second holder. An engaging portion engaged with a pressure transmitting member that transmits the pressure is formed in the second holder.

Abstract: According to one embodiment, a chuck cleaner includes a support, an adhesive layer, and a support substrate. The support includes a first portion, a second portion, and a third portion provided between the first portion and the second portion. The support substrate is provided between the support and the adhesive layer. The support substrate includes a first region fixed to the first portion, a second region fixed to the second portion, a third region provided between the first region and the second region and having variable distance from the third portion, a fourth region provided between the first region and the third region and separated from the support, and a fifth region provided between the second region and the third region and separated from the support.

Abstract: Disclosed herein is a pen pressure detecting module housed in a position indicator, the position indicator having a pen shape and being capable of detecting a pressure applied to a tip portion of the position indicator. The pen pressure detecting module includes a pressure sensing device, a first holder, and a second holder. The pressure sensing device senses the pressure based on a change in a capacitance formed between a first electrode and a second electrode disposed so as to be opposed to each other, which capacitance changes so as to correspond to the pressure that is transmitted to the first electrode. The second holder is housed in the first holder, and the pressure sensing device is disposed so as to sense the pressure applied to the second holder. An engaging portion engaged with a pressure transmitting member that transmits the pressure is formed in the second holder.

Abstract: A position detector is disclosed, which includes a sensor substrate having a sensor coil for receiving an electromagnetic wave output from a position indicator, and a magnetic path plate that has an area equal to or larger than an area in which the sensor coil is arranged on the sensor substrate. The magnetic path plate is formed by stacking an amorphous layer and a non-amorphous layer, which is formed of metal with relative magnetic permeability lower than that of the amorphous layer. Such magnetic path plate is arranged on a side of the sensor substrate opposite to a side facing the position indicator.

Abstract: A position detecting apparatus includes a display apparatus having a screen for displaying images by changing states of a plurality of display elements arrayed in the screen along a predetermined direction which is parallel to a side boundary of the screen, and at least one detecting conductor disposed on the display apparatus to detect a position indicated on the display apparatus. The at least one detecting conductor is a loop coil having short sides and long sides, the long sides of the loop coil being arranged so as to cross the predetermined direction of the display elements.

Abstract: A display device is provided. The display device includes a display screen having a light-transmissible display conductor extending in a predetermined plane, and at least one detection conductor extending along the predetermined plane, the at least one detection conductor having at least one base line portion formed of a conductor of a first width and a narrow line portion including a plurality of narrow-line conductors of a second width connected in parallel between the at least one base line portion.

Abstract: A sidewall shape correction function is determined in advance which represents the relationship of the difference between contour positions of two or more items of pattern contour position data of different thresholds obtained from an SEM image and optical pattern contour positions determined through an optical method. Two or more items of pattern contour position data of different thresholds are obtained from SEM image data on which a lithographic simulation is to be conducted. Pseudo-optical pattern contour position data are determined from the contour position difference and the sidewall shape correction function. A lithographic simulation is conducted using the pseudo-optical pattern contour position data.