Patents by Inventor Masamitsu KURASHITA

Masamitsu KURASHITA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
    Publication number: 20210039142
    Abstract: There is provided a substrate cleaning apparatus capable of highly effective self-cleaning of a cleaning tool in a short time period. The substrate cleaning apparatus includes a cleaning tool for cleaning a substrate while in contact with a surface of the substrate, a self-cleaning member for self-cleaning the cleaning tool while in contact with the cleaning tool, a rotation mechanism for rotating the cleaning tool, and a holding mechanism for holding the cleaning tool, the holding mechanism being capable of pressing the cleaning tool against the substrate and pressing the cleaning tool against the self-cleaning member.
    Type: Application
    Filed: February 18, 2019
    Publication date: February 11, 2021
    Applicant: Ebara Corporation
    Inventors: Chikako TAKATOH, Akira FUKUNAGA, Masamitsu KURASHITA, Megumi UNO, Satomi HAMADA